Abstract: A spectroscopic analysis method having improved accuracy and correlation, a method for fabricating a semiconductor device using the same, and a substrate process system using the same are provided. The spectroscopic analysis method includes receiving plasma light emitted from plasma to generate an emission spectrum, detecting n (here, n is a natural number of 2 or more) peak wavelengths from the emission spectrum, generating a plurality of correlation factor time series from correlation factors between the peak wavelengths, filtering the plurality of correlation factor time series, and analyzing the plasma, using the filtered correlation factor time series.

Abstract: A street-lighting pole incorporates a vibration-reducing means on the upper end part of a pole provided standing vertically, wherein: the upper end part of the pole is formed so as to have a silicone receiving part of which the upper part is open in such a way that silicone oil can be stored to a predetermined level on the inside thereof; a removable cap is constituted so as to couple in removable fashion to an upper intake part of the silicone receiving part; a resilient supporting body of a predetermined length is constituted in the center of the removable cap; and a mass of a predetermined weight is constituted at the lower end part of the resilient supporting body.

Abstract: A street-lighting pole incorporates a vibration-reducing means on the upper end part of a pole provided standing vertically, wherein: the upper end part of the pole is formed so as to have a silicone receiving part of which the upper part is open in such a way that silicone oil can be stored to a predetermined level on the inside thereof; a removable cap is constituted so as to couple in removable fashion to an upper intake part of the silicone receiving part; a resilient supporting body of a predetermined length is constituted in the center of the removable cap; and a mass of a predetermined weight is constituted at the lower end part of the resilient supporting body.

Abstract: A regenerative electric power storage system installed onboard a DC electric rail car comprises: a filter unit which removes high frequency components from the DC power supplied through the catenary of a pantograph; a storage unit for storing power; a bidirectional DC/DC converter which is electrically connected between the filter unit and the storage unit; a DC/DC filter unit to remove high frequency noise; a voltage detection unit and a control unit which controls the switching of the bidirectional DC/DC converter. Instability is presented in the remaining systems of the electric rail car.

Abstract: A regenerative electric power storage system installed onboard a DC electric rail car comprises: a filter unit which removes high frequency components from the DC power supplied through the catenary of a pantograph; a storage unit for storing power; a bidirectional DC/DC converter which is electrically connected between the filter unit and the storage unit; a DC/DC filter unit to remove high frequency noise; a voltage detection unit and a control unit which controls the switching of the bidirectional DC/DC converter. Instability is presented in the remaining systems of the electric rail car.

Abstract: The present invention provides a gate drive for protecting a switching element (IGBT) used for an electrical inertial load controller. A high-voltage IGBT is used as the switching element and an hcp1316j is used as the gate drive of the IGBT, to restrict overvoltage and overcurrent generated in the event of inverter switching, preventing destruction of the IGBT in advance. Furthermore, an RC filter is formed in close proximity to the IGBT to minimize an erroneous switching operation due to harmonics generated caused by noise in case of inverter switching to improve the system reliability and block an increase in abnormal voltage applied across the switching element.

Abstract: The present invention provides a gate drive for protecting a switching element (IGBT) used for an electrical inertial load controller. A high-voltage IGBT is used as the switching element and an hcp1316j is used as the gate drive of the IGBT, to restrict overvoltage and overcurrent generated in the event of inverter switching, preventing destruction of the IGBT in advance. Furthermore, an RC filter is formed in close proximity to the IGBT to minimize an erroneous switching operation due to harmonics generated caused by noise in case of inverter switching to improve the system reliability and block an increase in abnormal voltage applied across the switching element.

Abstract: Solid state image sensor suitable for enhancing sensitivity of charge coupled devices (CCDs) using phase shift of light, and method for fabricating the same, the solid state image sensor including a plurality of photodiodes for generating image charges from incident lights, a plurality of charge coupled devices provided between the photodiodes for transmitting the image charges in one direction, a first flat layer formed on an entire surface of the photodiodes and the charge coupled devices, a plurality of color filter layers formed on the first flat layer to be in correspondence to the photodiodes, a plurality of black layers formed on the first flat layer between the color filter layers, a plurality of phase shift layers selectively formed on the color filter layers to be in correspondence to the photodiodes alternately, a second flat layer formed on an entire surface including the phase shift layers, and a plurality of microlenses formed on the second flat layer to be in correspondence to the photodiodes.

Abstract: A charge coupled device of this invention includes photodiodes, VCCDs for shifting the image charges generated in the photodiodes in one direction or in the reverse direction, first HCCD formed on one sides of the VCCDs transmitting the image charges from the VCCDs in one direction, and second HCCD formed on the other side of the VCCDs transmitting the image charges to the VCCDs in the reverse direction.