Patents by Inventor In-II Jung

In-II Jung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE TREATING APPARATUS AND METHOD
    Publication number: 20150155188
    Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes a process chamber in which a predetermined process is performed on a substrate, a pressure meter measuring a pressure within the process chamber, and a controller receiving the measured pressure value from the pressure meter to determine an opening time of the process chamber. The controller opens the process chamber when a set condition elapses from a time at which the pressure within the process chamber reaches a preset opening pressure.
    Type: Application
    Filed: December 1, 2014
    Publication date: June 4, 2015
    Inventors: In-II Jung, Woo-Young Kim, Young il Lee, Boong Kim