Patents by Inventor Isao Hagino

Isao Hagino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5820683
    Abstract: A boat includes a boat body, a top plate mounted on one end and a bottom plate mounted on the other end of the boat body. The boat body has a prop section and the prop section has a plurality of support portions provided parallel to each other along its longitudinal direction and each having a substantially circular arc-like configuration. The support portion has an opening at a front side to allow the forward end of an arm to be entered into an inside of the support portion to transfer a wafer W. Another opening is provided in a back section of a prop section at an area corresponding to the opening to allow the forward end of the arm to extend through it. The support portion supports the wafer W with the wafer edge portion set on its rest surface. The support portion and its rest surface are so formed as to have a substantially circular arc-configuration. By doing so, the rest surface of the support portion supports the wafer edge portion over as greater a length as possible.
    Type: Grant
    Filed: May 22, 1996
    Date of Patent: October 13, 1998
    Assignee: Tokyo Electron Limited
    Inventors: Katsutoshi Ishii, Isao Hagino, Mitsuo Mizukami