Abstract: A substrate processing apparatus includes a table in an exposure chamber that is configured to perform an exposure process on a semiconductor substrate, a guiding device including a first horizontal driving body slidably movable in a first horizontal direction and a guide rail on the first horizontal driving body and having a trench extending in a second horizontal direction, a positioning device connected to the guiding device, the positioning device including a slider, a second horizontal driving body and a substrate stage, the slider configured to slidably move in the second horizontal direction along the trench, the second horizontal driving body connected or fixed to the slider, the substrate stage on the second horizontal driving body and configured to support the semiconductor substrate, and a blocking member between the guide rail and the substrate stage to block an inflow of foreign substances onto the substrate stage.

Abstract: A DC-DC converter, located between a plurality of batteries and a power conversion system, comprises a primary coil connected to a plurality of battery sources and a secondary coil connected to a load through an output switch set, wherein the primary coil may be connected to the plurality of battery sources through a plurality of input switch sets corresponding to the plurality of battery sources.

Abstract: A power distribution apparatus may comprise a converter configured to perform DC-DC conversion between a battery and a power conversion system; and a controller configured to set a droop curve for controlling an output of the converter based on a state of each battery, wherein the converter is configured to receive and store information on the droop curve set by the controller, detect a voltage change in a DC link between the power conversion system and the converter, the voltage change being caused by a start of a charging or a discharging operation, and control the output of the converter based on a detected DC link voltage and the droop curve.

Abstract: A rechargeable lithium battery includes a positive electrode including a positive active material; a negative electrode including a negative active material; a separator positioned between the positive electrode and the negative electrode; and a non-aqueous electrolyte, wherein the negative electrode has an active mass density of about 1.6 g/cc or more, and the rechargeable lithium battery has an inner pressure of about 0.95 kgf/cm2 to about 1.65 kgf/cm2.

Abstract: Discussed is an energy storage system that can include a plurality of first battery racks, a plurality of battery protection units configured to manage the plurality of first battery racks respectively, a plurality of second battery racks, a plurality of DC/DC converters configured to manage the plurality of second battery racks respectively, and a battery section controller configured to monitor outputs of the plurality of battery protection units and outputs of the plurality of DC/DC converters, and to control the outputs of the plurality of DC/DC converters.

Abstract: Disclosed is a lithium battery comprising: a cathode; an anode including a passivation film; and an electrolyte interposed between the cathode and the anode, wherein the passivation film includes 0.5 wt % or more and less than 5 wt % of sulfur (S), and the passivation film has a heating value of 50 J/g or less when a nail penetrates the passivation film. The lithium battery has improved penetration characteristics.

Abstract: Provided is a lithium secondary battery including a positive electrode, a negative electrode, and an electrolyte interposed between the positive electrode and the negative electrode, wherein a passivation layer is on at least one portion of a surface of the negative electrode after one or more cycles of charging and discharging of the lithium secondary battery, and the passivation layer includes a particulate passivation layer and a film-like passivation layer.

Abstract: An improved jig, such as a bucktail jig, is disclosed. A leader assembly is configured to be able to slide within a conduit through the jig body but not be removed. The hook can be attached to the back of the leader assembly by a releasable coupler that has a release point less than a predetermined breaking strength of the leader assembly.

Abstract: Embodiments of the present invention provide an accelerated lifetime estimation device for predicting the lifetime of a secondary battery, and a method thereof. The accelerated lifetime estimation device can accurately estimate a normal lifetime of the secondary battery while reducing an evaluation time period of the secondary battery.

Abstract: Embodiments of the present invention provide an accelerated lifetime estimation device for predicting the lifetime of a secondary battery, and a method thereof. The accelerated lifetime estimation device can accurately estimate a normal lifetime of the secondary battery while reducing an evaluation time period of the secondary battery.

Abstract: The invention relates to a series of pyrrolopyrimidinone derivatives, processes for their preparation, intermediates in their preparation, their use as therapeutic agents, and pharmaceutical compositions containing them.