Abstract: Methods for fabricating a copper interconnect of a semiconductor device are disclosed. An example method for fabricating a copper interconnect of a semiconductor device deposits a first insulating layer on a substrate having at least one predetermined structure, forms a trench and via hole through the first insulating layer by using a dual damascene process, and deposits a barrier layer along the bottom and the sidewalls of the trench and via hole.

Abstract: A tungsten plug structure of a semiconductor device wherein a method for forming the same is performed at least twice to form a tungsten plug having a low aspect ratio, thereby obtaining an overlap margin between the tungsten plug and a metal line and minimizing contact resistance between the tungsten plug and a lower metal line layer. The plug structure of a semiconductor device includes a silicon substrate in which various elements for the semiconductor device are formed, a first dielectric film formed on the silicon substrate, having a first contact hole, a first plug buried in the first contact hole of the first dielectric film, having a low aspect ratio, a second dielectric film formed on an entire surface including the first dielectric film, having a second contact hole on the first plug, a second plug buried in the second contact hole of the second dielectric film, having a low aspect ratio, and a metal line formed on the second plug.

Abstract: A method of forming a copper interconnection in a semiconductor device is suitable for solving a problem generated from an insulating interlayer of fluorine-doped silicate glass being in direct contact with a large surface area of a barrier metal film or being exposed to air over a correspondingly large surface area when forming a copper interconnection in an insulating interlayer pattern formed on a semiconductor substrate. The method includes steps of forming an insulating interlayer on a semiconductor substrate; patterning the insulating interlayer to form a conductor well; forming a protective layer on an inner sidewall of the conductor well; and sequentially depositing a barrier metal film and a Cu seed on the protective layer to complete a filling of the conductor well.

Abstract: Methods for fabricating a copper interconnect of a semiconductor device are disclosed. An example method for fabricating a copper interconnect of a semiconductor device deposits a first insulating layer on a substrate having at least one predetermined structure, forms a trench and via hole through the first insulating layer by using a dual damascene process, and deposits a barrier layer along the bottom and the sidewalls of the trench and via hole.