Patents by Inventor Inna Louneva

Inna Louneva has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer fabrication data acquisition and management systems
    Patent number: 6952656
    Abstract: The present invention provides a semiconductor processing device (800) including a tool (802) having one or more sensors, a primary data communication port (804) and a secondary data communication port (806). A sensor data acquisition subsystem (808) acquires sensor data from the tool via the secondary port (806). The data acquisition subsystem (808) acquires MES operation messages via the primary port (804). Sensor data are communicated to a sensor processing unit (828) of a sensor data processing subsystem (810). The sensor processing unit (828) processes and analyzes the sensor data. Additionally, the processing unit (828) can be adapted for making product or processing related decisions, for example activating an alarm if the process is not operating within control limits.
    Type: Grant
    Filed: April 28, 2000
    Date of Patent: October 4, 2005
    Assignee: Applied Materials, Inc.
    Inventors: Sherry Cordova, Terry L. Doyle, Natalia Kroupnova, Evgueni Lobovski, Inna Louneva, Richard C. Lyon, Yukari Nishimura, Clari Nolet, Terry Reiss, Woon Young Toh, Michael E. Wilmer