Abstract: Example embodiments are directed to a mask-less exposure apparatus configured to expose a pattern on a substrate using a light modulation device and a multi-head alignment method thereof. According to example embodiments, a beam measurement device measures positions and focuses of at least three beams from among a plurality of beams emitted from multiple heads, the measurement enabling alignment of a position and an angle of a lens barrel deviated from a reference position according to an error in position and focus of the measured at least three beams.

Abstract: A beam position measuring apparatus and method using a beam expansion device may expand areas of beams irradiated onto a beam detection sensor. The beam expansion device is configured to expand areas of the beams onto the beam detection sensor is installed between a beam generator and the beam detection sensor. Central positions of the irradiated beams are detected using intensities of beams irradiated onto respective pixels of the beam detection sensor.

Abstract: Provided is a barrel support device for supporting a lens barrel. The barrel support device may include a guide frame configured to laterally support the lens barrel and tilt with the lens barrel, a rotation guide on a first end of the guide frame, the rotation guide being ring shaped and configured attach the lens barrel to the guide frame, and a ring-shaped tilting frame configured to support a second end of the guide frame and tilt the guide frame, wherein the guide frame, the rotation guide, and the tilting frame are configured to allow the lens barrel to pass therethrough.

Abstract: There is provided a scrambling apparatus and a method of operating the same. A scrambling apparatus according to an aspect of the invention may include: a memory unit storing and providing a plurality of previously generated scrambling initial state codes; and a scrambling unit reading at least one of the plurality of scrambling initial state codes stored in the memory unit to generate a scrambling code in order to scramble an input signal, so that scrambling speed can be significantly increased.

Abstract: There is provided a signal detecting method using constellation set grouping in a spatial multiplexing multiple input multiple output system. The signal detecting method includes dividing a set of candidate symbols, a constellation set into a plurality of subsets by grouping the constellation set; dividing a tree search process of a QR-decomposition with M-algorithm (QRDM) algorithm into a plurality of partial detection phases; and performing the plurality of divided partial detection phases in parallel or iteratively.

Abstract: Disclosed herein are devices and methods for communicating full-rate voice data under an ATM protocol. An exemplary device is configured to communicate voice data through a vocoder in a CDMA backbone network using an ATM Adaptation Layer 0 (AAL0) cell-generating system, which is configured to generate an AAL0 cell for each frame of full-rate voice data. In an exemplary embodiment, the device generates AAL0 cells that each comprise (a) 5 bytes of a Header field; (b) 1 byte of a Length field indicating a size of the voice data; (c) 24 bytes of a Voice-Data field containing the voice data; (d) 19 bytes of a Control-Data field containing information for controlling the voice data; (e) 1 byte of an Error-Detection field containing information for detecting an error of the voice data; and (f) 3 bytes of a PAD field for padding data used to exactly fit into the ATM cell.

Abstract: A method to compress exposure data may include converting image data into a plurality of exposure data, generating new exposure data by combining part of the plurality of exposure data or by excluding part of the plurality of exposure data, and compressing the new exposure data. An exposure apparatus may include a conversion unit that converts image data into a plurality of exposure data, a control unit that generates new exposure data by combining part of the plurality of exposure data or by excluding part of the plurality of exposure data, and a compression unit that compresses the new exposure data.

Abstract: An exposure apparatus may include: a stage configured to move a substrate; an optical unit configured to generate and project a plurality of laser beams; and a control unit configured to measure straightness of the stage by controlling the projection of the laser beams to an exposed surface of the substrate while moving the stage. A method to measure straightness of a stage in an exposure apparatus may include: placing a substrate on the stage; moving the stage and substrate; generating a plurality of laser beams; projecting the laser beams to the substrate on the stage; and measuring the straightness of the stage by projecting the laser beams to an exposed surface of the substrate.

Abstract: The present invention relates to a switching mode power supply and a driving method thereof. In the present invention, a supply voltage is generated by using a start voltage that corresponds to input power, and a switching operation frequency of a power switch is changed according to an increase/decrease of the supply voltage.

Abstract: An origin of a reference coordinate system is assigned to one of a plurality of center points, and center point coordinates according to the reference coordinate system are assigned to remaining center points, so that reference marks successively correspond to center points of a plurality of microscopes fixed to a base. Beam position detection marks disposed between the reference marks with exposure points of exposure heads fixed to the base are crossed to assign beam coordinates according to the reference coordinate system to the exposure points. Thus, alignment may be easily and accurately performed, and is effective for increasingly larger apparatuses.

Abstract: An apparatus to inspect a TFT substrate including a gate line, a data line crossed with the gate line and insulated from the gate line, a TFT disposed at an intersection of the gate line and the data line, and a pixel electrode connected to the TFT includes a vacuum chamber, a stage disposed in the vacuum chamber and on which the TFT substrate is settled, an electron beam generator disposed over the stage, a gate driving part to apply a gate-on voltage to the gate line to turn on the TFT, a signal detector connected to the data line and to sense an electric signal from the pixel electrode, and a controller to control the gate driving part and the electron beam generator so that a electron beam is irradiated to the pixel electrode while the TFT is turned on.

Abstract: Provided are a method and apparatus for efficiently transferring a massive amount of multimedia data between two processors. The apparatus includes a first local switch, which connects a virtual page of a first processor element to a shared memory page, a second local switch, which connects a virtual page of a second processor element to the shared memory page, a shared page switch, which connects a predetermined shared memory page of a shared physical memory to the first or second local switch, and a switch manager, which remaps a certain shared memory page of the shared physical memory that stores data of a task performed by the first processor element to the virtual page of the second processor element. Accordingly, since memory remapping is used, the massive amount of multimedia data can be transmitted by changing a method of mapping a memory, unlike a case when multimedia data is transmitted by using a memory bus.

Abstract: Disclosed is an apparatus for performing both FHT (Fast Hadamard Transform) and FFT (Fast Fourier Transform). This apparatus determines the phase coefficients as constantly “1” when performing the FHT, and changes the input order of input data to a reverse order of bits when performing the FFT. In addition, the apparatus, which can process a plurality of input data sets simultaneously, classifies the received signals into multi-path signals and multi-antenna signals, thus processing the multi-path signals separately from the multi-antenna signals, or directly processes multi-antenna signals.

Abstract: A sample inspection apparatus to inspect a sample using a scanning electron microscope irradiates the sample with electron beams. The sample inspection apparatus includes a charge collecting unit that collects charges generated from a surface of the sample due to irradiation thereof by the electron beams. The cost required for sample inspection is reduced, and an image having high quality is provided by the sample inspection apparatus.

Abstract: A wireless modem is mounted to a terminal for wireless communication, and specifically controls an internal drive clock to reduce power consumption in an active mode. The wireless modem includes: a wireless core module for transmitting and receiving a radio signal; a modulator for converting data to be transmitted into a wireless transmission signal and transmitting the converted signal to the wireless core module; a demodulator for converting the signal received from the wireless core module into reception data; a synchronizer for synchronizing the signal received from the wireless core module; and a clock controller for generating a drive clock of each of the modulator, the demodulator, and the synchronizer. A low power clock controller is divided into six main functional blocks of a synchronizer, an analog controller, a modulator, a channel decoder, a demodulator, and a channel encoder, and has a feature that a clock is input only when a main functional block operates.

Abstract: An inspecting apparatus and method of inspecting which provides an enhanced clearness. The inspecting apparatus includes a stage to support an article to be inspected, an optical microscope provided with an object lens to approach and withdraw from the stage to inspect the article, and a viewport lens interposed between the article and the object lens to have a predetermined radius of curvature.

Abstract: An apparatus to inspect a TFT substrate including a gate line, a data line crossed with the gate line and insulated from the gate line, a TFT disposed at an intersection of the gate line and the data line, and a pixel electrode connected to the TFT includes a vacuum chamber, a stage disposed in the vacuum chamber and on which the TFT substrate is settled, an electron beam generator disposed over the stage, a gate driving part to apply a gate-on voltage to the gate line to turn on the TFT, a signal detector connected to the data line and to sense an electric signal from the pixel electrode, and a controller to control the gate driving part and the electron beam generator so that a electron beam is irradiated to the pixel electrode while the TFT is turned on.

Abstract: Disclosed is an apparatus for performing both FHT (Fast Hadamard Transform) and FFT (Fast Fourier Transform). This apparatus determines the phase coefficients as constantly “1” when performing the FHT, and changes the input order of input data to a reverse order of bits when performing the FFT. In addition, the apparatus, which can process a plurality of input data sets simultaneously, classifies the received signals into multi-path signals and multi-antenna signals, thus processing the multi-path signals separately from the multi-antenna signals, or directly processes multi-antenna signals.

Abstract: An etching apparatus and method of etching, the etching apparatus comprises a gas injector injecting reaction gas into a chamber in which semiconductor wafer is accommodated. The gas injector comprises at least a pair of gas suppliers having a gas supplying hole and a gas distributor having a loop-typed upper partition wall protruding from a central zone of an upper side of a plate, and a loop-typed bottom partition wall protruding from a central zone of a bottom side of the plate. A showerhead is disposed having a gap with the gas distributor, and injecting the reaction gas into the chamber. The etching apparatus independently controls an amount of reaction gas injected into a central zone and an edge zone of a chamber when the reaction gas is injected into the chamber, thereby controlling uniformity of density of plasma, deposition speed, etching speed, and the like in the etching process.

Abstract: There is provided a system for realization of a base station controller in a compact PCI, which establishes a code division multiple access (CDMA) base station controller partly using functions of H.110. The system for realizing a base station controller in a compact PCI uses paths for CDMA packet routines by using partial functions of H.110, extracts clocks from networks without using a GPS and composes a reference clock of the base station controller using the extracted clocks to use the reference clock as a reference frequency in CDMA.