Patents by Inventor In-Gi Kim
In-Gi Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 12042828Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.Type: GrantFiled: April 12, 2023Date of Patent: July 23, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Ji Hoon Cha, Yong Jun Choi
-
Patent number: 11905204Abstract: According to an embodiment, a cover glass includes a glass plate forming at least a portion of an electronic device, and a first coat layer deposited on a surface of the glass plate, the first coat layer at least partially including a network structure. The first coat layer includes silicon (Si), oxygen (O), and at least one impurity, and such that Si—O bonds are 80% or more by weight of the first coat layer. A polysilazane-applied coat is laid over one surface of the reinforced glass plate, providing an elegant haze glass cover.Type: GrantFiled: October 26, 2018Date of Patent: February 20, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Wook-Tae Kim, In-Gi Kim, Ji-Won Lee, Chang-Soo Lee, Hyung-jin Lee, Gyu-Ha Jo, Yong-Hyun Cho
-
Publication number: 20230343613Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.Type: ApplicationFiled: June 26, 2023Publication date: October 26, 2023Inventors: Yong Jun CHOI, Seok Hoon KIM, Young-Hoo KIM, In Gi KIM, Sung Hyun PARK, Seung Min SHIN, Kun Tack LEE, Jinwoo LEE, Hun Jae JANG, Ji Hoon CHA
-
Patent number: 11742221Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.Type: GrantFiled: July 15, 2021Date of Patent: August 29, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung-Min Shin, Seok-Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae-Hong Kim, Sung-Hyun Park, Jin-Woo Lee, Ji-Hoon Cha, Yong-Jun Choi
-
Publication number: 20230253218Abstract: An apparatus is provided. The apparatus includes a spinner configured to hold a wafer, a nozzle configured to supply a liquid chemical onto an upper surface of the wafer, and a laser module configured to heat the wafer by radiating a laser beam to a lower surface of the wafer while the nozzle supplies the liquid chemical onto the upper surface of the wafer.Type: ApplicationFiled: April 17, 2023Publication date: August 10, 2023Inventors: Ji Hoon CHA, Jinwoo LEE, Seok Hoon KIM, In Gi KIM, Seung Min SHIN, Yong Jun CHOI
-
Publication number: 20230249230Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.Type: ApplicationFiled: April 12, 2023Publication date: August 10, 2023Applicant: Samsung Electronics Co., Ltd.Inventors: Seung Min SHIN, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Ji Hoon Cha, Yong Jun Choi
-
Patent number: 11721565Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.Type: GrantFiled: November 21, 2019Date of Patent: August 8, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yong Jun Choi, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Sung Hyun Park, Seung Min Shin, Kun Tack Lee, Jinwoo Lee, Hun Jae Jang, Ji Hoon Cha
-
Patent number: 11648594Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.Type: GrantFiled: June 2, 2020Date of Patent: May 16, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Ji Hoon Cha, Yong Jun Choi
-
Patent number: 11631599Abstract: An apparatus is provided. The apparatus includes a spinner configured to hold a wafer, a nozzle configured to supply a liquid chemical onto an upper surface of the wafer, and a laser module configured to heat the wafer by radiating a laser beam to a lower surface of the wafer while the nozzle supplies the liquid chemical onto the upper surface of the wafer.Type: GrantFiled: November 14, 2019Date of Patent: April 18, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Ji Hoon Cha, Jinwoo Lee, Seok Hoon Kim, In Gi Kim, Seung Min Shin, Yong Jun Choi
-
Patent number: 11605545Abstract: A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.Type: GrantFiled: November 22, 2019Date of Patent: March 14, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hun Jae Jang, Seung Min Shin, Seok Hoon Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Jinwoo Lee, Ji Hoon Cha, Yong Jun Choi
-
Publication number: 20220261810Abstract: A method for automatically providing a cryptocurrency to a recommender using social networking service (SNS) propagation includes an SNS friend recommending step, a new registration step, a reward rate determining step, a rewarding step, a transaction processing step, and a retransaction-based transaction processing step. The reward rate determining step includes the steps of determining a membership grade of a blockchain member recommended by the blockchain membership node according to the number of SNS friend IDs recommended and determining a reward rate for the blockchain member according to the determined membership grade. In the reward rate determining step, the membership grade of the recommended blockchain member rises as the number of the SNS friend IDs recommended by the blockchain membership node increases. When an SNS friend recommended by the blockchain membership node recommends another SNS friend, a weight is assigned to the membership grade of the blockchain member first recommended.Type: ApplicationFiled: May 5, 2022Publication date: August 18, 2022Inventor: In Gi KIM
-
Publication number: 20210343552Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.Type: ApplicationFiled: July 15, 2021Publication date: November 4, 2021Inventors: Seung-Min SHIN, Seok-Hoon KIM, Young-Hoo KIM, In-Gi KIM, Tae-Hong KIM, Sung-Hyun PARK, Jin-Woo LEE, Ji-Hoon CHA, Yong-Jun CHOI
-
Patent number: 11087996Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.Type: GrantFiled: April 1, 2019Date of Patent: August 10, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Seung-Min Shin, Seok-Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae-Hong Kim, Sung-Hyun Park, Jin-Woo Lee, Ji-Hoon Cha, Yong-Jun Choi
-
Patent number: 11055702Abstract: In a method of providing cryptocurrency cashback using blockchain technology, in which when cryptocurrency is transferred from the payer's electronic wallet to the affiliated store's electronic wallet according to payment via cryptocurrency using blockchain technology, the payment server 200 provides cryptocurrency cashback, an embodiment of the disclosure provides credits proportional to the amount of payment, as cashback, to the payer's credit electronic wallet, and the affiliated store receiving the amount of payment deducts points proportional to received points from the received points and stores in the affiliated store's credit electronic wallet.Type: GrantFiled: June 20, 2019Date of Patent: July 6, 2021Inventor: In Gi Kim
-
Publication number: 20210060625Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.Type: ApplicationFiled: June 2, 2020Publication date: March 4, 2021Applicant: Samsung Electronics Co., Ltd.Inventors: Seung Min SHIN, Hun Jae JANG, Seok Hoon KIM, Young-Hoo KIM, In Gi KIM, Tae-Hong KIM, Kun Tack LEE, Ji Hoon CHA, Yong Jun CHOI
-
Publication number: 20200342451Abstract: In a method of providing cryptocurrency cashback using blockchain technology, in which when cryptocurrency is transferred from the payer's electronic wallet to the affiliated store's electronic wallet according to payment via cryptocurrency using blockchain technology, the payment server 200 provides cryptocurrency cashback, an embodiment of the disclosure provides credits proportional to the amount of payment, as cashback, to the payer's credit electronic wallet, and the affiliated store receiving the amount of payment deducts points proportional to received points from the received points and stores in the affiliated store's credit electronic wallet.Type: ApplicationFiled: June 20, 2019Publication date: October 29, 2020Inventor: In Gi KIM
-
Publication number: 20200343113Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.Type: ApplicationFiled: November 21, 2019Publication date: October 29, 2020Inventors: Yong Jun CHOI, Seok Hoon KIM, Young-Hoo KIM, In Gi KIM, Sung Hyun PARK, Seung Min SHIN, Kun Tack LEE, Jinwoo LEE, Hun Jae JANG, Ji Hoon CHA
-
Publication number: 20200335361Abstract: A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.Type: ApplicationFiled: November 22, 2019Publication date: October 22, 2020Inventors: Hun Jae JANG, Seung Min Shin, Seok Hoon Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Jinwoo Lee, Ji Hoon Cha, Yong Jun Choi
-
Patent number: 10795263Abstract: A composition for removing photoresist, including an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition; an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition; and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition.Type: GrantFiled: May 23, 2018Date of Patent: October 6, 2020Assignees: SAMSUNG ELECTRONICS CO., LTD., DONGWOO FINE-CHEMInventors: Jung-Min Oh, Mi-Hyun Park, Hyo-San Lee, Ji-Hoon Jeong, Yong-Sun Ko, In-Gi Kim, Na-Rim Kim, Sang-Tae Kim, Seong-Min Kim, Kyong-Ho Lee
-
Publication number: 20200286050Abstract: A method for automatically providing a cryptocurrency to a recommender using social networking service (SNS) propagation includes an SNS friend recommending step, a new registration step, a reward rate determining step, a rewarding step, a transaction processing step, and a retransaction-based transaction processing step. The reward rate determining step includes the steps of determining a membership grade of a blockchain member recommended by the blockchain membership node according to the number of SNS friend IDs recommended and determining a reward rate for the blockchain member according to the determined membership grade. In the reward rate determining step, the membership grade of the recommended blockchain member rises as the number of the SNS friend IDs recommended by the blockchain membership node increases. When an SNS friend recommended by the blockchain membership node recommends another SNS friend, a weight is assigned to the membership grade of the blockchain member first recommended.Type: ApplicationFiled: June 10, 2019Publication date: September 10, 2020Inventor: In Gi KIM