Patents by Inventor Ines Anke

Ines Anke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
    Patent number: 6586308
    Abstract: A method for producing circuit structures on a semiconductor substrate is described. Photoresist structures are formed, which define functional circuit structures and dummy circuit structures, whereby the dummy circuit structures which are smaller than a minimum structural size are joined to an additional second dummy circuit structure. The additional circuit structure is provided in such a way that the minimum structural size, which is determined by a smallest required joint surface of the photoresist on the substrate, is exceeded. A semiconductor circuit is also provided, which includes functional circuit structures and dummy circuit structures, the dummy circuit structures being joined to the additional dummy circuit structures.
    Type: Grant
    Filed: October 18, 2001
    Date of Patent: July 1, 2003
    Assignee: Infineon Technologies AG
    Inventors: Sabine Kling, Dominique Savignac, Hans-Peter Moll, Henning Haffner, Elke Hietschold, Ines Anke
  • Method for producing circuit structures on a semiconductor substrate and semiconductor configuration with functional circuit structures and dummy circuit structures
    Publication number: 20020061614
    Abstract: A method for producing circuit structures on a semiconductor substrate is described. Photoresist structures are formed, which define functional circuit structures and dummy circuit structures, whereby the dummy circuit structures which are smaller than a minimum structural size are joined to an additional second dummy circuit structure. The additional circuit structure is provided in such a way that the minimum structural size, which is determined by a smallest required joint surface of the photoresist on the substrate, is exceeded. A semiconductor circuit is also provided, which includes functional circuit structures and dummy circuit structures, the dummy circuit structures being joined to the additional dummy circuit structures.
    Type: Application
    Filed: October 18, 2001
    Publication date: May 23, 2002
    Inventors: Sabine Kling, Dominique Savignac, Hans-Peter Moll, Henning Haffner, Elke Hietschold, Ines Anke