Patents by Inventor Inbum KIM

Inbum KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High frequency generator having dual outputs and its driving method
    Patent number: 11189471
    Abstract: A high frequency generator having dual outputs comprises: a high frequency amplifying unit configured to amplify a DC voltage of a predetermined level, and output a first and a second high frequency amplification signal; a combiner configured to combine the first high frequency amplification signal and the second high frequency amplification signal, and output a high frequency power signal; a high frequency sensor disposed on output side of the combiner, configured to detect an electrical signal flowing the output side of the combiner, and output an electrical detection signal; a controller configured to output multiple control signals by using an externally applied control signal and the electrical detection signal; and a switching unit disposed between the combiner and the plasma chamber, and controlled by a switching control signal outputted from the controller to output the high frequency power signal to a first high frequency power output signal through a first output terminal and to output the high freq
    Type: Grant
    Filed: July 30, 2020
    Date of Patent: November 30, 2021
    Assignee: NEWPOWERPLASMA CO., LTD.
    Inventors: Jongwoon Kim, Inbum Kim, Seunghee Ryu
  • HIGH FREQUENCY GENERATOR HAVING DUAL OUTPUTS AND ITS DRIVING METHOD
    Publication number: 20210327680
    Abstract: A high frequency generator having dual outputs comprises: a high frequency amplifying unit configured to amplify a DC voltage of a predetermined level, and output a first and a second high frequency amplification signal; a combiner configured to combine the first high frequency amplification signal and the second high frequency amplification signal, and output a high frequency power signal; a high frequency sensor disposed on output side of the combiner, configured to detect an electrical signal flowing the output side of the combiner, and output an electrical detection signal; a controller configured to output multiple control signals by using an externally applied control signal and the electrical detection signal; and a switching unit disposed between the combiner and the plasma chamber, and controlled by a switching control signal outputted from the controller to output the high frequency power signal to a first high frequency power output signal through a first output terminal and to output the high freq
    Type: Application
    Filed: July 30, 2020
    Publication date: October 21, 2021
    Applicant: Newpowerplasma Co., Ltd.
    Inventors: Jongwoon KIM, Inbum KIM, Seunghee RYU