Patents by Inventor Ira Oaktree Wygant

Ira Oaktree Wygant has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10690561
    Abstract: An example pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to determine a capacitance value from the first pressure sensor from a physical test performed on the first pressure sensor; the one or more first sensors to determine a first pull-in voltage value from a first electrical test performed on the first pressure sensor; a correlator to determine correlation coefficient values based on the capacitance value determined during the physical test on the first pressure sensor and the first pull-in voltage value determined during a first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a second electrical test on the second pressure sensor.
    Type: Grant
    Filed: February 5, 2019
    Date of Patent: June 23, 2020
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Patent number: 10444104
    Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to measure a first capacitance value from the first pressure sensor from a physical test performed; the one or more first sensors to measure a second capacitance value from a first electrical test performed on the first pressure sensor; and a correlator to determine correlation coefficient values based on the first capacitance value determined during the physical test on the first pressure sensor and the second capacitance value determined during the first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a third capacitance value determined during a second electrical test on the second pressure sensor.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: October 15, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Patent number: 10386256
    Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An example pressure sensor calibration apparatus includes a mechanical lift to move a pressure sensor between a first height, a second height, and a third height; one or more sensors to measure first pressure and capacitance values at the first height, second pressure and capacitance values at the second height, and third pressure and capacitance values obtained at the third height; and a calibrator to determine calibration coefficient values to calibrate the pressure sensor based on the first pressure and capacitance values obtained at the first height, the second pressure and capacitance values at the second height, and the third pressure and capacitance values obtained at the third height.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: August 20, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Patent number: 10335827
    Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region. A membrane layer is bonded on the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A through-substrate via (TSV) includes a dielectric liner which extends from a bottom side of the first substrate to a top surface of the membrane layer. A top side metal layer includes a first portion over the TSV, over the movable membrane, and coupling the TSV to the movable membrane. A patterned metal layer is on the bottom side surface of the first substrate including a first patterned layer portion contacting the bottom side of the first substrate lateral to the TSV.
    Type: Grant
    Filed: November 8, 2016
    Date of Patent: July 2, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Peter B. Johnson, Ira Oaktree Wygant
  • Publication number: 20190170596
    Abstract: An example pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to determine a capacitance value from the first pressure sensor from a physical test performed on the first pressure sensor; the one or more first sensors to determine a first pull-in voltage value from a first electrical test performed on the first pressure sensor; a correlator to determine correlation coefficient values based on the capacitance value determined during the physical test on the first pressure sensor and the first pull-in voltage value determined during a first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a second electrical test on the second pressure sensor.
    Type: Application
    Filed: February 5, 2019
    Publication date: June 6, 2019
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Patent number: 10197466
    Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An example pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to determine a capacitance value from the first pressure sensor from a physical test performed on the first pressure sensor; the one or more first sensors to determine a first pull-in voltage value from a first electrical test performed on the first pressure sensor; a correlator to determine correlation coefficient values based on the capacitance value determined during the physical test on the first pressure sensor and the first pull-in voltage value determined during a first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a second electrical test on the second pressure sensor.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: February 5, 2019
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Patent number: 10107830
    Abstract: A method of forming a capacitive micro-electro-mechanical system (MEMS) sensor device includes at least one capacitive MEMS sensor element with at least one capacitive MEMS sensor cell. A patterned dielectric layer including a thick dielectric region and a thin dielectric region is formed on a top side of a first substrate. A second substrate is bonded to the thick dielectric region to provide at least one sealed micro-electro-mechanical system (MEMS) cavity. The second substrate is thinned to reduce a thickness of said second substrate to provide a membrane layer. Vias are etched through the membrane layer and said thick dielectric region extending into the first substrate to form embedded vias. A dielectric liner which lines the embedded vias is formed within the first substrate. The embedded vias are filed with electrically conductive TSV filler material to form a plurality of through-substrate vias (TSVs), said plurality of TSVs extending to at least a top of said membrane layer.
    Type: Grant
    Filed: May 6, 2016
    Date of Patent: October 23, 2018
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Ira Oaktree Wygant, Peter B. Johnson
  • Publication number: 20180149541
    Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An example pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to determine a capacitance value from the first pressure sensor from a physical test performed on the first pressure sensor; the one or more first sensors to determine a first pull-in voltage value from a first electrical test performed on the first pressure sensor; a correlator to determine correlation coefficient values based on the capacitance value determined during the physical test on the first pressure sensor and the first pull-in voltage value determined during a first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a second electrical test on the second pressure sensor.
    Type: Application
    Filed: November 30, 2016
    Publication date: May 31, 2018
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Publication number: 20180149542
    Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An pressure sensor calibration apparatus includes a pressure chamber in which a first pressure sensor is to be disposed; one or more first sensors to measure a first capacitance value from the first pressure sensor from a physical test performed; the one or more first sensors to measure a second capacitance value from a first electrical test performed on the first pressure sensor; and a correlator to determine correlation coefficient values based on the first capacitance value determined during the physical test on the first pressure sensor and the second capacitance value determined during the first electrical test on the first pressure sensor; and a calibrator to determine calibration coefficient values to calibrate a second pressure sensor based on the correlation coefficient values and a third capacitance value determined during a second electrical test on the second pressure sensor.
    Type: Application
    Filed: November 30, 2016
    Publication date: May 31, 2018
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Publication number: 20180149540
    Abstract: Methods and apparatus to calibrate micro-electromechanical systems are disclosed. An example pressure sensor calibration apparatus includes a mechanical lift to move a pressure sensor between a first height, a second height, and a third height; one or more sensors to measure first pressure and capacitance values at the first height, second pressure and capacitance values at the second height, and third pressure and capacitance values obtained at the third height; and a calibrator to determine calibration coefficient values to calibrate the pressure sensor based on the first pressure and capacitance values obtained at the first height, the second pressure and capacitance values at the second height, and the third pressure and capacitance values obtained at the third height.
    Type: Application
    Filed: November 30, 2016
    Publication date: May 31, 2018
    Inventors: Mohammad Hadi Motieian Najar, Ira Oaktree Wygant
  • Patent number: 9970798
    Abstract: A flow meter system includes a first ultrasonic transducer array to be flush-mounted to a pipe. The system also includes a second ultrasonic transducer array to be flush-mounted to the pipe. The system further includes a controller coupled to the first and second ultrasonic transducer arrays and configured to cause bidirectional beam steering between the first and second ultrasonic transducer arrays.
    Type: Grant
    Filed: April 18, 2016
    Date of Patent: May 15, 2018
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: David Brian Barkin, Ira Oaktree Wygant
  • Patent number: 9937528
    Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) device including at least one CMUT element with at least one CMUT cell is formed. A patterned dielectric layer thereon including a thick and a thin dielectric region is formed on a top side of a single crystal material substrate. A second substrate is bonded to the thick dielectric region to provide at least one sealed micro-electro-mechanical system (MEMS) cavity. The second substrate is thinned to reduce a thickness of said second substrate to provide a membrane layer. The membrane layer is etched to form a movable membrane over said MEMS cavity and to remove said membrane layer over said top side substrate contact area. The thin dielectric region is removed from over said top side substrate contact area. A top side metal layer is formed including a trace portion coupling said top side substrate contact area to said movable membrane.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: April 10, 2018
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Peter B. Johnson, Ira Oaktree Wygant
  • Publication number: 20170050217
    Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region. A membrane layer is bonded on the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A through-substrate via (TSV) includes a dielectric liner which extends from a bottom side of the first substrate to a top surface of the membrane layer. A top side metal layer includes a first portion over the TSV, over the movable membrane, and coupling the TSV to the movable membrane. A patterned metal layer is on the bottom side surface of the first substrate including a first patterned layer portion contacting the bottom side of the first substrate lateral to the TSV.
    Type: Application
    Filed: November 8, 2016
    Publication date: February 23, 2017
    Inventors: PETER B. JOHNSON, IRA OAKTREE WYGANT
  • Publication number: 20160363609
    Abstract: A method of forming a capacitive micro-electro-mechanical system (MEMS) sensor device includes at least one capacitive MEMS sensor element with at least one capacitive MEMS sensor cell. A patterned dielectric layer including a thick dielectric region and a thin dielectric region is formed on a top side of a first substrate. A second substrate is bonded to the thick dielectric region to provide at least one sealed micro-electro-mechanical system (MEMS) cavity. The second substrate is thinned to reduce a thickness of said second substrate to provide a membrane layer. Vias are etched through the membrane layer and said thick dielectric region extending into the first substrate to form embedded vias. A dielectric liner which lines the embedded vias is formed within the first substrate. The embedded vias are filed with electrically conductive TSV filler material to form a plurality of through-substrate vias (TSVs), said plurality of TSVs extending to at least a top of said membrane layer.
    Type: Application
    Filed: May 6, 2016
    Publication date: December 15, 2016
    Inventors: IRA OAKTREE WYGANT, PETER B. JOHNSON
  • Patent number: 9520811
    Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region. A membrane layer is bonded on the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A through-substrate via (TSV) includes a dielectric liner which extends from a bottom side of the first substrate to a top surface of the membrane layer. A top side metal layer includes a first portion over the TSV, over the movable membrane, and coupling the TSV to the movable membrane. A patterned metal layer is on the bottom side surface of the first substrate including a first patterned layer portion contacting the bottom side of the first substrate lateral to the TSV.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: December 13, 2016
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Peter B. Johnson, Ira Oaktree Wygant
  • Patent number: 9470710
    Abstract: A packaged capacitive MEMS sensor device includes at least one capacitive MEMS sensor element with at least one capacitive MEMS sensor cell including a first substrate having a thick and a thin dielectric region. A second substrate with a membrane layer is bonded to the thick dielectric region and over the thin dielectric region to provide a MEMS cavity. The membrane layer provides a fixed electrode and a released MEMS electrode over the MEMS cavity. A first through-substrate via (TSV) extends through a top side of the MEMS electrode and a second TSV through a top side of the fixed electrode. A metal cap is on top of the first TSV and second TSV. A third substrate including an inner cavity and outer protruding portions framing the inner cavity is bonded to the thick dielectric regions. The third substrate together with the first substrate seals the MEMS electrode.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: October 18, 2016
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Ira Oaktree Wygant, Peter B. Johnson
  • Publication number: 20160231154
    Abstract: A flow meter system includes a first ultrasonic transducer array to be flush-mounted to a pipe. The system also includes a second ultrasonic transducer array to be flush-mounted to the pipe. The system further includes a controller coupled to the first and second ultrasonic transducer arrays and configured to cause bidirectional beam steering between the first and second ultrasonic transducer arrays.
    Type: Application
    Filed: April 18, 2016
    Publication date: August 11, 2016
    Inventors: David Brian Barkin, Ira Oaktree Wygant
  • Publication number: 20160221038
    Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) device including at least one CMUT element with at least one CMUT cell is formed. A patterned dielectric layer thereon including a thick and a thin dielectric region is formed on a top side of a single crystal material substrate. A second substrate is bonded to the thick dielectric region to provide at least one sealed micro-electro-mechanical system (MEMS) cavity. The second substrate is thinned to reduce a thickness of said second substrate to provide a membrane layer. The membrane layer is etched to form a movable membrane over said MEMS cavity and to remove said membrane layer over said top side substrate contact area. The thin dielectric region is removed from over said top side substrate contact area. A top side metal layer is formed including a trace portion coupling said top side substrate contact area to said movable membrane.
    Type: Application
    Filed: April 11, 2016
    Publication date: August 4, 2016
    Inventors: PETER B. JOHNSON, IRA OAKTREE WYGANT
  • Patent number: 9351081
    Abstract: A Capacitive Micromachined Ultrasonic Transducer (CMUT) device includes at least one CMUT cell including a first substrate of a single crystal material having a top side including a patterned dielectric layer thereon including a thick and a thin dielectric region, and a through-substrate via (TSV) extending a full thickness of the first substrate. The TSV is formed of the single crystal material, is electrically isolated by isolation regions in the single crystal material, and is positioned under a top side contact area of the first substrate. A membrane layer is bonded to the thick dielectric region and over the thin dielectric region to provide a movable membrane over a micro-electro-mechanical system (MEMS) cavity. A metal layer is over the top side substrate contact area and over the movable membrane including coupling of the top side substrate contact area to the movable membrane.
    Type: Grant
    Filed: February 27, 2013
    Date of Patent: May 24, 2016
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Peter B Johnson, Ira Oaktree Wygant
  • Patent number: 9333535
    Abstract: A micromachined ultrasonic transducer (MUT) circuit, which has a MUT with a MUT membrane that can vibrate back and forth to transmit an ultrasonic wave, electrically controls the movement of the MUT membrane by controllably transferring energy to the MUT membrane, thereby allowing the MUT membrane to transmit substantially any desired ultrasonic wave.
    Type: Grant
    Filed: January 24, 2012
    Date of Patent: May 10, 2016
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: David Brian Barkin, Joshua Posamentier, Ira Oaktree Wygant