Abstract: In the hand-held vacuum pump 1, the main body 1a of the vacuum pump in which the pump room 4a is formed and the electric motor 2 are connected via the shaft coupling 21. The main body of the vacuum pump has the driving shaft 10. One ball bearing 15b supporting the driving shaft is supported by the cylinder. The other ball bearing 15a is sup ported by the flange 5 mounted hermetically at the cylinder. The end part of the cylinder at the side of the electric motor accommodates the shaft coupling, and is engaged with the end part of the electric motor so that the electric motor may support the cylinder.

Abstract: A high vacuum hot press for producing a multi-layer board. The high vacuum hot press includes a pair of heat insulating members each comprising a heat insulating material and a thin metallic cover defining an evacuated hermetic space accommodating therein the heat insulating material. The heat insulating members are arranged on respective surfaces, facing each other on a pair of bolsters. A pair of hot plates are placed on the heat insulating members, respectively. A multi-layer workpiece is disposed between the hot plates in a sealed space in a sealing unit. The multi-layer work includes wafers and an adhesive base material. The sealed space is evacuated to a high vacuum by an evacuating unit, and the multi-layer workpiece is heated by a heating unit under a high vacuum.

Abstract: The present invention provides an aligning apparatus which is capable of aligning auxiliary connecting plates such as a testing fixture plate so as to fit to both sides of a substrate. A camera 13a monitors aligning marks provided on a substrate 6 and a first auxiliary connecting plate (i.e. a lower surface testing fixture plate) 8 to carry out an aligning operation by moving the substrate 6 by means of an XY.THETA. table 5. A first plate-fitting member (a vacuum suction member) 32 fixes the substrate 6 and the first auxiliary connecting plate 8. On the other hand, a camera 13b monitors aligning marks provided on the substrate 6 and a second auxiliary connecting plate (i.e. an upper surface testing fixture plate) 11 to carry out an aligning operation by moving the second auxiliary connecting plate 11 by means of the XY.THETA. table 5. A second plate-fitting member (a vacuum suction member) 33 fixes the substrate 6 and the second auxiliary connecting plate 11.

Abstract: A slider equipped with a magnetic head is pressed on a magnetic disk surface under a constant pressure by a pressing member. The slider is loaded and unloaded by a loading/unloading mechanism. A driving unit of the loading/unloading mechanism has a shape memory alloy member which offers a shape memory effect based on the thermoelastic martensitic transformation, and a resilient member having a resilient force against the driving force of the shape memory alloy member. Moreover, the loading/unloading mechanism is arranged such that when the slide is loaded, the driving force of the loading/unloading mechanism is not applied to the pressing member supporting the slider.