Abstract: According to the present invention, there is provided a method for processing a coating film comprising the steps of forming a silica group coating film having a low dielectric constant on a substrate, conducting an etching process to the silica group coating film through a photoresist pattern, processing the silica group coating film with plasma induced from helium gas. With this, it is possible to prevent the silica group coating film from being damaged when a wet stripping process is conducted to the photoresist pattern as a subsequent process, and to maintain the low dielectric constant of the coating film.

Abstract: In the case where a game controller is provided with plural elements for obtaining outputs by changes in resistance values, currents also flow through some of the elements not detected, increasing current consumption. Also, the number of input lines to a CPU increases, putting a heavy load on the CPU. Plural variable resistors each comprising a resistance member and an elastically deformable element are connected to common fixed resistors, and midpoints between the variable resistors and the fixed resistors are connected to an A/D converting circuit as common output paths. Connection parts connected to the variable resistors are switched in order to a ground potential, whereby voltage outputs based on changes in resistance values of the variable resistors can be obtained in order from the common output paths.

Abstract: Encoders as first detecting means detect rotations of a control body, and an acceleration sensor as second detecting means detects an acceleration applied to the control body. Based on the rotations and the acceleration, a ball displayed on a screen can be curved in the air. Consequently, an operator of a game can control the ball displayed on the screen or the like by controlling an impact, that is, an acceleration, a rotational direction, and a rotational speed.

Abstract: A sewing machine has needles reciprocally movable in a first direction through a fabric web and shuttles reciprocally movable in a second direction perpendicular to the first direction. The used shuttles accommodating an empty bobbin is replaced with the new shuttle accommodating a full bobbin. The needles and the shuttles cooperate to form stitch patterns on the fabric web. A device is provided for the automatic replacement of the used shuttle with the new shuttle.

Abstract: A control method of a gas turbine which is provided with a multi can type combustor consisting of a plurality of unit combustors, each of which has a first stage combustion section for diffusion combustion and a second stage combustion section for premix combustion. Combustion states in the first and second stage combustion sections are monitored to take in quantities representative of the combustion conditions as control factors. The combustion in the second stage combustion section is assumed to be abnormal when the taken in quantities exceed an allowable limit and the combustion in the first and second stage combustion sections is changed to independent combustion only in the first stage combustion section when the number of unit combustors, each of which is assumed to be abnormal, exceeds a predetermined number of the unit combustors.

Abstract: A polymer injection molding unit is disclosed having a mold wall which includes a portion made of an infrared transmissible material which is radiated by an external infrared radiation source. Due to the passage of the infrared radiation through the infrared transmissible material, the infrared radiation is not absorbed by the mold wall and the mold wall is not substantially heated. The infrared radiation passes through the mold wall and is absorbed by the molten polymer material near the mold wall. As a result, the temperature of the molten polymer material rises and its viscosity is lowered to thereby enhance the shape transcription of complicated or fine shapes present on the mold wall, without increasing the temperature of the mold wall.

Abstract: A gas turbine engine control method and apparatus as disclosed for optimizing fuel/air mixture, especially during decreasing load conditions. In a large capacity gas turbine engine system used for generation of electric power, the system is designed to operate at a relatively constant rotational speed of the turbine which drives an electric generator unit. The load of the turbine engine varies throughout the day due to changes in electrical power demands. During normal rated load conditions, the control of the fuel/air mixture is by way of changes in fuel supply, corrected to return the turbine exhaust temperature to a desired rated temperature. During this mode of operation, the compressor inlet guide vanes are maintained in a substantially constant open position. For accommodating decreasing load conditions where the temperature drops below a predetermined temperature level below the rated temperature operation, the system is switched to an inlet guide vane control mode of operation.

Abstract: A control apparatus of a gas turbine combustor for effecting a stable combustion with limited NOx emission through a control of a fuel flow rate according to a turbine output and a control of a flow rate of intake air mixed with the fuel comprises: means for detecting at least one of the temperature and the humidity of an intake air to be taken into the combustor; means for determining and storing, in advance, a stable combustion limit line between a stable combustion region and an unstable combustion region, on a plane of coordinates of a ratio of fuel flow rate/intake air flow rate or an intake air flow rate and the temperature or the humidity of the intake air, on each turbine load; means for detecting an instant operational point of the combustor on the plane of coordinates; and means for correcting an intake air flow rate or a ratio of fuel flow rate to the intake air flow rate according to an increase in the detected temperature or humidity so that the operational point does not cross the stable combust

Abstract: There is disclosed a semiconductor memory device comprising memory cells (M11 to Mmn) for storing binary data, and first reference cells (DM11 to DMm1) and second reference cells (DM12 to DMm2) corresponding to respective two storage states of the memory cell, to make comparisons between the storage state of the memory cell and the storage states of the both reference cells at first and second sense amplifiers (1, 2) to compare outputs from the both sense amplifiers at the third sense amplifier (3) to thereby detect storage data of the memory cell. Thus, there can be provided a high speed memory device which has a less number of memory cells and of a high integration structure, and which has a little possibility of an erroneous operation in reading.

Abstract: A combustor comprises a passage area changing mechanism which relatively moves a flame holder relative to a premixed combustion nozzle in an axial direction so that the area of passage for premixed gas between an injection edge of the premixed combustion nozzle and a peripheral edge of the flame holder can be changed. Stable combustion can be maintained over a wide load range and reduction in NOx can be achieved.

Abstract: A control apparatus of a gas turbine combustor obtains a stable combustion with limited NOx emission through a control of a fuel flow rate according to a turbine output and a control of a flow rate of intake air mixed with the fuel.

Abstract: A gas turbine apparatus has a gas turbine and a plurality of burners for providing combustion gas to drive the turbine. A flow control means of each burner for fuel or combustion air is adjusted by control means to control each said burner individually in dependence on a predetermined combustion characteristic of the respective burner. Sensed quantities relating to the combustion performance of the burners are input to the control means which adjusts the flow control means of each burner in dependence on the sensed quantities and the predetermined combustion characteristic of the respective burner.

Abstract: A method for controlling a gas turbine combustor which comprises nozzles for injecting fuel into a combustor and which serves to combust the fuel with air in a combustion chamber so as to rotatively drive a gas turbine by combustion gas compressed as a result of combustion of a fuel, wherein the ratio of a flow rate of fuel supplied into the combustor to a flow rate of air supplied into the combustor is changed in accordance with at least one of the states of fuel, air and rotational frequency of the turbine.

Abstract: There is disclosed a semiconductor memory device comprising memory cells (M11 to Mnn) for storing binary data, and first reference cells (DM11 to Dm1) and second reference cells (DM12 to DMm2) corresponding to respective two storage states of the memory cell, to make comparisons between the storage state of the memory cell and the storage states of the both reference cells at first and second sense amplifiers (1, 2) to compare outputs from the both sense amplifiers at the third sense amplifier (3) to thereby detect storage data of the memory cell. Thus, there can be provided a high speed memory device which has a less number of memory cells and of a high integration structure, and which has a little possibility of an erroneous operation in reading.

Abstract: First and second premixed burners having annular injection slots are concentrically adjacent and the injection slots are substantially aligned with each other in a longitudinal direction of the burners. A pilot burner is provided substantially in the center of the annular first premixed burner so that the injection slot of the pilot burner is substantially aligned with the injection slot of the first premixed burner in a longitudinal direction of the burner. A flame holder which forms a circulating flow of combusted gas Gh downstream of the flame holder is disposed at the downstream end of a boundary wall between the premixed burners so that the flame holder is co-used by the premixed burners. Flow rate adjusting means for adjusting the flow rate of fuel supplied to the first, second premixed burner and the pilot burner, respectively are provided. The fuel can be substantially uniformly mixed with a combustion gas. Reduction in NOx and stabilization of premixed flame can be achieved.

Abstract: A fuel supply amount is controlled while the load of a gas turbine is changed so that the fuel supply amount is shifted to a fuel supply amount in accordance with the changed load. A fuel supply control valve is operated at high speed during an initial stage and operated at a lower speed as the fuel supply amount necessary for the changed load is reached. Therefore flameout of a combustor is prevented without increasing the number of revolutions of the gas turbine over a certain upper limit.

Abstract: There is disclosed a semiconductor memory device comprising memory cells (M11 to Mmn) for storing binary data, and first reference cells (DM11 to DMm1) and second reference cells (DM12 to DMm2) corresponding to respective two storage states of the memory cell, to make comparisons between the storage state of the memory cell and the storage states of the both reference cells at first and second sense amplifiers (1, 2) to compare outputs from the both sense amplifiers at the third sense amplifier (3) to thereby detect storage data of the memory cell. Thus, there can be provided a high speed memory device which has a less number of memory cells and of a high integration structure, and which has a little possibility of an erroneous operation in reading.

Abstract: A burner comprises at least one swirl member for mixing a fuel with an air previously to burning of the fuel, and at least one eddy generating device which is arranged in a flow of a mixture of the fuel and air to generate an eddy flow in the flow so that the eddy flow maintains a shape of a flame of the burned fuel. The at least one eddy generating device is arranged apart from a downstream end of the swirl member by a fixed sufficient distance so that the shape of the flame maintained by the eddy flow is prevented from moving toward the downstream end of the swirler member.