Patents by Inventor Iris Pilch

Iris Pilch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • INSERT FOR A SOURCE CHAMBER OF AN EUV RADIATION SOURCE
    Publication number: 20230019744
    Abstract: An insert for a source chamber of an EUV radiation source has a pressure stage and, spaced apart from it, a stop.
    Type: Application
    Filed: July 14, 2022
    Publication date: January 19, 2023
    Inventors: Michael Hagg, Juan Jose Hasbun Wood, Iris Pilch, Christof Metzmacher
  • EUV radiation source, insert for an EUV radiation source and insert for an insert for an EUV radiation source
    Patent number: 11550225
    Abstract: An inner insert for a passage opening in an outer insert for an EUV radiation source is embodied in multiple parts and/or has a plurality of sections that extend in the longitudinal direction and have different internal diameters (di, da).
    Type: Grant
    Filed: June 2, 2021
    Date of Patent: January 10, 2023
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Iris Pilch, Juan Jose Hasbun Wood, Christof Metzmacher, Michael Hagg
  • EUV RADIATION SOURCE, INSERT FOR AN EUV RADIATION SOURCE AND INSERT FOR AN INSERT FOR AN EUV RADIATION SOURCE
    Publication number: 20210382395
    Abstract: An inner insert for a passage opening in an outer insert for an EUV radiation source is embodied in multiple parts and/or has a plurality of sections that extend in the longitudinal direction and have different internal diameters (di, da).
    Type: Application
    Filed: June 2, 2021
    Publication date: December 9, 2021
    Inventors: Iris Pilch, Juan Jose Hasbun Wood, Christof Metzmacher, Michael Hagg