Patents by Inventor Ippei Shimizu

Ippei Shimizu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220351994
    Abstract: A substrate mapping device 4 maps a plurality of substrates 10 inside a container where the substrates 10 are accommodated so as to be arrayed in a given arrayed direction. The substrate mapping device 4 includes a sensor 16 configured to detect a state of the substrate 10, a manipulator 14 configured to move the sensor 16, and a control device 18 configured to control the manipulator 14 to move the sensor 16 along a mapping course. The control device 18 sets a first mapping position and a second mapping position different in the position in the arrayed direction of the substrates 10 from the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.
    Type: Application
    Filed: April 3, 2020
    Publication date: November 3, 2022
    Applicant: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Masaya YOSHIDA, Shinya KITANO, Hiroyuki OKADA, Ippei SHIMIZU
  • Publication number: 20220339795
    Abstract: At least three spherical surface sliding bearings provided between a first member and a second member and disposed at mutually different positions when seen in the height direction, are provided. Each of the at least three spherical surface sliding bearings has an inner ring and an outer ring, either one of the inner ring and the outer ring is attached to the first member, and the other is attached to the second member. In at least two of the at least three spherical surface sliding bearings, the height adjustment mechanism intervenes, at least either one of between one of the inner ring and the outer ring, and the first member, and between the other and the second member.
    Type: Application
    Filed: September 14, 2020
    Publication date: October 27, 2022
    Applicant: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Ippei SHIMIZU, Yoshiki MAEDA
  • Publication number: 20220254675
    Abstract: A robot hand to hold a substrate, which includes a base body, a blade defining a holding position for holding the substrate and attached at a base part to the base body, and a differential screw having a center axis perpendicular to a principal surface of the substrate existing at the holding position and configured to attach the base part of the blade to the base body. The differential screw includes a first threaded part having a first pitch, a second threaded part having a second pitch different from the first pitch, and an intervening member coaxially having a third threaded part to be threadedly engaged with the first threaded part, and a fourth threaded part to be threadedly engaged with the second threaded part. The first threaded part is provided to the base body, and the second threaded part is provided to the base part of the blade.
    Type: Application
    Filed: July 10, 2020
    Publication date: August 11, 2022
    Applicant: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Ippei SHIMIZU, Yoshiki MAEDA
  • Publication number: 20220250255
    Abstract: Blades, base parts to which the blades are fixed, a guide mechanism configured to guide movement of the base parts in a direction in which the base parts are arranged side by side, and a linkage mechanism configured to parallelly change intervals of the base parts according to angle changes of link members coupled to the base parts, are included. An interval fine-adjustment mechanism is provided at each of coupling parts between the base pars and the link members, the interval fine-adjustment mechanism being configured to finely adjust positions of the base parts in the direction in which the base parts are arranged side by side, individually. According to this, a blade interval adjusting device capable of finely adjusting the intervals of the blades which transfer wafers etc., is provided.
    Type: Application
    Filed: July 9, 2020
    Publication date: August 11, 2022
    Applicant: Kawasaki Jukogyo Kabushiki Kaisha
    Inventors: Ippei SHIMIZU, Yoshiki MAEDA
  • Patent number: 10504698
    Abstract: A plasma processing apparatus is provided that is configured to supply a gas into a chamber, generate a plasma from the gas using a power of an electromagnetic wave, and perform a predetermined plasma process on a substrate that is held by a mounting table. The plasma processing apparatus includes a dielectric window through which the electromagnetic wave that is output from an electromagnetic wave generator is propagated and transmitted into the chamber, a support member that supports the dielectric window, a partition member that separates a space where the support member is arranged from a plasma generation space and includes a protrusion abutting against the dielectric window, and a conductive member that is arranged between the partition member and the dielectric window and is protected from being exposed to the plasma generation space by the protrusion.
    Type: Grant
    Filed: September 29, 2015
    Date of Patent: December 10, 2019
    Assignee: Tokyo Electron Limited
    Inventors: Masayuki Kohno, Ryou Son, Naoki Matsumoto, Jun Yoshikawa, Michitaka Aita, Ippei Shimizu, Yusuke Yoshida, Koji Koyama, Masami Sudayama, Yukiyoshi Aramaki
  • Patent number: 10319568
    Abstract: A plasma processing apparatus includes a process chamber including a sidewall, a mounting table disposed in the process chamber, a shield member which is disposed along the inner surface of the sidewall to surround the mounting table and has an opening facing the transfer port, and a shutter configured to open/close the opening, the shutter being movable up and down. The shutter has a first portion adapted to face the opening, and a second portion adapted to face the shield member at a lower side of the shield member. The shield member has a lower portion including a contact surface facing the second portion. A contactor adapted to contact the contact surface is disposed at the second portion. The first portion of the shutter closes the opening through a gap between the first portion and the shield member. The contact surface and the contactor are formed of HASTELLOY®.
    Type: Grant
    Filed: October 27, 2014
    Date of Patent: June 11, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Ippei Shimizu, Naoki Mihara, Shunsuke Ogata
  • Patent number: 10312057
    Abstract: A plasma processing apparatus includes a processing chamber, a table disposed in the processing chamber, a dielectric window provided at the processing chamber, and a surrounding body made of a dielectric material surrounding a processing space between the table and the dielectric window. The dielectric window and the surrounding body are separated from each other in a vertical direction with a predetermined gap therebetween.
    Type: Grant
    Filed: October 14, 2015
    Date of Patent: June 4, 2019
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Masayuki Kohno, Yusuke Yoshida, Naoki Matsumoto, Ippei Shimizu, Naoki Mihara, Jun Yoshikawa, Michitaka Aita, Yoshikazu Azumaya, Junsuke Hoshiya
  • Publication number: 20160126114
    Abstract: A plasma processing apparatus includes a processing chamber, a table disposed in the processing chamber, a dielectric window provided at the processing chamber, and a surrounding body made of a dielectric material surrounding a processing space between the table and the dielectric window. The dielectric window and the surrounding body are separated from each other in a vertical direction with a predetermined gap therebetween.
    Type: Application
    Filed: October 14, 2015
    Publication date: May 5, 2016
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Masayuki KOHNO, Yusuke YOSHIDA, Naoki MATSUMOTO, Ippei SHIMIZU, Naoki MIHARA, Jun YOSHIKAWA, Michitaka AITA, Yoshikazu AZUMAYA, Junsuke HOSHIYA
  • Publication number: 20160118224
    Abstract: A plasma processing apparatus is provided that is configured to supply a gas into a chamber, generate a plasma from the gas using a power of an electromagnetic wave, and perform a predetermined plasma process on a substrate that is held by a mounting table. The plasma processing apparatus includes a dielectric window through which the electromagnetic wave that is output from an electromagnetic wave generator is propagated and transmitted into the chamber, a support member that supports the dielectric window, a partition member that separates a space where the support member is arranged from a plasma generation space and includes a protrusion abutting against the dielectric window, and a conductive member that is arranged between the partition member and the dielectric window and is protected from being exposed to the plasma generation space by the protrusion.
    Type: Application
    Filed: September 29, 2015
    Publication date: April 28, 2016
    Inventors: Masayuki KOHNO, Ryou SON, Naoki MATSUMOTO, Jun YOSHIKAWA, Michitaka AITA, Ippei SHIMIZU, Yusuke YOSHIDA, Koji KOYAMA, Masami SUDAYAMA, Yukiyoshi ARAMAKI
  • Publication number: 20150129129
    Abstract: A plasma processing apparatus includes a process chamber including a sidewall, a mounting table disposed in the process chamber, a shield member which is disposed along the inner surface of the sidewall to surround the mounting table and has an opening facing the transfer port, and a shutter configured to open/close the opening, the shutter being movable up and down. The shutter has a first portion adapted to face the opening, and a second portion adapted to face the shield member at a lower side of the shield member. The shield member has a lower portion including a contact surface facing the second portion. A contactor adapted to contact the contact surface is disposed at the second portion. The first portion of the shutter closes the opening through a gap between the first portion and the shield member. The contact surface and the contactor are formed of HASTELLOY®.
    Type: Application
    Filed: October 27, 2014
    Publication date: May 14, 2015
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Ippei SHIMIZU, Naoki MIHARA, Shunsuke OGATA
  • Publication number: 20060223811
    Abstract: A blood triglyceride depressant composition which comprises pravastatin and one or more members selected from the group consisting of (1) pantethine, (2) inositol hexanicotinate, (3) a combination drug containing a riboflavin compound, a tocopherol compound and an ascorbic acid compound, and (4) a combination drug containing a tocopherol compound and an ascorbic acid compound.
    Type: Application
    Filed: June 6, 2006
    Publication date: October 5, 2006
    Applicant: SANKYO COMPANY, LIMITED
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Patent number: 7037934
    Abstract: A blood lipid ameliorating composition containing atorvastatin in combination with an agent selected from the group consisting of a riboflavin derivative, a tocopherol compound, an ascorbic acid derivative, pantethine and taurine.
    Type: Grant
    Filed: June 11, 2003
    Date of Patent: May 2, 2006
    Assignee: Sankyo Company, Limited
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Patent number: 7012067
    Abstract: A blood lipid ameliorating composition containing simvastatin and one or more ingredients selected from a riboflavin compound, a d-?-tocopherol compound, an ascorbic acid compound, pantethine, and taurine.
    Type: Grant
    Filed: June 12, 2003
    Date of Patent: March 14, 2006
    Assignee: Sankyo Company, Limited
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Patent number: 6998422
    Abstract: Compositions having excellent blood lipid peroxide lowering activity are provided. In particular, compositions for lowering lipid peroxides in the blood which contain pravastatin together with at least one substance selected from the group consisting of taurine, pantethine and inositol hexanicotinate. Use of these compositions enables the provision of excellent preventive or remedial agents capable of lowering the concentration of lipid peroxides in the blood which show effects of injuring vascular endothelial cells, accelerating platelet aggregation, forming foam cells, etc.
    Type: Grant
    Filed: May 2, 2003
    Date of Patent: February 14, 2006
    Assignee: Sankyo Company, Limited
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Patent number: 6916849
    Abstract: The present invention relates to compositions for lowering the total amount of cholesterol in the blood and methods of using the compositions. The compositions are a mixture of pravastatin and one or more vitamins selected from riboflavins, d-?-tocopherols, ascorbic acids and inositol hexanicotinate.
    Type: Grant
    Filed: May 1, 2003
    Date of Patent: July 12, 2005
    Assignee: Sankyo Company, Limited
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Patent number: 6744139
    Abstract: A semiconductor device is provided which is capable of reducing the number of masking processes in forming contact holes. The semiconductor device comprises a semiconductor substrate (1), a gate structure (9), a stopper film (11), an interlayer insulation film (12), a contact hole (17) extending from the upper surface (13) of the interlayer insulation film (12) to the semiconductor substrate (1), a metal material (18) buried in the contact hole (17), a first metal wiring layer (19), an interlayer insulation film (20), a contact hole (23) extending from the upper surface (21) of the interlayer insulation film (20) to the first metal wiring layer (19), and a contact hole (24) extending from the upper surface (21) of the interlayer insulation film (20) to a gate electrode (7) of the gate structure (9). The contact hole (24) is formed at the same time as the contact hole (23).
    Type: Grant
    Filed: September 9, 2002
    Date of Patent: June 1, 2004
    Assignee: Renesas Technology Corp.
    Inventors: Ippei Shimizu, Shu Shimizu
  • Publication number: 20040023919
    Abstract: A blood lipid ameliorating composition containing atorvastatin in combination with one or more members selected from a riboflavin derivative, a tocopherol compound, an ascorbic acid derivative, pantethine and taurine.
    Type: Application
    Filed: June 11, 2003
    Publication date: February 5, 2004
    Applicant: SANKYO COMPANY, LIMITED
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Publication number: 20040014712
    Abstract: A blood lipid ameliorating composition containing simvastatin and one or more ingredients selected from a riboflavin compound, a d-&agr;-tocopherol compound, an ascorbic acid compound, pantethine, and taurine.
    Type: Application
    Filed: June 12, 2003
    Publication date: January 22, 2004
    Applicant: SANKYO COMPANY, LIMITED
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Publication number: 20040009986
    Abstract: A blood triglyceride depressant composition which comprises pravastatin and one or more members selected from the group consisting of (1) pantethine, (2) inositol hexanicotinate, (3) a combination drug containing a riboflavin compound, a tocopherol compound and an ascorbic acid compound, and (4) a combination drug containing a tocopherol compound and an ascorbic acid compound.
    Type: Application
    Filed: June 18, 2003
    Publication date: January 15, 2004
    Applicant: SANKYO COMPANY, LIMITED
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi
  • Publication number: 20030229124
    Abstract: Compositions having excellent blood lipid peroxide lowering activity are provided. In particular, compositions for lowering lipid peroxides in the blood which contain pravastatin together with at least one substance selected from the group consisting of taurine, pantethine and inositol hexanicotinate. Use of these compositions enables the provision of excellent preventive or remedial agents capable of lowering the concentration of lipid peroxides in the blood which show effects of injuring vascular endothelial cells, accelerating platelet aggregation, forming foam cells, etc.
    Type: Application
    Filed: May 2, 2003
    Publication date: December 11, 2003
    Applicant: SANKYO COMPANY, LIMITED
    Inventors: Tsuneki Ohsawa, Ikuo Takagi, Ippei Shimizu, Tatsuhito Kondo, Masato Nakayama, Yasuhiro Torizumi