Patents by Inventor Isamu Nakatou

Isamu Nakatou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning processing method and cleaning processing apparatus
    Patent number: 6745783
    Abstract: To provide a cleaning processing method and a cleaning processing apparatus which can improve cleaning efficiency. The apparatus is structured to install processing units 11a-11d which provide more than one kind of chemical liquids out of a plurality of chemical liquids A-C for processing wafers W, and to enable the same kind of a processing liquid to be provided for at least two processing units, and, upon successively processing objects-to-be-processed which require their own processing sequences, to consecutively load each object-to-be-processed W to a processing unit which stores designated chemical liquid for a processing sequence of the object-to-be-processed.
    Type: Grant
    Filed: July 30, 2001
    Date of Patent: June 8, 2004
    Assignee: Tokyo Electron Limited
    Inventor: Isamu Nakatou
  • Cleaning processing method and cleaning processing apparatus
    Publication number: 20020036002
    Abstract: To provide a cleaning processing method and a cleaning processing apparatus which can improve cleaning efficiency.
    Type: Application
    Filed: July 30, 2001
    Publication date: March 28, 2002
    Applicant: TOKYO ELECTRON LIMITED
    Inventor: Isamu Nakatou