Patents by Inventor In Wha Jeong

In Wha Jeong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ellipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment
    Patent number: 6744510
    Abstract: An ellipsometer for aligning incident angle comprising: a main frame shaping half circle and flat surface on which a plurality of grooves are radial and circumferential directionally carved; a specimen stage, which is installed at the groove-caved surface of the main frame, for tilting a specimen on a upper surface of the specimen stage with respect to horizontal direction and translating the specimen upward and downward; a polarizing unit, which is capable of fixing and moving on the groove-carved surface of the main frame, for polarizing a light from a light source and outputting the polarized light to the specimen, and moving on the groove-carved surface; and a light detecting unit, which is capable of fixing and moving on the groove-carved surface, for a reflection light from the specimen.
    Type: Grant
    Filed: January 9, 2002
    Date of Patent: June 1, 2004
    Assignee: Korea Advanced Institute of Science and Technology
    Inventors: Dae Gab Gweon, Sung Lim Park, Jae Wha Jeong
  • Elllipsometer and precision auto-alignment method for incident angle of the ellipsometer without auxiliary equipment
    Publication number: 20030128360
    Abstract: An ellipsometer for aligning incident angle comprising: a main frame shaping half circle and flat surface on which a plurality of grooves are radial and circumferential directionally carved; a specimen stage, which is installed at the groove-caved surface of the main frame, for tilting a specimen on a upper surface of the specimen stage with respect to horizontal direction and translating the specimen upward and downward; a polarizing unit, which is capable of fixing and moving on the groove-carved surface of the main frame, for polarizing a light from a light source and outputting the polarized light to the specimen, and moving on the groove-carved surface; and a light detecting unit, which is capable of fixing and moving on the groove-carved surface, for a reflection light from the specimen.
    Type: Application
    Filed: January 9, 2002
    Publication date: July 10, 2003
    Inventors: Dae Gab Gweon, Sung Lim Park, Jae Wha Jeong