Abstract: An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.

Abstract: An apparatus for manufacturing a semiconductor device includes a chamber including a lower housing and an upper housing, heater chucks in the lower housing, shower heads on the heater chucks, the shower heads being between the lower housing and the upper housing, power supplies connected to the shower heads to provide radio-frequency powers to the shower heads, power straps in the upper housing to connect the shower heads to the power supplies, and shielding members in the upper housing, the shielding members enclosing the power straps and the shower heads, respectively, the shielding members to prevent electromagnetic interference of the radio-frequency powers between the power straps and between the shower heads.

Abstract: A display panel inspecting apparatus includes a first inspecting transistor including a control electrode for receiving a first test gate signal, an input electrode for receiving a first voltage and an output electrode connected to an outermost data line disposed in an outermost area of a display region of a display panel, a second inspecting transistor including a control electrode for receiving the first test gate signal, an input electrode for receiving a second voltage and an output electrode connected to a normal data line disposed out of the outermost area of the display region, and a third inspecting transistor including a control electrode for receiving the first test gate signal, an input electrode for receiving a third voltage and an output electrode connected to a module crack inspecting data line disposed out of the outermost area of the display region.

Abstract: A display panel inspecting apparatus includes a first inspecting transistor including a control electrode for receiving a first test gate signal, an input electrode for receiving a first voltage and an output electrode connected to an outermost data line disposed in an outermost area of a display region of a display panel, a second inspecting transistor including a control electrode for receiving the first test gate signal, an input electrode for receiving a second voltage and an output electrode connected to a normal data line disposed out of the outermost area of the display region, and a third inspecting transistor including a control electrode for receiving the first test gate signal, an input electrode for receiving a third voltage and an output electrode connected to a module crack inspecting data line disposed out of the outermost area of the display region.

Abstract: A method for repairing a display device including a defective pixel area where a failure has occurred includes irradiating a first laser beam to a first interface provided between a first layer and a second layer that contact each other corresponding to the defective pixel area to form a protrusion-depression surface in one or more surfaces of the first layer and the second layer that form the first interface; and irradiating a second laser beam to the protrusion-depression surfaces provided in one or more surfaces of the first and second layers to burn the protrusion-depression surface.

Abstract: A display substrate includes a gate metal pattern including a gate line extending in a first direction, a gate electrode electrically connected to the gate line and a storage line, a data metal pattern including a data line extending in a second direction crossing the first direction, a source electrode electrically connected to the data line and a drain electrode spaced apart from the source electrode, an organic layer disposed on the data metal pattern, and a repair hole formed through the organic layer and exposing a portion of the gate metal pattern or a portion of the data metal pattern.

Abstract: A method for repairing a display device including a defective pixel area where a failure has occurred includes irradiating a first laser beam to a first interface provided between a first layer and a second layer that contact each other corresponding to the defective pixel area to form a protrusion-depression surface in one or more surfaces of the first layer and the second layer that form the first interface; and irradiating a second laser beam to the protrusion-depression surfaces provided in one or more surfaces of the first and second layers to burn the protrusion-depression surface.

Abstract: A display substrate includes a gate metal pattern including a gate line extending in a first direction, a gate electrode electrically connected to the gate line and a storage line, a data metal pattern including a data line extending in a second direction crossing the first direction, a source electrode electrically connected to the data line and a drain electrode spaced apart from the source electrode, an organic layer disposed on the data metal pattern, and a repair hole formed through the organic layer and exposing a portion of the gate metal pattern or a portion of the data metal pattern.

Abstract: In a method of processing a substrate, a first plasma may be generated from a first reaction gas. A second plasma may be generated from a second reaction gas. The first plasma and the second plasma may be individually applied to the substrate. Thus, each of the at least two remote plasma sources may generate at least two plasmas under different process recipes, which may be optimized for processing the substrate. As a result, the substrate processed using the optimal plasmas may have a desired shape.

Abstract: In a method of processing a substrate, a first plasma may be generated from a first reaction gas. A second plasma may be generated from a second reaction gas. The first plasma and the second plasma may be individually applied to the substrate. Thus, each of the at least two remote plasma sources may generate at least two plasmas under different process recipes, which may be optimized for processing the substrate. As a result, the substrate processed using the optimal plasmas may have a desired shape.

Abstract: A display substrate includes a substrate, signal lines and test lines. The substrate includes a pixel region where pixels are disposed, a buffer region surrounding the pixel region and a grinding region surrounding the buffer region. The signal lines pass through the buffer region from the grinding region to provide the pixels with a driving signal. The test lines are disposed on the grinding region and the buffer region, respectively, so that the test lines intersect the signal lines in a lattice structure. Each of the test lines is electrically connected to the signal lines of a first number calculated by dividing a second number of the signal lines by a third number of the test lines. Thus, the performance of the pixels used for displaying an image may be tested more precisely.

Abstract: A visual inspection apparatus includes a plurality of cameras for photographing a display panel and a processor for processing the photographed image. Specifically, the visual inspection apparatus includes: a work table having a panel mounting unit on which a display panel is mounted; a camera module which is disposed in a direction normal to the panel mounting unit and which has a plurality of cameras arranged in a matrix; and a processor for processing the images of the display panel photographed with the cameras. The plurality of cameras is arranged in a matrix with variable distances between the cameras. Since the visual inspection apparatus includes the cameras arranged in a matrix, it can be used to effectively detect a variety of defects.

Abstract: A visual inspection apparatus includes a plurality of cameras for photographing a display panel and a processor for processing the photographed image. Specifically, the visual inspection apparatus includes: a work table having a panel mounting unit on which a display panel is mounted; a camera module which is disposed in a direction normal to the panel mounting unit and which has a plurality of cameras arranged in a matrix; and a processor for processing the images of the display panel photographed with the cameras. The plurality of cameras is arranged in a matrix with variable distances between the cameras. Since the visual inspection apparatus includes the cameras arranged in a matrix, it can be used to effectively detect a variety of defects.

Abstract: A display substrate includes a substrate, signal lines and test lines. The substrate includes a pixel region where pixels are disposed, a buffer region surrounding the pixel region and a grinding region surrounding the buffer region. The signal lines pass through the buffer region from the grinding region to provide the pixels with a driving signal. The test lines are disposed on the grinding region and the buffer region, respectively, so that the test lines intersect the signal lines in a lattice structure. Each of the test lines is electrically connected to the signal lines of a first number calculated by dividing a second number of the signal lines by a third number of the test lines. Thus, the performance of the pixels used for displaying an image may be tested more precisely.