Abstract: The present application relates to a developing apparatus. The developing apparatus comprises a housing; a wafer support disposed within the housing and for holding a wafer; a semipermeable diaphragm disposed within the housing and separating the housing into an upper housing defining an upper chamber and a lower housing defining a low chamber, wherein the semipermeable diaphragm is semipermeable to moisture such that moisture is allowed to move from the lower chamber to the upper chamber, but liquid drops are prohibited to move from the upper chamber to the lower chamber; and a nozzle assembly disposed above the wafer support and for spraying at least developer to the wafer support.

Abstract: The present application relates to a developing apparatus. The developing apparatus comprises a housing; a wafer support disposed within the housing and for holding a wafer; a semipermeable diaphragm disposed within the housing and separating the housing into an upper housing defining an upper chamber and a lower housing defining a low chamber, wherein the semipermeable diaphragm is semipermeable to moisture such that moisture is allowed to move from the lower chamber to the upper chamber, but liquid drops are prohibited to move from the upper chamber to the lower chamber; and a nozzle assembly disposed above the wafer support and for spraying at least developer to the wafer support.

Abstract: The present application relates to a developing apparatus. The developing apparatus comprises a housing; a wafer support disposed within the housing and for holding a wafer; a semipermeable diaphragm disposed within the housing and separating the housing into an upper housing defining an upper chamber and a lower housing defining a low chamber, wherein the semipermeable diaphragm is semipermeable to moisture such that moisture is allowed to move from the lower chamber to the upper chamber, but liquid drops are prohibited to move from the upper chamber to the lower chamber; and a nozzle assembly disposed above the wafer support and for spraying at least developer to the wafer support.

Abstract: A reciprocating compressor including a shell, a suction pipe, a driver located at the inner portion of the shell to generate a rotary force, a compressor located in the shell and a muffler assembly is provided. The compressor includes a connecting rod configured to convert the rotary force to a linear driving force, a piston connected to the connecting rod and a cylinder into which the piston is movably inserted is provided. The muffler assembly is configured to transfer a refrigerant suctioned through the suction pipe to the cylinder and includes a suction muffler having an inner portion and a suction hole through which a refrigerant is suctioned, an inner pipe installed at the inner portion of the suction muffler, the inner pipe having a bent portion, the inner pipe providing communication between the suction hole and the cylinder and a coupler disposed at the bent portion.

Abstract: A reciprocating compressor according to an aspect includes a driving unit; a connecting rod; a piston; a cylinder; and a valve assembly, wherein the valve assembly includes a valve plate forming a main body, a suction inlet and a discharge outlet disposed at the valve plate and coming in communication with a compression space of the cylinder to guide a refrigerant flow, a suction valve and a discharge valve disposed at the valve plate and selectively opening the suction inlet and the discharge outlet, and a plurality of coupling portions disposed at the valve plate, and a plurality of corresponding coupling portions disposed to correspond to each of the plurality of coupling portions and preventing the valve assembly from being erroneously assembled are disposed at the cylinder.

Abstract: A reciprocating compressor according to an aspect includes a driving unit; a connecting rod; a piston; a cylinder; and a valve assembly, wherein the valve assembly includes a valve plate forming a main body, a suction inlet and a discharge outlet disposed at the valve plate and coming in communication with a compression space of the cylinder to guide a refrigerant flow, a suction valve and a discharge valve disposed at the valve plate and selectively opening the suction inlet and the discharge outlet, and a plurality of coupling portions disposed at the valve plate, and a plurality of corresponding coupling portions disposed to correspond to each of the plurality of coupling portions and preventing the valve assembly from being erroneously assembled are disposed at the cylinder.

Abstract: A reciprocating compressor including a shell, a suction pipe, a driver located at the inner portion of the shell to generate a rotary force, a compressor located in the shell and a muffler assembly is provided. The compressor includes a connecting rod configured to convert the rotary force to a linear driving force, a piston connected to the connecting rod and a cylinder into which the piston is movably inserted is provided. The muffler assembly is configured to transfer a refrigerant suctioned through the suction pipe to the cylinder and includes a suction muffler having an inner portion and a suction hole through which a refrigerant is suctioned, an inner pipe installed at the inner portion of the suction muffler, the inner pipe having a bent portion, the inner pipe providing communication between the suction hole and the cylinder and a coupler disposed at the bent portion.