Abstract: A method for coating a substrate comprising the steps of disposing a non-conductive substrate within a space, introducing particles of a coating material within the space, the space being defined by at least a pair of electrodes and an insulating member inserted between the electrodes, and vibrating the particles by applying an ac voltage between the electrodes so as to coat the non-conductive substrate with the coating material.

Abstract: A method of coating a substrate, including the steps of: providing a space between an anode substrate constituting an anode and a cathode substrate constituting a cathode using an insulating member inserted between the anode substrate and the cathode substrate, supplying the providing space with particles of a coating material, preferably a metal or a metallic compound, evacuating the space, and generating an electric field in the evacuated space to cause vibration of the particles to coat the anode substrate and the cathode substrate with the particles of the coating material. According to the substrate coating method of the present invention, a coating with a high purity having excellent adhesion to a substrate and a uniform thickness can be formed on a substrate at normal temperatures at a high efficiency. Furthermore, according to the substrate coating method of the present invention, a coating can be formed on a substrate at a low electric power.