Abstract: Method for increasing the smoothness of the free surface area of a PFA film, provided on a component by sequentially exposing it to a temperature higher than its melting temperature so as to melt at least the free surface area, lowering the temperature to solidify the melted portion, remelting the free surface area by exposing it to a temperature of at least the PFA melting temperature and again lowering the temperature. The PFA film may be provided on Al2O3, Ni or NiF2 film.

Abstract: Method for increasing the smoothness of the free surface area of a PFA film, provided on a component by sequentially exposing it to a temperature higher than its melting temperature so as to melt at least the free surface area, lowering the temperature to solidify the melted portion, remelting the free surface area by exposing it to a temperature of at least the PFA melting temperature and again lowering the temperature. The PFA film may be provided on Al2O3, Ni or NiF2 film.

Abstract: The present invention provides an inexpensive surgical guide preparation tool by which an insertion hole for implant can be correctly and easily formed at a predetermined position. The surgical guide preparation tool has a pair of marker members opposing to each other and a gauge body which has a support member for connecting the marker members, and the gauge body is attached to a surgical guide body. The surface of each marker member is provided with grid-like lines which are recognizable by a CT scanned image and disposed longitudinally and laterally at substantially regular intervals; predetermined marks are chosen from intersections of the grid-like lines, and a guide ring is attached to the surgical guide body so that a direction connecting the chosen marks is used as an axial direction of the guide ring. The axial direction of the guide ring is used as an insertion direction for implant.

Abstract: There is provided a gas exhaust pump system capable of suppressing the inclusion of a seal gas into a process gas. The gas exhaust pump system has a main and sub pumps. The main pump has a screw rotor, a rotating shaft, a holding unit, a lubricating oil supply path, a seal housing for covering a periphery of a non-held portion by the holding unit with a predetermined gap formed with an outer periphery of the rotating shaft, a seal member interposed between the rotating shaft and the seal housing, a seal gas supply path for supplying a seal gas to the gap, and a seal gas exhaust path for exhausting the seal gas from the gap to the outside of the main pump. The sub pump is configured to reduce a pressure in the seal gas exhaust path.

Abstract: In a gas exhaust pump, there is provided a rotation mechanism that can ensure safe rotation and can greatly reduce the usage of a seal gas. A rotation mechanism of the present invention is formed of a rotating shaft and a seal housing. Between the rotating shaft and the seal housing, there is provided a predetermined gap. On at least one of an outer surface of the rotating shaft and an inner surface of the seal housing, there is provided a PFA film. As to a PFA film on a surface of at least one of the rotating shaft and the seal housing, after coating with PFA the wall surface of the rotation mechanism member defining at least the gap, followed by melting and remelting processes, the PFA film is formed to have a high smoothness on its free surface.

Abstract: There is provided a stator that can ensure safe rotation even if a width of a gap between a screw rotor and a stator is particularly smaller than that of a conventional one and can greatly increase a pumping performance of a pump. A stator of the present invention is formed of a metal and a PFA film is provided on an inner wall surface of a top end surface of a screw rotor. After coating the inner wall surface with PFA, followed by melting and remelting processes, the PFA film is formed to have a high smoothness. The stator is placed with a gap between the inner wall surface and the top end surface. If the PFA film of the present invention is provided in a predetermined manner, the width of the gap can be made significantly smaller than that of a conventional one.

Abstract: There is provided a screw rotor that can ensure safe rotation and can greatly increase a pumping performance of a pump. The screw rotor is placed with a gap between a top end surface of a tooth of a screw portion and an inner wall surface of a stator. A PFA film is provided on the top end surface. If the PFA film of the present invention is provided in a predetermined manner, the width of a gap between a free surface of the PFA film and the inner wall surface of the stator can be made significantly smaller than that of a conventional one, so that the pumping performance is greatly improved. After coating at least the top end surface of the screw rotor with PFA, followed by melting and remelting processes, the PFA film is formed to have a high smoothness on its free surface.

Abstract: The present invention provides an inexpensive surgical guide preparation tool by which an insertion hole for implant can be correctly and easily formed at a predetermined position. The surgical guide preparation tool has a pair of marker members opposing to each other and a gauge body which has a support member for connecting the marker members, and the gauge body is attached to a surgical guide body. The surface of each marker member is provided with grid-like lines which are recognizable by a CT scanned image and disposed longitudinally and laterally at substantially regular intervals; predetermined marks are chosen from intersections of the grid-like lines, and a guide ring is attached to the surgical guide body so that a direction connecting the chosen marks is used as an axial direction of the guide ring. The axial direction of the guide ring is used as an insertion direction for implant.

Abstract: A screw vacuum pump includes a male rotor, a female rotor, a stator, and a drive motor/motors. A screw gear portion of the male rotor, a screw gear portion of the female rotor, and the stator cooperatively form a gas working chamber. The stator has an inlet port and an outlet port. At least one of the male rotor and the female rotor has a rotor hollow portion which is opened on at least one end face side in a rotation-axis longitudinal direction of the male rotor and/or the female rotor. The drive motor is at least partially received in the rotor hollow portion.

Abstract: An object of this invention is to provide a surface protective film which is capable of suppressing the entry of a corrosive gas as compared with conventional surface protective films. A surface protective film according to this invention is a film which contains yttria (Y2O3) as a main component and also contains cerium. Since the surface protective film contains cerium, defects such as micropores in the film are reduced, thereby enabling suppression of the entry of a corrosive gas.

Abstract: A guide system for implant instrument has a guide ring attached to the surgical guide supported by teeth, etc. and a ring guide body attached to a drill for forming an implant hole in jawbone. The guide ring is provided with a slit portion on its side face through which a drill bur is inserted from its lateral side at the time of drilling a hole, and the ring guide body of the drill is guided into the guide ring for formation of an implant hole.

Abstract: A mechanical pump of the present invention is applied to, for example, a screw pump A for exhausting a gas from a processing chamber. The screw pump comprises a gas-exposed region exposed to the gas and an yttria (Y2O3) film formed on the gas-exposed region.

Abstract: In a screw fluid machine including male and female rotors which are engaged with each other, a casing for accommodating both the male and female rotors, fluid working rooms which are formed by the male and female rotors and the casing, and fluid inlet and outlet ports which are provided in the casing so as to intercommunicate with one end portion and the other end portion of the working rooms, the helix angle of the screw gear constituting each of the male and female rotors is set to be continuously varied in a helix advance direction. Further, the screw gear is designed so that the peripheral length of a pitch cylinder in a helix advance direction on a development of a tooth-trace rolling curve on the pitch cylinder of the screw gear can be expressed by a substantially monotonically increasing function.

Abstract: In a screw fluid machine including male and female rotors which are engaged with each other, a casing for accommodating both the male and female rotors, fluid working rooms which are formed by the male and female rotors and the casing, and fluid inlet and outlet ports which are provided in the casing so as to intercommunicate with one end portion and the other end portion of the working rooms, the helix angle of the screw gear constituting each of the male and female rotors is set to be continuously varied in a helix advance direction. Further, the screw gear is designed so that the peripheral length of a pitch cylinder in a helix advance direction on a development of a tooth-trace rolling curve on the pitch cylinder of the screw gear can be expressed by a substantially monotonically increasing function.

Abstract: In a screw fluid machine including male and female rotors which are engaged with each other, a casing for accommodating both the male and female rotors, fluid working rooms which are formed by the male and female rotors and the casing, and fluid inlet and outlet ports which are provided in the casing so as to intercommunicate with one end portion and the other end portion of the working rooms, the helix angle of the screw gear constituting each of the male and female rotors is set to be continuously varied in a helix advance direction. Further, the screw gear is designed so that the peripheral length of a pitch cylinder in a helix advance direction on a development of a tooth-trace rolling curve on the pitch cylinder of the screw gear can be expressed by a substantially monotonically increasing function.