Patents by Inventor Irwan Danni Setija

Irwan Danni Setija has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and Apparatus for Angular-Resolved Spectroscopic Lithography Characterization
    Publication number: 20110073775
    Abstract: An apparatus and method to determine overlay of a target on a substrate (6) by measuring, in the pupil plane (40) of a high numerical aperture len (L1), an angle-resolved spectrum as a result of radiation being reflected off the substrate. The overlay is determined from the anti-symmetric component of the spectrum, which is formed by subtracting the measured spectrum and a mirror image of the measured spectrum. The measured spectrum may contain only zeroth order reflected radiation from the target.
    Type: Application
    Filed: February 9, 2009
    Publication date: March 31, 2011
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Irwan Danni Setija, Maurits Van Der Schaar