Patents by Inventor Isamu Komiya

Isamu Komiya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flow control valve utilizing sonic nozzle
    Patent number: 5988210
    Abstract: A flow control valve for a semiconductor manufacturing process, which valve utilizes a pressure sensor between the flow control valve and a subsequent sonic nozzle to detect the gas pressure which is fed back to the valve to control the flow through the valve.
    Type: Grant
    Filed: November 28, 1997
    Date of Patent: November 23, 1999
    Assignee: Aera Japan Ltd
    Inventors: Isamu Komiya, Masahiro Nambu