Abstract: The process for making a thin Molybdenum sulfide film on a substrate in which the physical properties vary in a wide range and can be adjusted to the desired values comprises depositing on the substrate from a reaction gas mixture in the gas phase. This can be accomplished by decomposing a volatile molybdenum compound together with a volatile sulfur compound as a reactive gas in a glow discharge to form the reaction gas mixture in the presence of the substrate. The molybdenum compound can be molybdenum hexacarbonyl. The sulfur compound can be hydrogen sulfide.