Patents by Inventor Ingo Schulmeyer

Ingo Schulmeyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CROSS SECTION IMAGING WITH IMPROVED 3D VOLUME IMAGE RECONSTRUCTION ACCURACY
    Publication number: 20220138973
    Abstract: A three-dimensional circuit pattern inspection technique includes cross sectioning integrated circuits for obtaining a 3D volume image of an integrated semiconductor sample. The method employs a feature based alignment of cross section images based on features of an integrated semiconductor sample. A computer program product and apparatus are provided.
    Type: Application
    Filed: December 2, 2021
    Publication date: May 5, 2022
    Inventors: Thomas Korb, Jens Timo Neumann, Eugen Foca, Alex Buxbaum, Amir Avishai, Keumsil Lee, Ingo Schulmeyer, Dmitry Klochkov