Abstract: The present invention provides a method and apparatus for cleaning parts used in substrate processing. In a method for cleaning parts of a substrate processing, plasma generated from cleaning gas is supplied together with a cooling medium to clean the parts, but the cooling medium may be provided at a lower temperature than the plasma.

Abstract: Disclosed are a system and method for automatically evaluating an essay. The system includes a structure analysis module configured to divide learning data and learner essay text in a predetermined structure analysis unit, generate structure tagging information for each structure analysis unit, and structure the learning data and the learner essay text by attaching the structure tagging information to the learning data and the learner essay text, a learning module configured to generate an essay evaluation model through learning by using essay text that is included in the structured learning data and the structure tagging information as an input value and using an evaluation score that is included in the structured learning data as a label, and an evaluation module configured to generate essay evaluation results using the essay evaluation model.

Abstract: A electric vehicle cable mounting system includes a driving unit including a rotary disc and allowing a charging cable to be released from a side in accordance with a rotation motion of a rotary disc, a guide unit provided behind the driving unit and allowing the driving unit to move in a vertical direction in accordance with a rotation motion of the rotary disc, and a controller controlling the driving unit and the guide unit such that the charging cable is automatically released in an electric vehicle charge mode and is automatically returned in an electric vehicle charge standby mode.

Abstract: In one example, a semiconductor device can comprise a substrate, a device stack, first and second internal interconnects, and an encapsulant. The substrate can comprise a first and second substrate sides opposite each other, a substrate outer sidewall between the first substrate side and the second substrate side, and a substrate inner sidewall defining a cavity between the first substrate side and the second substrate side. The device stack can be in the cavity and can comprise a first electronic device, and a second electronic device stacked on the first electronic device. The first internal interconnect can be coupled to the substrate and the device stack. The encapsulant can cover the substrate inner sidewall and the device stack and can fill the cavity. Other examples and related methods are disclosed herein.

Abstract: A multilayer capacitor includes a body including a plurality of dielectric layers and a plurality of internal electrodes stacked in a first direction, and external electrodes, wherein the body includes an active portion, a side margin portion covering at least one of a first surface and a second surface of the active portion opposing each other in a second direction, and a cover portion covering the active portion in the first direction, respective dielectric layers among the plurality of dielectric layers include a barium titanate-based composition, the dielectric layer of the side margin portion includes Sn, and a content of Sn in the dielectric layer of the side margin portion is different from that of Sn in the dielectric layer of the active portion, and the dielectric layer of the side margin portion includes at least some grains having a core-shell structure.

Abstract: A display device includes a display panel having flexibility, a storage connected to a first end of the display panel and accommodating the display panel so that the display panel is inserted and withdrawn, an extension part connected to a second end of the display panel, which is opposite to the first end of the display panel, and facing one side of the storage in a first direction, and a display driving integrated circuit which receives image data and a control signal from a host and provides a data signal to the display panel. The display driving integrated circuit includes a data processor which receives a smart size change signal from the host and sets a non-active area of the display panel based on the smart size change signal.

Abstract: The present disclosure relates to an organic electroluminescent compound and an organic electroluminescent device comprising the same. By comprising the compound according to the present disclosure, it is possible to produce an organic electroluminescent device having improved driving voltage, power efficiency, and/or lifetime properties compared to the conventional organic electroluminescent devices.

Abstract: Disclosed is an apparatus and method for performing deep learning operations. The apparatus includes a systolic array comprising multiplier accumulator (MAC) units, and a control circuit configured to control an operation of a multiplexer connected to at least one of the MAC units and operations of the MAC units according to a plurality of operation modes.

Abstract: A compound for an organic optoelectronic device, a composition for an organic optoelectronic device including the same, an organic optoelectronic device, and a display device, the compound is represented by Chemical Formula 1:

Abstract: A method for linear optical quantum computing includes configuring at least two first Greenberger-Horne-Zeilinger (GHZ) states consisting of three photons; configuring at least one second GHZ state consisting of four or more photons by firstly combining the at least two first GHZ states; generating at least one microcluster; forming a plurality of star clusters consisting of four side qubits around the central qubit; configuring Raussendorf-Harringon-Goyal (RHG) lattice by using the plurality of star clusters; and measuring at least one central qubit of the RHG lattice.

Abstract: A thin film transistor array substrate including a substrate including an active area and a non-active area, and a first thin film transistor disposed on the substrate while including a first oxide semiconductor pattern, a first gate electrode overlapping with the first oxide semiconductor pattern, a first gate insulating layer interposed between the first oxide semiconductor pattern and the first gate electrode, a first source electrode and a first drain electrode disposed on and connected to the first oxide semiconductor pattern, and a first light shielding pattern disposed under the first oxide semiconductor pattern and electrically connected to one of the first source electrode and the first drain electrodes. The first gate electrode includes a first portion maintaining a first parasitic capacitance and a second portion maintaining a second parasitic capacitance smaller than the first parasitic capacitance, together with the first oxide semiconductor pattern.

Abstract: A heating, ventilation, and air conditioning (HVAC) system for a cargo vehicle includes an evaporator, a first door, a condenser, a second door, a freezing room, a refrigerating room, a warming room, and a controller, wherein the controller is configured to control an amount of opening of each of the first internal air and external air door, the second internal air and external air door, the first door, and the second door and an amount of driving of each of the evaporator and the condenser in response to an outside air condition of a vehicle, controlling temperature of each of the freezing room, the refrigerating room, and the warming room.

Abstract: The present disclosure relates to a polycarbonate resin composition, and more particularly, to a polycarbonate resin composition containing 90 wt % to 99 wt % of a polycarbonate resin, 0.3 wt % to 0.7 wt % of an anthraquinone-based black dye, and 0.2 wt % to 1.0 wt % of an acrylic polymeric chain extender, and a molded article containing the same.

Abstract: An equipment for inspecting a secondary battery is provided. The equipment includes a loading device on which a secondary battery is loaded in an upright position, and a side portion inspecting device which inspects a side portion of the secondary battery loaded on the loading device, wherein the side portion inspecting device comprises an elevation unit which lifts the secondary battery loaded on the loading device so as to be withdrawn out of the loading device and allows the secondary battery to return to its original position after a first period of time elapses and a side portion inspecting unit which captures an image of the side portion of the secondary battery, which is withdrawn out of the loading device by the elevation unit, thereby inspecting the side portion of the secondary battery.

Abstract: A method for manufacturing a semiconductor device and a semiconductor device produced thereby. For example and without limitation, various aspects of this disclosure provide a method for manufacturing a semiconductor device, and a semiconductor device produced thereby, that comprises an interposer without through silicon vias.

Abstract: A ceramic electronic component includes a body including a dielectric layer and an internal electrode, and an external electrode disposed on the body and connected to the internal electrode. The dielectric layer includes a plurality of dielectric grains, and at least one of the plurality of dielectric grains has a core-dual shell structure having a core and a dual shell. The dual shell includes a first shell surrounding at least a portion of the core, and a second shell surrounding at least a portion of the first shell, and a concentration of a rare earth element included in the second shell is more than 1.3 times to less than 3.8 times a concentration of a rare earth element included in the first shell.

Abstract: The present invention is directed to novel heterodimeric antibodies.

Abstract: An apparatus that communicates with a screen printer and a solder inspection device is disclosed. The apparatus according to the present disclosure may include a process that is configured to: obtain first information associated with each of a plurality of pads on the substrate; obtain second information associated with each piece of the solder paste applied to each of the plurality of pads from the solder inspection device; determine a position correction value for the stencil mask with respect to the substrate based on the first information and the second information; and deliver the position correction value to the screen printer.

Abstract: A secondary battery includes: an electrode assembly including a first electrode plate from which a first current collecting tab protrudes, a second electrode plate from which a second current collecting tab protrudes, and a separator between the first electrode plate and the second electrode plate; a case accommodating the electrode assembly; and a current collector plate electrically connected to the first current collecting tab and including protrusions, and the first current collecting tab is vertically coupled to the current collector plate and includes coupling grooves to which the protrusions are coupled.

Abstract: One embodiment of the present specification provides a siloxane compound represented by Chemical Formula 1 below: In Chemical Formula 1, R1a and R1b are each independently a substituted or unsubstituted straight or branched-chain alkyl group having 1 to 16 carbon atoms, R2a and R2b are each independently a substituted or unsubstituted straight or branched-chain alkyl group having 1 to 16 carbon atoms, R3a and R3b are each independently a substituted or unsubstituted straight or branched-chain alkylene group having 1 to 16 carbon atoms, R4a, R4b, R5a, and R5b are each independently hydrogen, a substituted or unsubstituted straight or branched alkyl group having 1 to 16 carbon atoms, or a substituted or unsubstituted straight or branched-chain heteroalkyl group having 1 to 16 carbon atoms, m1 and m2 are each an integer from 0 to 2, and when m1 and m2 are each 0, a plurality of OR2a and OR2b are the same or different, and when m1 and m2 are each 2, a plurality of R1a and R1b are the same or different, and x