Abstract: The present invention relates to a non-magnetic needle bearing for use in a rotational machine such as, for example, an MRI. The needle bearing may include needles, a cylindrical retainer holding the needles at a predetermined pitch, an outer ring outside of the retainer, and an inner ring inside the retainer. All of the aforementioned may be made of a non-thermoplastic polyimide resin.

Abstract: The present invention relates to a non-magnetic needle bearing for use in a rotational machine such as, for example, an MRI. The needle bearing may include needles, a cylindrical retainer holding the needles at a predetermined pitch, an outer ring outside of the retainer, and an inner ring inside the retainer. All of the aforementioned may be made of a non-thermoplastic polyimide resin.

Abstract: This disclosure relates to a spindle cover comprising a non-thermoplastic polyimide, wherein the spindle cover has a wall thickness in a range from about 1 mm to about 10 mm.

Abstract: This disclosure relates to a spindle assembly comprising: a spindle; and a spindle cover thereon, wherein the spindle cover has a wall thickness (T) in a range from about 1 mm to about 10 mm, and wherein the spindle cover comprises a non-thermoplastic polyimide.

Abstract: This disclosure relates to a spindle disc assembly comprising: a spindle disc having a plurality of spindle assemblies disposed along the periphery of the spindle disc, the spindle assemblies each comprising a spindle cover, wherein the spindle cover has a wall thickness in a range from about 1 mm to about 10 mm, and wherein the spindle cover comprises a non-thermoplastic polyimide.

Abstract: The present invention relates to a substrate cassette support bar in a substrate cassette for housing a plurality of horizontally oriented substrates in multiple levels in the vertical direction, the substrate bar being arranged so as to inhibit bending of the central portion of each substrate, comprising: an upper plate made of a carbon fiber composite material; a lower plate made of a carbon fiber composite material; and an intermediate member disposed between the upper plate and the lower plate, and made of a material other than a carbon fiber composite material.

Abstract: The present invention relates to a substrate cassette that houses a plurality of horizontally oriented substrates in multiple levels in the vertical direction and in which support bars are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame formed on the back of the opposite side from the substrate insertion side.

Abstract: An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, stainless steel and honeycomb-shaped fiber-reinforced plastic (FRP). Further, a substrate transport robot is equipped with the above end effector.