Abstract: A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the image plane; and a field generating arrangement configured to generate electric and/or magnetic deflection fields of adjustable strength in regions close to the object plane. The particle beams are deflected in operation by the deflection fields through deflection angles that depend on the strength of the deflection fields.

Abstract: A multi-beam particle microscope comprising a particle source configured to emit charged particles, and a multi-aperture arrangement configured to generate a first field of a multiplicity of charged first individual particle beams from the charged particles. A beam tube portion is arranged between the particle source and the multi-aperture arrangement. A condenser lens system with a magnetic lens can be arranged in the region of the beam tube portion. The beam tube portion comprises pure titanium or a titanium alloy, or the beam tube portion consists of pure titanium or a titanium alloy. The permeability coefficient of the pure titanium or of the titanium alloy is 1.0005 or less, such as 1.00005 or less. This can help make it possible to generate individual particle beams of better quality.

Abstract: A particle beam system, such as a multi-beam particle microscope, includes a multi-beam deflection device and a beam stop. The multi-beam deflection device is arranged in the particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch of the particle beam system. The multi-beam deflection device serves collectively blanks a multiplicity of charged individual particle beams. These impinge on a beam stop, which is arranged in the particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum. By way of example, such sites are the cross-over plane of the individual particle beams or an intermediate image plane. Associated methods for operating the particle beam system and associated computer program products are disclosed.

Abstract: A particle beam system includes: a multi-beam particle source configured to generate a multiplicity of particle beams; an imaging optical unit configured to image an object plane in particle-optical fashion into an image plane and direct the multiplicity of particle beams on the image plane; and a field generating arrangement configured to generate electric and/or magnetic deflection fields of adjustable strength in regions close to the object plane. The particle beams are deflected in operation by the deflection fields through deflection angles that depend on the strength of the deflection fields.

Abstract: A structure for growing plants comprising a main support, vertical supports along the perimeter of the foundation, a perimeter frame connected to the vertical supports, cables connected to the main support, vertical supports and perimeter frame, and an inner and outer shell formed from transmissive panels supported by the cables.

Abstract: A multiple particle beam microscope and an associated method set a desired focal plane with an optical resolution and set a telecentric irradiation with the plurality of the primary beams. A method determines an optimal setting plane, into which an object surface is brought. Further, a system provides an improved resolution and telecentric irradiation for a large number of primary beams. Targeted selection and targeted individual influencing of individual primary beams and/or a mechanism means for influencing the plurality of primary beams in collective fashion can be implemented.

Abstract: A multi-beam charged particle microscope system, having a mirror mode of operation, can be operated to record a stack of images in a mirror imaging mode. The stack of images comprises at least two images of two different settings of at least on multi-aperture element, for example a focus stack, which allows the multi-beam charged particle microscope system to be inspected and recalibrated thoroughly. Related methods computer program products are disclosed.

Abstract: A method includes operating a multiple particle beam system at different working points. The numerical aperture can be set for each of the working points in such a way that the resolution of the multiple particle beam system is optimal. In the process, the beam pitch between adjacent individual particle beams on the sample to be scanned is kept constant as a boundary condition. There are no mechanical reconfigurations of the system whatsoever for the purposes of varying the numerical aperture.

Abstract: An automated growing system comprises a plurality of vegetative production lines for moving a plurality of planted growing channels from a first end to a second end of a growing area, a plurality of flowering production lines for moving the channels from the second end to the first end, and a first conveyor belt for moving planted growing channels from the plurality of vegetative production lines to the plurality of flowering production lines. Each production line may comprise a frame, a conveyor assembly configured to receive growing channels, a fertigation delivery line comprising a plurality of regulators spaced therealong for depositing fluid into the growing channels, a drainage trough, and an air supply duct positioned under the conveyor assembly, the air supply duct comprising a plurality of openings therein for delivering conditioned air to plants growing in the growing channels.

Abstract: A method includes operating a multiple particle beam system at different working points. The numerical aperture can be set for each of the working points in such a way that the resolution of the multiple particle beam system is optimal. In the process, the beam pitch between adjacent individual particle beams on the sample to be scanned is kept constant as a boundary condition. There are no mechanical reconfigurations of the system whatsoever for the purposes of varying the numerical aperture.

Abstract: An automated growing system comprises a plurality of vegetative production lines for moving a plurality of planted growing channels from a first end to a second end of a growing area, a plurality of flowering production lines for moving the channels from the second end to the first end, and a first conveyor belt for moving planted growing channels from the plurality of vegetative production lines to the plurality of flowering production lines. Each production line may comprise a frame, a conveyor assembly configured to receive growing channels, a fertigation delivery line comprising a plurality of regulators spaced therealong for depositing fluid into the growing channels, a drainage trough, and an air supply duct positioned under the conveyor assembly, the air supply duct comprising a plurality of openings therein for delivering conditioned air to plants growing in the growing channels.

Abstract: A structure for growing plants comprising a main support, vertical supports along the perimeter of the foundation, a perimeter frame connected to the vertical supports, cables connected to the main support, vertical supports and perimeter frame, and an inner and outer shell formed from transmissive panels supported by the cables.

Abstract: A method for operating a multi-beam particle microscope which operates using a plurality of individual charged particle beams, wherein the method includes the following steps: measuring the beam current; determining a deviation of the measured beam current from a nominal beam current; decomposing the determined deviation into a drift component and into a high-frequency component; and controlling the high-frequency component of the beam current via a first closed-loop beam current control mechanism and/or compensating an effect of the high-frequency component on a recording quality of the multi-beam particle microscope using different mechanism than a closed-loop beam current control mechanism. An electrostatic control lens arranged in the beam generating system between extractor and anode can be used as first closed-loop beam current control mechanism. Adapting an extractor voltage of the beam generating system can be avoided.

Abstract: A structure for growing plants comprising a main support, vertical supports along the perimeter of the foundation, a perimeter frame connected to the vertical supports, cables connected to the main support, vertical supports and perimeter frame, and an inner and outer shell formed from transmissive panels supported by the cables.

Abstract: A multiple particle beam microscope and an associated method can provide a fast autofocus around an adjustable working distance. A system can have one or more fast autofocus correction lenses for adapting, in high-frequency fashion, the focusing, the position, the landing angle and the rotation of individual particle beams upon incidence on a wafer surface during the wafer inspection. Fast autofocusing in the secondary path of the particle beam system can be implemented in analogous fashion. An additional increase in precision can be attained via fast aberration correction mechanism in the form of deflectors and/or stigmators.

Abstract: A structure for growing plants comprising a main support, vertical supports along the perimeter of the foundation, a perimeter frame connected to the vertical supports, cables connected to the main support, vertical supports and perimeter frame, and an inner and outer shell formed from transmissive panels supported by the cables.

Abstract: A particle beam system includes a multi-source system. The multi-source system comprises an electron emitter array as a particle multi-source. The inhomogeneous emission characteristics of the various emitters in this multi-source system are correctable, or pre-correctable for subsequent particle-optical imaging, via particle-optical components that are producible via MEMS technology. A beam current of the individual particle beams is adjustable in the multi-source system.

Abstract: An automated growing system comprises a plurality of vegetative production lines for moving a plurality of planted growing channels from a first end to a second end of a growing area, a plurality of flowering production lines for moving the channels from the second end to the first end, and a first conveyor belt for moving planted growing channels from the plurality of vegetative production lines to the plurality of flowering production lines. Each production line may comprise a frame, a conveyor assembly configured to receive growing channels, a fertigation delivery line comprising a plurality of regulators spaced therealong for depositing fluid into the growing channels, a drainage trough, and an air supply duct positioned under the conveyor assembly, the air supply duct comprising a plurality of openings therein for delivering conditioned air to plants growing in the growing channels.

Abstract: A structure for growing plants comprising a main support, vertical supports along the perimeter of the foundation, a perimeter frame connected to the vertical supports, cables connected to the main support, vertical supports and perimeter frame, and an inner and outer shell formed from transmissive panels supported by the cables.

Abstract: A multi-beam charged particle inspection system and a method of operating a multi-beam charged particle inspection system for wafer inspection can provide high throughput with high resolution and high reliability. The method and the multi-beam charged particle beam inspection system can be configured to extract from a plurality of sensor data a set of control signals to control the multi-beam charged particle beam inspection system and thereby maintain the imaging specifications including a movement of a wafer stage during the wafer inspection task.