Abstract: A drone swarm control method is provided. The drone swarm control method includes displaying a drone swarm and a three-dimensional (3D) terrain projected onto a virtual reality (VR) space by using a VR headset, based on user manipulation, selecting a small-scale drone swarm, provided in a region of interest (ROI) set in the 3D terrain, from the drone swarm by using a VR controller, based on the user manipulation, and dividing, by using a server, the ROI into a plurality of cells, respectively allocating the divided plurality of cells to drones included in the small-scale drone swarm, and automatically generating a 3D flight path of a drone allocated to each of the divided plurality of cells, based on user input information representing the small-scale drone swarm and the ROI.

Abstract: An apparatus and a method for transmitting a telecommand to a satellite are disclosed, wherein the satellite telecommand transmitting apparatus may include a transmitter to obtain a telecommand from a transmission command list and transmit the obtained telecommand to a satellite, a verifier to verify whether transmission of the telecommand is successful, and a processor to generate a retransmission telecommand with respect to the telecommand by referring to retransmission information on each telecommand stored in a database and prepare a retransmission command list including the generated retransmission telecommand, when a result of the verifying indicates a failure to transmit the telecommand.

Abstract: An apparatus and a method for automatically managing a satellite broadcasting service are disclosed. The apparatus may include a rain attenuation information collection unit to measure weather information and a satellite broadcast signal and to collect and provide satellite broadcast signal quality information corresponding to rain attenuation, a rain attenuation analysis unit to analyze rain attenuation information collected by region and to verify a rain attenuation level, a satellite broadcast transmission signal plan unit to generate a satellite broadcast signal change plan to change a satellite broadcast transmission signal by region based on the verified rain attenuation level, and a satellite broadcast transmission signal controller to transmit a signal change instruction to a satellite ground station for the satellite broadcast transmission signal to be changed based on the generated satellite broadcast signal change plan.

Abstract: An apparatus and a method for automatically managing a satellite broadcasting service are disclosed. The apparatus may include a rain attenuation information collection unit to measure weather information and a satellite broadcast signal and to collect and provide satellite broadcast signal quality information corresponding to rain attenuation, a rain attenuation analysis unit to analyze rain attenuation information collected by region and to verify a rain attenuation level, a satellite broadcast transmission signal plan unit to generate a satellite broadcast signal change plan to change a satellite broadcast transmission signal by region based on the verified rain attenuation level, and a satellite broadcast transmission signal controller to transmit a signal change instruction to a satellite ground station for the satellite broadcast transmission signal to be changed based on the generated satellite broadcast signal change plan.

Abstract: A telemetry data retrieval apparatus and method for post-processing are provided. The telemetry data retrieval apparatus may include a retrieval initiating unit to receive an input of a retrieval time, and to calculate a percentage of the retrieval time during an entire retrieval period, a start position calculating unit to calculate a retrieval start position in which data retrieval is started within a stored file, based on the calculated percentage, and a telemetry data retrieval unit to verify a start pattern and a time tag from the calculated retrieval start position, and to retrieve a position of telemetry data in the stored file.

Abstract: An apparatus for automatically generating satellite operation procedure (SOP) parameters is provided. The apparatus includes a parameter extraction unit configured to extract one or more SOP parameters corresponding to an SOP; a transformation formula extraction unit configured to extract a transformation formula corresponding to the extracted SOP parameters; and a calculation unit configured to calculate values of the extracted SOP parameters based on property information for performing a satellite task and the extracted transformation formula.

Abstract: Provided are an apparatus and method for executing a telecommand on a geostationary satellite, and an apparatus and method for verifying a telecommand execution status on a geostationary satellite ground control system. When a telecommand on a satellite is executed, the satellite generates command execution verification words for the executed telecommand and adds the generated command execution verification words to a telemetry transfer frame, and thus a satellite ground control system can easily verify the telecommand execution.

Abstract: A telemetry data retrieval apparatus and method for post-processing are provided. The telemetry data retrieval apparatus may include a retrieval initiating unit to receive an input of a retrieval time, and to calculate a percentage of the retrieval time during an entire retrieval period, a start position calculating unit to calculate a retrieval start position in which data retrieval is started within a stored file, based on the calculated percentage, and a telemetry data retrieval unit to verify a start pattern and a time tag from the calculated retrieval start position, and to retrieve a position of telemetry data in the stored file.

Abstract: Provided are an apparatus and a method that differently sets the access authority of a user for individual parts of an online document. For every parts of the online document, the user authority is set and the parts are edited only by a user that can access the part. Finally, the parts of the documents are combined as the final document. According to the present invention, the document is divided into parts and the access authority of the user is variously set, which results in maximizing the efficiency of editing the document. The editors of the individual parts inherit the authorities to other people, so that it is very efficient for the cooperative job of a document in the organization having a hierarchy.

Abstract: An apparatus for automatically generating satellite operation procedure (SOP) parameters is provided. The apparatus includes a parameter extraction unit configured to extract one or more SOP parameters corresponding to an SOP; a transformation formula extraction unit configured to extract a transformation formula corresponding to the extracted SOP parameters; and a calculation unit configured to calculate values of the extracted SOP parameters based on property information for performing a satellite task and the extracted transformation formula.

Abstract: Provided is a satellite control system based on integrated satellite operation data and a method thereof. The satellite control system includes: a satellite operation data schema editing means for creating a document type definition file and defining a schema; a mission planning means for creating a mission timeline and recording the mission timeline; a command planning means for converting a task into telecommands and recording the telecommand; a command preparing means for creating a telecommand procedure and recording the telecommand procedure; a command transmitting means for creating a telecommand code, transmitting the telecommand code to a satellite and recording the telecommand code; a command verifying means for receiving telemetry data and recording a telecommand verification result; and a performance result reporting means for creating a mission performance result and recording the mission performance result.

Abstract: Provided are an apparatus and a method for verifying a reception and execution status of telecommand in a satellite control system.

Abstract: An electrostatic chuck structure according to example embodiments of the present invention may include at least one specific region of a conductor having a thickness relatively smaller than those of other regions, at least one specific region of a dielectric having a thickness relatively larger than those of other regions, or at least one specific region of a conductor having a thickness relatively smaller than those of other regions and at least one specific region of a dielectric having a thickness relatively larger than those of other regions. Therefore, etching rate and CD uniformity can be improved during a semiconductor manufacturing process.

Abstract: Provided are an apparatus and method for executing a telecommand on a geostationary satellite, and an apparatus and method for verifying a telecommand execution status on a geostationary satellite ground control system. When a telecommand on a satellite is executed, the satellite generates command execution verification words for the executed telecommand and adds the generated command execution verification words to a telemetry transfer frame, and thus a satellite ground control system can easily verify the telecommand execution.

Abstract: An electrostatic chuck structure according to example embodiments of the present invention may include at least one specific region of a conductor having a thickness relatively smaller than those of other regions, at least one specific region of a dielectric having a thickness relatively larger than those of other regions, or at least one specific region of a conductor having a thickness relatively smaller than those of other regions and at least one specific region of a dielectric having a thickness relatively larger than those of other regions. Therefore, etching rate and CD uniformity can be improved during a semiconductor manufacturing process.

Abstract: Provided is a satellite control system based on integrated satellite operation data and a method thereof. The satellite control system includes: a satellite operation data schema editing means for creating a document type definition file and defining a schema; a mission planning means for creating a mission timeline and recording the mission timeline; a command planning means for converting a task into telecommands and recording the telecommand; a command preparing means for creating a telecommand procedure and recording the telecommand procedure; a command transmitting means for creating a telecommand code, transmitting the telecommand code to a satellite and recording the telecommand code; a command verifying means for receiving telemetry data and recording a telecommand verification result; and a performance result reporting means for creating a mission performance result and recording the mission performance result.

Abstract: Provided are an automatic operation system for automating satellite control operation, a method thereof, and an automatic satellite ground control system using the same. The object of the present research is to provide an automatic operation system that can reduce operation manpower and cost by automatically operating an entire satellite ground control system, which requires a plurality of operators to be properly operated, all the times, a method thereof, and an automatic satellite ground control system using the same. The satellite ground control system of the present research includes: a mission timeline receiving unit, an operation procedure editing unit, an operation procedure analyzing and code transforming unit, an operation procedure executing unit, a subsystem process state monitoring unit, and an access managing unit for providing interface with each of the subsystems.

Abstract: An apparatus and a method for fabricating a semiconductor device are provided. The method can efficiently remove by-products from a foreline connected to a process chamber. The apparatus includes a remote plasma source, which generates a plasma gas. The plasma gas is guided to the foreline, so as to remove impurities formed on an inner wall of the foreline.

Abstract: The present is directed to an apparatus for etching the top edge and bottom of a wafer. The apparatus includes a substrate support part for supporting a wafer and a movable protect part for preventing fluid for an etch from flowing into a non-etch portion of the wafer. The top edge and bottom of the wafer is etched by a wet etch, and a boundary of the non-etch portion and the edge of the wafer is etched by a dry etch.

Abstract: Provided are an apparatus and a method for verifying a reception and execution status of telecommand in a satellite control system.