Patents by Inventor Isabelle Tremblay

Isabelle Tremblay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for continuous cleaning of substrate surfaces using ozone
    Patent number: 6461443
    Abstract: The present invention provides new and improved methods and apparatus for removing contamination from surfaces of substrates. Existing techniques include plasma ashing, glow discharge or UV/ozone processes. The present invention includes cleaning the substrate surfaces by transporting the substrates to be cleaned through a first zone where the substrates are heated preferably in a nitrogen atmosphere and then to a second zone where the substrates are surrounded by an atmosphere of ozone. The organic contamination is thereby vaporized into vapor products including CO, CO2 and H2O.
    Type: Grant
    Filed: May 19, 2000
    Date of Patent: October 8, 2002
    Assignee: International Business Machines Corporation
    Inventors: Jean Audet, Mario Leboeuf, Isabelle Tremblay, Herbert P. R. Wossidlo