Abstract: A mounting device in which a conductive film that is not separated is formed on a resin substrate. Alloy thin films, which contain more than 50% by atom of Cu, 5% by atom or more and 30% by atom or less of Ni, and 3% by atom or more and 10% by atom or less of Al, are formed on a base consisting of a resin so as to be brought into contact with a surface of the base by sputtering. Conductive films consisting of copper are formed on surfaces of the alloy thin films so as to obtain a wiring film having a two-layer structure and a metal plug filled in a connection hole. The alloy thin films have high adhesion to a resin; and hence, the wiring film and the metal plug are not separated.

Abstract: A mounting device in which a conductive film that is not separated is formed on a resin substrate. Alloy thin films, which contain more than 50% by atom of Cu, 5% by atom or more and 30% by atom or less of Ni, and 3% by atom or more and 10% by atom or less of Al, are formed on a base consisting of a resin so as to be brought into contact with a surface of the base by sputtering. Conductive films consisting of copper are formed on surfaces of the alloy thin films so as to obtain a wiring film having a two-layer structure and a metal plug filled in a connection hole. The alloy thin films have high adhesion to a resin; and hence, the wiring film and the metal plug are not separated.

Abstract: A highly durable touch panel is provided. A touch panel according to the present invention includes a deformable flexible panel, and a transparent electrode film containing In2O3 as a primary component and containing Ti is exposed to a surface of a lower electrode film of a display device. Since such a transparent electrode film has a high abrasion resistance as compared to a conventional one (such as, an ITO thin film), the transparent electrode film is neither clouded nor cracked even if the lower electrode film is repeatedly pressed. Therefore, the touch panel according to the present invention is highly durable.

Abstract: Exfoliation of an etching stopper is prevented. A color filter of the present invention includes an inorganic protection film (etching stopper) composed mainly of SnO2. Since the inorganic protection film as such not only has a high specific resistance but also has a linear expansion coefficient close to the linear expansion coefficient of a transparent electrode, the inorganic protection film is not exfoliated from the transparent electrode or the resin layer even if an object to be processed is heated. Since the inorganic protection film and the transparent electrode can be formed in the same film forming chamber, the time required to produce the color filter can be shortened as compared to in the conventional technique.

Abstract: A method for manufacturing a solar cell provided with an upper electrode which functions as an electrode for extracting electric power at a light incidence side of the solar cell and includes a ZnO-based transparent conductive film, the method comprising: forming the upper electrode by sputtering a target on which a formation material of the transparent conductive film is provided while applying sputtering voltage of 340V or less and generating a horizontal magnetic field on a target surface.

Abstract: The present invention relates to a method for manufacturing a solar cell provided with a buffer layer or an intermediate electrode. The buffer layer is disposed between a rear electrode and a photovoltaic cell. The rear electrode is disposed on the opposite side of a light incidence side and functions as an electrode for extracting electric power. The intermediate electrode is disposed between a plurality of photovoltaic cells. The intermediate electrode or the buffer layer comprises a ZnO-based transparent conductive film. The method comprises forming the intermediate electrode or the buffer layer by sputtering a target on which a formation material of the transparent conductive film is provided while applying sputtering voltage to generate a horizontal magnetic field on a surface of the target. The intermediate electrode or the buffer layer is formed through sputtering at a sputtering voltage of 340V or less.

Abstract: A method for forming a transparent conductive film forms the transparent conductive film containing ZnO as a basic element on a substrate by a sputtering which is performed by applying a sputtering voltage to a target made of a material to form the transparent conductive film and generating a horizontal magnetic field over a surface of the target. The sputtering is performed by setting the sputtering voltage to 340 V or less.

Abstract: Exfoliation of an etching stopper is prevented. A color filter of the present invention includes an inorganic protection film (etching stopper) composed mainly of SnO2. Since the inorganic protection film as such not only has a high specific resistance but also has a linear expansion coefficient close to the linear expansion coefficient of a transparent electrode, the inorganic protection film is not exfoliated from the transparent electrode or the resin layer even if an object to be processed is heated. Since the inorganic protection film and the transparent electrode can be formed in the same film forming chamber, the time required to produce the color filter can be shortened as compared to in the conventional technique.

Abstract: A highly durable touch panel is provided. A touch panel according to the present invention includes a deformable flexible panel, and a transparent electrode film containing In2O3 as a primary component and containing Ti is exposed to a surface of a lower electrode film of a display device. Since such a transparent electrode film has a high abrasion resistance as compared to a conventional one (such as, an ITO thin film), the transparent electrode film is neither clouded nor cracked even if the lower electrode film is repeatedly pressed. Therefore, the touch panel according to the present invention is highly durable.

Abstract: A target is produced inexpensively by safely incorporating an additive which is inflammable in the atmosphere. A primary alloy in a molten state is formed by adding an additive into a principal material in a low-level oxygen atmosphere, and a secondary alloy is produced by increasing the volume of the primary alloy through adding the principal material to the molten primary alloy in the atmospheric atmosphere. Since the primary alloys in the molten or solid condition are stable, it does not ignite in the atmosphere. Since the volume of the primary alloy is smaller than that of the secondary alloy, a smaller size of a vacuum chamber 11 for the formation of the first atmosphere suffices.

Abstract: The present invention provides a magnetron sputtering method and a magnetron sputtering apparatus that can significantly reduce a non-erosion region causing an abnormal electrical discharge on a surface of a target and deposition of target materials. A plurality of targets 8A, 8B, 8C and 8D are disposed in a vacuum atmosphere while being electrically independent to each other; and sputtering is performed by generating magnetron discharge in the vicinity of the targets 8A, 8B, 8C and 8D. During the sputtering, voltages having a phase difference of 180 degrees are alternately applied to the adjacent targets 8A, 8B, 8C and 8D at a predetermined timing.

Abstract: A scribe device comprises a body (10). A holder (20) is supported by the body (10) such that the holder (20) can slightly slide in a direction of a slide axis (Lb) which intersects a surface of a workpiece (100). Retaining portions (15, 21) spaced apart in a direction of the slide axis (Lb) are formed on the body (10) and the holder (20), respectively. A vibratory actuator (40) is sandwiched between the retainer portion of the body and the retainer portion of the holder. The holder (20) holds an abutment member (30). The holder is biased by a biasing member (23) such that said retaining portion of the holder is pressed against the vibratory actuator. The vibratory actuator renders the vibrations in the direction of the slide axis to the holder. The abutment member transmits the vibrations from the holder to the workpiece. That is, the abutment member (30) is subjected to a static force and a vibration energy and pressed against the workpiece (100).

Abstract: A scribe device comprises a body (10). A holder (20) is supported by the body (10) such that the holder (20) can slightly slide in a direction of a slide axis (Lb) which intersects a surface of a workpiece (100). Retaining portions (15, 21) spaced apart in a direction of the slide axis (Lb) are formed on the body (10) and the holder (20), respectively. A vibratory actuator (40) is sandwiched between the retainer portion of the body and the retainer portion of the holder. The holder (20) holds an abutment member (30). The holder is biased by a biasing member (23) such that said retaining portion of the holder is pressed against the vibratory actuator. The vibratory actuator renders the vibrations in the direction of the slide axis to the holder. The abutment member transmits the vibrations from the holder to the workpiece. That is, the abutment member (30) is subjected to a static force and a vibration energy and pressed against the workpiece (100).

Abstract: An internal space of a closed container is divided into a first chamber and a second chamber by a deformable partition member. The first chamber is provided as a chamber for reserving a liquid crystal and connected to an object through a first port of the closed container. The second chamber receives a pressurized fluid from a pressurized fluid supply source through a second port of the closed container. The liquid crystal within the first chamber is pressurized through the partition member by a pressurized fluid which is introduced into the second chamber and the liquid crystal is delivered to the object.

Abstract: A connector device is connected to a liquid crystal cell having an edge portion formed as a stepped portion. This connector device includes a connector unit. The connector unit includes a body, and an elastic seal member received in a receiving recess of the body. The seal member has a projection. This projection is formed as a stepped portion corresponding in configuration to the stepped portion of the edge portion of the cell. That is, the projection of the seal member includes a first abutment surface which intimately contacts a first receiving surface of the cell, a second abutment surface which intimately contacts a second receiving surface of the cell, and a third abutment surface which intimately contacts a third receiving surface of the cell. The first and second abutment surfaces are in parallel relation to each other, and the third abutment surface is orthogonal to the first and second abutment surfaces. An association recess is formed in the third abutment surface.

Abstract: An internal space of a container is divided into a first chamber and a second chamber by a partition member. The first chamber is provided as chamber for reserving a liquid crystal and connected to an object through a first port of the container. The second chamber receives a pressurized fluid from a pressurized fluid supply source through a second port of the closed container. The liquid crystal within the first chamber is pressurized through the partition member by a pressurized fluid which is introduced into the second chamber and the liquid crystal is delivered to the object.

Abstract: One end of a vacuum evacuation passage is connected to a suction port of a cell and one end of a liquid crystal supply passage is connected to an introduction port of the cell. In that state, an internal space of the cell is evacuated through the vacuum evacuation passage and the suction port. Thereafter, a pressurized liquid crystal is supplied to the internal space of the cell through the liquid crystal supply passage and the introduction port while evacuating the internal space of the cell. After the completion of a liquid crystal filling operation to the internal space of the cell, the supply of the pressurized liquid crystal is stopped and the level of the negative pressure in the vacuum evacuation passage is gradually eased to the level of the atmospheric pressure.

Abstract: A liquid crystal introduction connector includes a connector body. The connector body has a guide groove formed in its front surface and a receiving space formed backwardly of the guide groove. A resilient seal member is received in the receiving space. A nozzle member is allowed to extend through the seal member such that the nozzle member can move forwardly and backwardly. The nozzle member is biased forwardly by a spring. When a side edge of a cell having an introduction port is inserted through the guide groove, the seal member is resiliently deformed to receive the side edge. Under the effect of the spring, the nozzle member is brought into abutment with the side edge of the cell. The liquid crystal passes through a liquid crystal supply passageway and reaches the introduction port of the cell via nozzle ports of the nozzle member.

Abstract: Composite sheets comprising expanded graphite, a sheet-like metallic core inserted therein and, if desired, a binder for the expanded graphite. In one embodiment, gaskets are prepared from the composite sheets.

Abstract: A process for the production of flexible graphite comprising incorporating particulate expanded graphite having a c direction expansion at least 10 times as great as that of the original c direction dimension with an organo-silicon high molecular weight compound having carbon and silicon as the skeletal components, such as polysilmethylenesiloxane, or with a colloidal silica, drying the resulting mixture, pressure molding the dried mixture and heat treating the molded mixture at 500.degree.-2000.degree. C. thereby to produce the flexible graphite. In one embodiment, this invention relates to flexible graphite obtained by the process.