Abstract: Disclosed is a blankmask for EUV lithography, including a reflective film, a capping film, an etch stop film, a phase shift film, and a hard mask film which are sequentially formed on a substrate. The phase shift film contains ruthenium (Ru), and the etch stop film contains chrome (Cr) and niobium (Nb). In the etch stop film, the content of niobium (Nb) ranges from 20 to 50 at %, and the content of chrome (Cr) ranges from 10 to 40 at %. The hard mask film contains tantalum (Ta) and oxygen (O). The content of tantalum (Ta) in the hard mask film is higher than or equal to 50 at %. With the blankmask, it is possible to implement a high resolution and NILS during wafer printing, and implement DtC.

Abstract: Various aspects of the present disclosure provide a semiconductor device, for example comprising a finger print sensor, and a method for manufacturing thereof. Various aspects of the present disclosure may, for example, provide an ultra-slim finger print sensor having a thickness of 500 ?m or less that does not include a separate printed circuit board (PCB), and a method for manufacturing thereof.

Abstract: Disclosed herein is a multi-channel device for detecting plasma at an ultra-fast speed, including: a first antenna module connected to a first output terminal in contact with a substrate on a chuck of a process chamber and extending to ground, and receiving a first leakage current leaking through the substrate to increase reception sensitivity of the leakage current; a first current detection module detecting the first leakage current; a current measurement module receiving the first leakage current output from the first current detection module, and extracting the received first leakage current for each predetermined period to generate a first leakage current measurement information; and a control module comparing the first leakage current measurement information with a reference value to generate first arcing occurrence information.

Abstract: A display device includes pixels disposed in a display area and including first and second pixels that are adjacent to each other in a first direction, and a first integrated bank pattern disposed between the first and second pixels. Each of the pixels includes a first electrode and a second electrode that are spaced apart from each other along the first direction in a light emitting area and extend in a second direction, a first bank pattern portion overlapping the first electrode, and a second bank pattern portion overlapping the second electrode. The first integrated bank pattern includes a second bank pattern portion disposed at the first pixel, a first bank pattern portion disposed at the second pixel, and a protrusion extending in the second direction in a boundary area between the first pixel and the second pixel.

Abstract: A method in which a high-quality packet telephony terminal apparatus performing low-latency and lossless packet communication with a counterpart packet telephony terminal apparatus operates in an integrated network structure in which a time sensitive network (TSN) and a packet communication network are combined may be disclosed. The packet telephony terminal apparatus may perform packet telephony call processing, perform a TSN stream reservation procedure when the counterpart packet telephony terminal apparatus is capable of performing a TSN function for lossless packet communication, adjust a size of a dejitter buffer when the TSN stream reservation procedure is successful, and perform low-latency packet telephony communication through the minimized size of the dejitter buffer.

Abstract: A display device is provided. The display device may include a substrate, a plurality of pixels, a first data line, a second data line, a defect sensing line, a first input pad, and a static electricity discharge element. The substrate may include a display area and a peripheral area neighboring each other. The plurality of pixels may be positioned on the display area and may include a first pixel and a second pixel. The first data line may be electrically connected to the first pixel. The second data line may be electrically connected to the second pixel and may be electrically isolated from the first data line. The defect sensing line may be positioned on the peripheral area. The first input pad may be electrically connected to the defect sensing line. The static electricity discharge element may be electrically connected through the defect sensing line to the first input pad.

Abstract: A display device includes first emission areas, second emission areas, and third emission areas for respectively emitting colors of light, first pixel electrodes, second pixel electrodes, and third pixel electrodes overlapping the first emission areas, the second emission areas, and the third emission areas, respectively, first data lines respectively connected to the first pixel electrodes, and overlapping some of the first emission areas, second data lines respectively electrically connected to the second pixel electrodes, overlapping some others of the first emission areas, and being spaced apart from the first data lines, and a demultiplexer configured to divide and output corresponding portions of an input, which is received from one fan-out line, to the first data lines and the second data lines.

Abstract: The present invention relates to a method for preparing a 3D biological bilayer membrane structure in a physiological buffer solution and a 3D biological bilayer membrane structure using the same, and more particularly, to a method for preparing a 3D biological bilayer membrane structure that is tightly sealed even under physiological ionic conditions by applying pressure during electroformation to improve a membrane fusion function, and a 3D biological bilayer membrane structure using the same.

Abstract: A secondary battery includes an electrode assembly having a positive electrode provided with a positive electrode tab, a separator, and a negative electrode provided with a negative electrode tab, the positive electrode, the separator, and the negative electrode being wound, the electrode assembly having a core part at a center thereof; a can configured to receive the electrode assembly therein, the negative electrode tab being connected to the can; a cap assembly coupled to an opening of the can, the positive electrode tab being connected to the cap assembly; and a reinforcing member provided on an end of the separator exposed beyond the positive electrode or the negative electrode to prevent heat of the positive electrode tab or the negative electrode tab from being transferred to the separator.

Abstract: An automated gas supply system includes a gas cylinder transfer unit configured to transfer a cradle in which one or more gas cylinders storing a gas therein are stored; a gas cylinder inspection unit configured to check properties of the gas stored in the gas cylinder transferred from the gas cylinder transfer unit and check whether the gas leaks from the gas cylinder; a storage queue configured to receive the gas cylinder from the gas cylinder inspection unit by a mobile robot and configured to classify and store the transferred gas cylinders according to the properties of the gas stored in the gas cylinder; and a gas cabinet configured to receive the gas cylinder from the storage queue by the mobile robot and fasten a gas pipe, which is connected to a semiconductor manufacturing process line, to a gas spray nozzle, which is disposed at one side of the received gas cylinder, to supply the gas stored in the gas cylinder to the semiconductor manufacturing process line, wherein the gas cabinet includes a resid

Abstract: The present invention relates to a method and system for providing language learning services. The method of providing language learning services, according to the present invention, the method may include: activating, in response to receiving an input for acquiring a learning target image through a user terminal, a camera of the user terminal; specifying at least a portion of an image taken by the camera as the learning target image; receiving language learning information for the learning target image from a server; providing the language learning information to the user terminal; and storing, based on a request for storing of the language learning information, the language learning information in association with the learning target image, such that the learning target image is used in conjunction with learning of the language learning information.

Abstract: Oxide-based thin film sintered bodies, oxide-based solid electrolyte sheets, and all-solid lithium secondary batteries are disclosed. In some implementations, an oxide-based thin film sintered body includes oxide particles, the oxide-based thin film sintered body having a surface roughness Ra ranging from 0.1 to 3 ?m, wherein Ra is an arithmetical mean height of a surface, wherein the oxide particles absorb light energy in a wavelength range from 10 to 1200 nm and have an energy band gap ranging from 0.1 to 15 eV.

Abstract: The present disclosure relates to a toxic waste treatment process and treatment apparatus including: a temperature raising operation of raising a temperature of a toxic waste solid to a heat treatment temperature selected from 300° C. to 600° C. at an average temperature raising rate of 5° C./min or less; and a heat treatment operation of heat-treating the toxic waste solid at the heat treatment temperature.

Abstract: A glass stress test method includes breaking a glass, analyzing a shape of a crack of a broken portion of the glass in a plan view, finding a breakage origin of the glass based on the shape of the crack in the plan view, analyzing a cross-section of the breakage origin, and calculating a stress of the glass based on a cross-sectional analysis result of the breakage origin. The stress of the glass is calculated as a value proportional to a floor constant defined by a condition of a floor surface disposed when the glass is broken.

Abstract: Disclosed herein is a disinfection robot. The disinfection robot includes a body provided with an outlet, a fan provided inside the body, a fan motor configured to rotate the fan, a wheel provided under the body, a wheel motor configured to rotate the wheel, a three-dimensional camera having a forward field of view of the body and configured to capture a three-dimensional image, and a processor configured to control the fan motor to rotate the fan to discharge air through the outlet and control the wheel motor to rotate the wheel to move the body based on the three-dimensional image.

Abstract: A method and apparatus of accessing a channel in a wireless local area network is provided. A destination station receives a request to send (RTS) frame to allocate a network allocation vector from a source station over a first bandwidth and transmits a clear to send (CTS) frame over a second bandwidth to the source station in response to the RTS frame. The second bandwidth is dynamically determined when a first parameter has a predetermined value.

Abstract: Provided is a mask manufacturing method which includes preparing a mask sheet and a frame, stretching the mask sheet, and fixing the stretched mask sheet to the frame, and forming cell openings in the mask sheet fixed to the frame.

Abstract: A driver assistance system for vehicles, which is capable of preventing driver carelessness from causing a vehicle accident when a vehicle stops while traveling, includes a vehicle sensor unit configured to detect driver state data, a driver assistance unit operated to assist a driver when driver carelessness about vehicle driving is detected when a vehicle stops while traveling, and a control unit configured to identify whether the driver is careless based on the driver state data when the vehicle stops while traveling, and to operate the driver assistance unit when the driver carelessness is detected, preventing the vehicle from driving.

Abstract: A mask includes a body unit through which a deposition opening is defined, and a protrusion unit through which a pattern opening is defined and which protrudes from a corner of the body unit, where a thickness of the body unit is greater than a thickness of the protrusion unit.

Abstract: The present application provides a method for manufacturing a metal alloy foam. The present application can provide a method for manufacturing a metal alloy foam, which is capable of forming a metal alloy foam comprising uniformly formed pores and having excellent mechanical properties as well as the desired porosity, and a metal alloy foam having the above characteristics. In addition, the present application can provide a method capable of forming a metal alloy foam in which the above-mentioned physical properties are ensured, while being in the form of a thin film or sheet, within a fast process time, and such a metal alloy foam.