Patents by Inventor In-Gi Kim

In-Gi Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12042828
    Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.
    Type: Grant
    Filed: April 12, 2023
    Date of Patent: July 23, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Ji Hoon Cha, Yong Jun Choi
  • Patent number: 11905204
    Abstract: According to an embodiment, a cover glass includes a glass plate forming at least a portion of an electronic device, and a first coat layer deposited on a surface of the glass plate, the first coat layer at least partially including a network structure. The first coat layer includes silicon (Si), oxygen (O), and at least one impurity, and such that Si—O bonds are 80% or more by weight of the first coat layer. A polysilazane-applied coat is laid over one surface of the reinforced glass plate, providing an elegant haze glass cover.
    Type: Grant
    Filed: October 26, 2018
    Date of Patent: February 20, 2024
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Wook-Tae Kim, In-Gi Kim, Ji-Won Lee, Chang-Soo Lee, Hyung-jin Lee, Gyu-Ha Jo, Yong-Hyun Cho
  • Publication number: 20230343613
    Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.
    Type: Application
    Filed: June 26, 2023
    Publication date: October 26, 2023
    Inventors: Yong Jun CHOI, Seok Hoon KIM, Young-Hoo KIM, In Gi KIM, Sung Hyun PARK, Seung Min SHIN, Kun Tack LEE, Jinwoo LEE, Hun Jae JANG, Ji Hoon CHA
  • Patent number: 11742221
    Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.
    Type: Grant
    Filed: July 15, 2021
    Date of Patent: August 29, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seung-Min Shin, Seok-Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae-Hong Kim, Sung-Hyun Park, Jin-Woo Lee, Ji-Hoon Cha, Yong-Jun Choi
  • Publication number: 20230253218
    Abstract: An apparatus is provided. The apparatus includes a spinner configured to hold a wafer, a nozzle configured to supply a liquid chemical onto an upper surface of the wafer, and a laser module configured to heat the wafer by radiating a laser beam to a lower surface of the wafer while the nozzle supplies the liquid chemical onto the upper surface of the wafer.
    Type: Application
    Filed: April 17, 2023
    Publication date: August 10, 2023
    Inventors: Ji Hoon CHA, Jinwoo LEE, Seok Hoon KIM, In Gi KIM, Seung Min SHIN, Yong Jun CHOI
  • Publication number: 20230249230
    Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.
    Type: Application
    Filed: April 12, 2023
    Publication date: August 10, 2023
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Seung Min SHIN, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Ji Hoon Cha, Yong Jun Choi
  • Patent number: 11721565
    Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.
    Type: Grant
    Filed: November 21, 2019
    Date of Patent: August 8, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Yong Jun Choi, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Sung Hyun Park, Seung Min Shin, Kun Tack Lee, Jinwoo Lee, Hun Jae Jang, Ji Hoon Cha
  • Patent number: 11648594
    Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.
    Type: Grant
    Filed: June 2, 2020
    Date of Patent: May 16, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Ji Hoon Cha, Yong Jun Choi
  • Patent number: 11631599
    Abstract: An apparatus is provided. The apparatus includes a spinner configured to hold a wafer, a nozzle configured to supply a liquid chemical onto an upper surface of the wafer, and a laser module configured to heat the wafer by radiating a laser beam to a lower surface of the wafer while the nozzle supplies the liquid chemical onto the upper surface of the wafer.
    Type: Grant
    Filed: November 14, 2019
    Date of Patent: April 18, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Ji Hoon Cha, Jinwoo Lee, Seok Hoon Kim, In Gi Kim, Seung Min Shin, Yong Jun Choi
  • Patent number: 11605545
    Abstract: A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: March 14, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hun Jae Jang, Seung Min Shin, Seok Hoon Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Jinwoo Lee, Ji Hoon Cha, Yong Jun Choi
  • Publication number: 20220261810
    Abstract: A method for automatically providing a cryptocurrency to a recommender using social networking service (SNS) propagation includes an SNS friend recommending step, a new registration step, a reward rate determining step, a rewarding step, a transaction processing step, and a retransaction-based transaction processing step. The reward rate determining step includes the steps of determining a membership grade of a blockchain member recommended by the blockchain membership node according to the number of SNS friend IDs recommended and determining a reward rate for the blockchain member according to the determined membership grade. In the reward rate determining step, the membership grade of the recommended blockchain member rises as the number of the SNS friend IDs recommended by the blockchain membership node increases. When an SNS friend recommended by the blockchain membership node recommends another SNS friend, a weight is assigned to the membership grade of the blockchain member first recommended.
    Type: Application
    Filed: May 5, 2022
    Publication date: August 18, 2022
    Inventor: In Gi KIM
  • Publication number: 20210343552
    Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.
    Type: Application
    Filed: July 15, 2021
    Publication date: November 4, 2021
    Inventors: Seung-Min SHIN, Seok-Hoon KIM, Young-Hoo KIM, In-Gi KIM, Tae-Hong KIM, Sung-Hyun PARK, Jin-Woo LEE, Ji-Hoon CHA, Yong-Jun CHOI
  • Patent number: 11087996
    Abstract: A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.
    Type: Grant
    Filed: April 1, 2019
    Date of Patent: August 10, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Seung-Min Shin, Seok-Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae-Hong Kim, Sung-Hyun Park, Jin-Woo Lee, Ji-Hoon Cha, Yong-Jun Choi
  • Patent number: 11055702
    Abstract: In a method of providing cryptocurrency cashback using blockchain technology, in which when cryptocurrency is transferred from the payer's electronic wallet to the affiliated store's electronic wallet according to payment via cryptocurrency using blockchain technology, the payment server 200 provides cryptocurrency cashback, an embodiment of the disclosure provides credits proportional to the amount of payment, as cashback, to the payer's credit electronic wallet, and the affiliated store receiving the amount of payment deducts points proportional to received points from the received points and stores in the affiliated store's credit electronic wallet.
    Type: Grant
    Filed: June 20, 2019
    Date of Patent: July 6, 2021
    Inventor: In Gi Kim
  • Publication number: 20210060625
    Abstract: A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.
    Type: Application
    Filed: June 2, 2020
    Publication date: March 4, 2021
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Seung Min SHIN, Hun Jae JANG, Seok Hoon KIM, Young-Hoo KIM, In Gi KIM, Tae-Hong KIM, Kun Tack LEE, Ji Hoon CHA, Yong Jun CHOI
  • Publication number: 20200342451
    Abstract: In a method of providing cryptocurrency cashback using blockchain technology, in which when cryptocurrency is transferred from the payer's electronic wallet to the affiliated store's electronic wallet according to payment via cryptocurrency using blockchain technology, the payment server 200 provides cryptocurrency cashback, an embodiment of the disclosure provides credits proportional to the amount of payment, as cashback, to the payer's credit electronic wallet, and the affiliated store receiving the amount of payment deducts points proportional to received points from the received points and stores in the affiliated store's credit electronic wallet.
    Type: Application
    Filed: June 20, 2019
    Publication date: October 29, 2020
    Inventor: In Gi KIM
  • Publication number: 20200343113
    Abstract: A multi-chamber apparatus for processing a wafer, the apparatus including a high etch rate chamber to receive the wafer and to etch silicon nitride with a phosphoric acid solution; a rinse chamber to receive the wafer and to clean the wafer with an ammonia mixed solution; and a supercritical drying chamber to dry the wafer with a supercritical fluid.
    Type: Application
    Filed: November 21, 2019
    Publication date: October 29, 2020
    Inventors: Yong Jun CHOI, Seok Hoon KIM, Young-Hoo KIM, In Gi KIM, Sung Hyun PARK, Seung Min SHIN, Kun Tack LEE, Jinwoo LEE, Hun Jae JANG, Ji Hoon CHA
  • Publication number: 20200335361
    Abstract: A wafer cleaning equipment includes a housing to be positioned adjacent to a wafer, a hollow region in the housing, a laser module that outputs a laser beam having a profile of the laser beam includes a first region having a first intensity and a second region having a second intensity greater than the first intensity, the laser beam being output into the hollow region, and a transparent window that covers an upper part of the hollow region and transmits the laser beam to be incident on an entirety of a lower surface of the wafer.
    Type: Application
    Filed: November 22, 2019
    Publication date: October 22, 2020
    Inventors: Hun Jae JANG, Seung Min Shin, Seok Hoon Kim, In Gi Kim, Tae-Hong Kim, Kun Tack Lee, Jinwoo Lee, Ji Hoon Cha, Yong Jun Choi
  • Patent number: 10795263
    Abstract: A composition for removing photoresist, including an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition; an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition; and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition.
    Type: Grant
    Filed: May 23, 2018
    Date of Patent: October 6, 2020
    Assignees: SAMSUNG ELECTRONICS CO., LTD., DONGWOO FINE-CHEM
    Inventors: Jung-Min Oh, Mi-Hyun Park, Hyo-San Lee, Ji-Hoon Jeong, Yong-Sun Ko, In-Gi Kim, Na-Rim Kim, Sang-Tae Kim, Seong-Min Kim, Kyong-Ho Lee
  • Publication number: 20200286050
    Abstract: A method for automatically providing a cryptocurrency to a recommender using social networking service (SNS) propagation includes an SNS friend recommending step, a new registration step, a reward rate determining step, a rewarding step, a transaction processing step, and a retransaction-based transaction processing step. The reward rate determining step includes the steps of determining a membership grade of a blockchain member recommended by the blockchain membership node according to the number of SNS friend IDs recommended and determining a reward rate for the blockchain member according to the determined membership grade. In the reward rate determining step, the membership grade of the recommended blockchain member rises as the number of the SNS friend IDs recommended by the blockchain membership node increases. When an SNS friend recommended by the blockchain membership node recommends another SNS friend, a weight is assigned to the membership grade of the blockchain member first recommended.
    Type: Application
    Filed: June 10, 2019
    Publication date: September 10, 2020
    Inventor: In Gi KIM