Abstract: In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.

Abstract: In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.

Abstract: A Stylus 1 is moved along the surface of a workpiece 20 and the surface texture of the workpiece 20 is measured based on the displacement of the stylus 1 in the Z direction. A spherical reference gage of known radius is measured with the stylus 1 in advance and radius values r of the tip sphere of the stylus 1 are calculated according to angle by subtracting the radius R of the reference gage from the measured values. The actual contour of workpiece 20 is calculated by using the radius values r as the correction data according to angle and subtracting the correction values according to angle and subtracting the correction values according to angle from the measured data obtained by movement along the surface of workpiece 20.

Abstract: A Stylus 1 is moved along the surface of a workpiece 20 and the surface texture of the workpiece 20 is measured based on the displacement of the stylus 1 in the Z direction. A spherical reference gage of known radius is measured with the stylus 1 in advance and radius values r of the tip sphere of the stylus 1 are calculated according to angle by subtracting the radius R of the reference gage from the measured values. The actual contour of workpiece 20 is calculated by using the radius values r as the correction data according to angle and subtracting the correction values according to angle from the measured data obtained by movement along the surface of workpiece 20.