Patents by Inventor Ir Kusnadi

Ir Kusnadi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contour alignment for model calibration
    Patent number: 8607168
    Abstract: Techniques for model calibration and alignment of measurement contours of printed layout features with simulation contours obtained with a model are disclosed. With various implementations of the invention, contour point errors are determined. Based on the contour point errors and a cost function, values of alignment parameters may be determined. The values of alignment parameters may be used to realign the measurement contours for model calibration. The alignment may be conducted concurrently with model calibration.
    Type: Grant
    Filed: April 22, 2011
    Date of Patent: December 10, 2013
    Assignee: Mentor Graphics Corporation
    Inventors: Ir Kusnadi, Thuy Q Do, Yuri Granik, John L Sturtevant
  • Contour Self-Alignment For Optical Proximity Correction Model Calibration
    Publication number: 20110202893
    Abstract: Techniques for model calibration and alignment of measurement contours of printed layout features with simulation contours obtained with a model are disclosed. With various implementations of the invention, contour point errors are determined. Based on the contour point errors and a cost function, values of alignment parameters may be determined. The values of alignment parameters may be used to realign the measurement contours for model calibration. The alignment may be conducted concurrently with model calibration.
    Type: Application
    Filed: February 16, 2011
    Publication date: August 18, 2011
    Inventors: Ir Kusnadi, Thuy Do, Yuri Granik, John L. Sturtevant
  • Contour Alignment For Model Calibration
    Publication number: 20110202898
    Abstract: Techniques for model calibration and alignment of measurement contours of printed layout features with simulation contours obtained with a model are disclosed. With various implementations of the invention, contour point errors are determined. Based on the contour point errors and a cost function, values of alignment parameters may be determined. The values of alignment parameters may be used to realign the measurement contours for model calibration. The alignment may be conducted concurrently with model calibration.
    Type: Application
    Filed: April 22, 2011
    Publication date: August 18, 2011
    Inventors: IR KUSNADI, Thuy Q. Do, Yuri Granik, John L. Sturtevant
  • Shape-based photolithographic model calibration
    Patent number: 7805699
    Abstract: A method and apparatus for determining how well a photolithographic model simulates a photolithographic printing process. A test pattern of features is printed on a wafer and the shape of the printed features is compared with the shape of simulated features produced by the model. A cost function is calculated from the comparison that quantifies how well the model simulates the photolithographic printing process.
    Type: Grant
    Filed: October 11, 2007
    Date of Patent: September 28, 2010
    Inventors: Ir Kusnadi, Yuri Granik
  • Shape-based photolithographic model calibration
    Publication number: 20090100389
    Abstract: A method and apparatus for determining how well a photolithographic model simulates a photolithographic printing process. A test pattern of features is printed on a wafer and the shape of the printed features is compared with the shape of simulated features produced by the model. A cost function is calculated from the comparison that quantifies how well the model simulates the photolithographic printing process.
    Type: Application
    Filed: October 11, 2007
    Publication date: April 16, 2009
    Inventors: Ir Kusnadi, Yuri Granik