Abstract: A positioning unit that performs positioning with respect to a predetermined sample, an imaging unit that obtains an image of the sample, and a processing unit, in which the imaging unit is moved by the positioning unit, and obtains a first image and a second image which is obtained later than the first image, and in which the processing unit obtains a first position shift trend from the first image and the second image, and determines whether or not the positioning is abnormal from a change of the first position shift trend.

Abstract: A component mounting apparatus having a feature in which the component mounting apparatus includes a component mounting unit including a nozzle and a distance detector for optically detecting a distance between a component held by the mounting nozzle and a board, and an illuminated region formed by the distance detector is located in a vicinity of a portion obtained by projecting the mounting nozzle onto the board.

Abstract: Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).

Abstract: Provided is a charged particle beam device that is small, high performance, and easy to transport. A charged particle beam device (100) is provided with a detachable body unit (15) and an auxiliary unit (14), the body unit (15) housing a functional unit related to charged particle beams, and the auxiliary unit (14) housing a power source unit (9).

Abstract: A positioning unit that performs positioning with respect to a predetermined sample, an imaging unit that obtains an image of the sample, and a processing unit, in which the imaging unit is moved by the positioning unit, and obtains a first image and a second image which is obtained later than the first image, and in which the processing unit obtains a first position shift trend from the first image and the second image, and determines whether or not the positioning is abnormal from a change of the first position shift trend.

Abstract: A component mounting apparatus having a feature in which the component mounting apparatus includes a component mounting unit including a nozzle and a distance detector for optically detecting a distance between a component held by the mounting nozzle and a board, and an illuminated region formed by the distance detector is located in a vicinity of a portion obtained by projecting the mounting nozzle onto the board.

Abstract: A component feeder capable of enhancing productivity is provided by that the component feeder includes a tape feeding device intermittently feeding a component housing tape constituted of a carrier tape having component housing parts formed with predetermined interval to contain respective electronic components, and a cover tape covering the component housing parts to prevent the components from jumping out from the component housing parts while the component housing tape wound on a housing tape reel is sequentially fed to a component extracting position, and an electronic component exposing device exposing the electronic components in the component housing parts to be allowed to be extracted, wherein the tape feeding device is constituted of a first feeding device and a second feeding device, and the electronic component exposing device is provided between the first feeding device and the second feeding device.

Abstract: A component feeder capable of enhancing productivity is provided by that the component feeder includes a tape feeding device intermittently feeding a component housing tape constituted of a carrier tape having component housing parts formed with predetermined interval to contain respective electronic components, and a cover tape covering the component housing parts to prevent the components from jumping out from the component housing parts while the component housing tape wound on a housing tape reel is sequentially fed to a component extracting position, and an electronic component exposing device exposing the electronic components in the component housing parts to be allowed to be extracted, wherein the tape feeding device is constituted of a first feeding device and a second feeding device, and the electronic component exposing device is provided between the first feeding device and the second feeding device.

Abstract: In an electronic parts installation device, increasing throughput by brining parallel operation of motors, etc., to the maximum, and having high reliability by reducing contacts and/or interferences generating the parallel operations, an electronic parts installation head actuator 9, comprises a plural number of suction nozzles 115, each for sucking an electronic part to install it on a printed circuit board, a nozzle selector member 301 for selecting a predetermined suction nozzle from the plural number of suction nozzles 115, and an elevating device 101 for elevating the plural number of suction nozzles 115, wherein the nozzle selector member 301 has a permanent magnet for attracting the suction nozzle 115, which is biased in one direction by a spring 112, to the direction opposite to that one direction, and an excitation coil for neutralizing a magnetic force of the permanent magnet by applying current therein.