Patents by Inventor Ippei Sawaki
Ippei Sawaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 7453182Abstract: A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.Type: GrantFiled: December 1, 2005Date of Patent: November 18, 2008Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki
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Patent number: 7411714Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.Type: GrantFiled: October 10, 2006Date of Patent: August 12, 2008Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda
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Publication number: 20080165409Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.Type: ApplicationFiled: October 10, 2006Publication date: July 10, 2008Applicant: FUJITSU LIMITEDInventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda
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Publication number: 20080075924Abstract: A microstructure device is made by processing a material substrate consisting of e.g. a first process layer, a second process layer and a middle layer arranged between the first and the second process layers. The microstructure device includes a first structural part and a second structural part that has a portion facing the first structural part via a gap. The first and the second structural parts are connected to each other by a connecting part extending across the gap. This connecting part is formed in the first process layer to be in contact with the middle layer. The microstructure device also includes a protective part extending from the first structural part toward the second structural part or vice versa. The protective part is formed in the first or second process layer to be in contact with the middle layer.Type: ApplicationFiled: September 18, 2007Publication date: March 27, 2008Applicant: FUJITSU LIMITEDInventors: Norinao Kouma, Yoshihiro Mizuno, Hisao Okuda, Hiromitsu Soneda, Tsuyoshi Matsumoto, Osamu Tsuboi, Ippei Sawaki
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Patent number: 7324251Abstract: The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.Type: GrantFiled: April 8, 2005Date of Patent: January 29, 2008Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Yoshihiro Mizuno, Satoshi Ueda, Ippei Sawaki, Hisao Okuda, Fumio Yamagishi, Hiromitsu Soneda, Norinao Kouma
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Publication number: 20070268549Abstract: A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.Type: ApplicationFiled: July 25, 2007Publication date: November 22, 2007Applicants: FUJITSU LIMITED, FUJITSU MEDIA DEVICES LIMITEDInventors: Mi Xiaoyu, Satoshi Ueda, Hisao Okuda, Osamu Tsuboi, Hiromitsu Soneda, Norinao Kouma, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7262541Abstract: A micro-oscillation element includes an oscillation section and a frame. The oscillation section is provided with a mirror surface and is connected to the frame via trapezoidal first and second springs. The oscillation section is located between the first spring and the second spring. Each of the first spring and the second spring is deformable along with the oscillation of the oscillation section.Type: GrantFiled: March 4, 2004Date of Patent: August 28, 2007Assignee: Fujitsu LimitedInventors: Mi Xiaoyu, Satoshi Ueda, Hisao Okuda, Osamu Tsuboi, Hiromitsu Soneda, Norinao Kouma, Ippei Sawaki, Yoshitaka Nakamura
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Publication number: 20070091415Abstract: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.Type: ApplicationFiled: July 5, 2006Publication date: April 26, 2007Inventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Fumio Yamagishi
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Publication number: 20070063614Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.Type: ApplicationFiled: November 22, 2006Publication date: March 22, 2007Applicant: FUJITSU LIMITEDInventors: Osamu Tsuboi, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7192879Abstract: A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.Type: GrantFiled: August 22, 2005Date of Patent: March 20, 2007Assignee: Fujitsu LimitedInventors: Norinao Kouma, Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Publication number: 20070041080Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.Type: ApplicationFiled: October 30, 2006Publication date: February 22, 2007Applicant: FUJITSU LIMITED, LTD.Inventors: Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda, Norinao Kouma, Hiromitsu Soneda, Fumio Yamagishi
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Patent number: 7161274Abstract: A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.Type: GrantFiled: March 3, 2004Date of Patent: January 9, 2007Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Mi Xiaoyu, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7145712Abstract: A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.Type: GrantFiled: October 13, 2004Date of Patent: December 5, 2006Assignee: Fujitsu LimitedInventors: Yoshihiro Mizuno, Satoshi Ueda, Osamu Tsuboi, Ippei Sawaki, Hisao Okuda, Norinao Kouma, Hiromitsu Soneda, Fumio Yamagishi
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Patent number: 7130099Abstract: A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.Type: GrantFiled: January 29, 2004Date of Patent: October 31, 2006Assignee: Fujitsu LimitedInventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Hisao Okuda
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Patent number: 7099066Abstract: A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.Type: GrantFiled: March 18, 2005Date of Patent: August 29, 2006Assignees: Fujitsu Limited, Fujitsu Media Devices LimitedInventors: Osamu Tsuboi, Satoshi Ueda, Yoshihiro Mizuno, Ippei Sawaki, Fumio Yamagishi
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Publication number: 20060119216Abstract: A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.Type: ApplicationFiled: November 14, 2005Publication date: June 8, 2006Applicant: FUJITSU LIMITEDInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki
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Publication number: 20060120425Abstract: A micro oscillating element is formed integrally from a material substrate made up of a first conductive layer, a second conductive layer and an insulating layer disposed between the first conductive layer and the second conductive layer. This oscillating element includes an oscillation section, an oscillation section supporting frame, and a torsional joining section. The oscillation section includes a movable functional section. The torsional joining section joins the oscillation section and the frame, and also defines an oscillation axis for oscillating action of the oscillation section. The movable functional section is a part formed in the first conductive layer, while the frame is a part formed in the second conductive layer.Type: ApplicationFiled: December 1, 2005Publication date: June 8, 2006Applicant: FUJITSU LIMITEDInventors: Norinao Kouma, Osamu Tsuboi, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki
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Patent number: 7038830Abstract: A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.Type: GrantFiled: August 26, 2004Date of Patent: May 2, 2006Assignees: Fujitsu Limited, Fujitsu Media Devices LimitedInventors: Osamu Tsuboi, Norinao Kouma, Hisao Okuda, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7033515Abstract: A method is for manufacturing a microstructure having a thin-walled portion with use of a material substrate. The material substrate has a laminated structure which includes a first conductor layer 101, a second conductor layer 102, a third conductor layer 103, a first insulating layer 104 interposed between the first conductor layer and the second conductor layer, and a second insulating layer 105 interposed between the second conductor layer and the third conductor layer. The first insulating layer is patterned to have a first masking part for covering a thin-wall forming region of the second conductor layer. The second insulating layer is patterned to have a second masking part for covering the thin-wall forming region of the second conductor layer.Type: GrantFiled: October 17, 2003Date of Patent: April 25, 2006Assignees: Fujitsu Limited, Fujitsu Media Devices LimitedInventors: Norinao Kouma, Yoshihiro Mizuno, Osamu Tsuboi, Hisao Okuda, Hiromitsu Soneda, Satoshi Ueda, Ippei Sawaki, Yoshitaka Nakamura
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Patent number: 7031041Abstract: A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).Type: GrantFiled: February 10, 2005Date of Patent: April 18, 2006Assignee: Fujitsu LimitedInventors: Xiaoyu Mi, Osamu Tsuboi, Satoshi Ueda, Ippei Sawaki