Abstract: Techniques are provided for estimating a line bias of a multi-antenna array. Diff-carrier phase (CP) values may be calculated based on navigation signals received at two antennas of the multi-antenna array. An integer portion may be removed from each diff-CP value. A baseline vector and a fine line bias estimate may be calculated for each of the plurality of candidate line bias value by executing an algorithm that uses each candidate with fractional diff-CP measurements that are corrected for the candidate that is being tested. Output of a test statistic method (e.g., sum of residual squares) and the smallest fine line bias estimate may be used to identify a particular candidate line bias value. The smallest fine line bias estimate may be added to the chosen candidate to calculate the line bias between the two antennas. Calibration of the multi-antenna array and attitude determination can be jointly performed.

Abstract: The present invention provides new and improved methods and apparatus for removing contamination from surfaces of substrates. Existing techniques include plasma ashing, glow discharge or UV/ozone processes. The present invention includes cleaning the substrate surfaces by transporting the substrates to be cleaned through a first zone where the substrates are heated preferably in a nitrogen atmosphere and then to a second zone where the substrates are surrounded by an atmosphere of ozone. The organic contamination is thereby vaporized into vapor products including CO, CO2 and H2O.