Abstract: Provided is a test apparatus that tests a device under test, comprising an inductance load section that is provided in a path through which test current flows to the device under test and that has an inductance component; a switching section that switches whether the test current is supplied to the device under test from the inductance load section; a cut-off control section that severs the path by switching the switching section according to a state of the device under test; and a voltage control section that controls voltage of the path between the inductance load section and the switching section to be no greater than a predetermined clamp voltage.

Abstract: In the monochromator, when measured beam which is diffracted by a plane diffraction grating is collected by a collimator to be returned, the measured beam is displaced by a displacement member in a direction parallel to rulings of the plane diffraction grating and is passed through a first cut-off slit having a slit of a predetermined width formed in a direction perpendicular to the direction of the rulings.

Abstract: In the monochromator, when measured beam which is diffracted by a plane diffraction grating is collected by a collimator to be returned, the measured beam is displaced by a displacement member in a direction parallel to rulings of the plane diffraction grating and is passed through a first cut-off slit having a slit of a predetermined width formed in a direction perpendicular to the direction of the rulings.

Abstract: A light power spectrum is accurately measured, in spite of the polarized light-dependency of the non-polarizing beam splitter 12. Incident light 11 is separated by a polarizing/separating element 31 into orthogonal polarized light components 11a and 11b. The orthogonal polarized light components have their polarizing directions rotated by 45 degrees in opposite directions with respect to their P wave components and S wave components at the reflecting/transmitting face of the non-polarizing beam splitter. The reflected and transmitted from the non-polarizing beam splitter 12 are reflected by a stationary reflector 16 and a moving reflector 17 back to the non-polarizing beam splitter 12 and are recombined to interfere with each other at the reflecting/transmitting face of the non-polarizing beam splitter. The resulting interference lights are received by a common light-receiver.

Abstract: Incoming light is reflected by a first parabolic mirror for incidence as parallel rays of light on a diffraction grating, the reflected light therefrom is incident on a second parabolic mirror, and the reflected light therefrom is bent by first and second reflecting mirror in a vertical direction and reflected back to the second parabolic mirror, from which it is reflected to the diffraction grating. The reflected light from the grating is reflected again by the first parabolic mirror for incidence on a photodetector. An optical glass plate is inserted in the optical path between the second reflecting mirror and the second parabolic mirror. By the passage through the optical glass plate, the optical axis in a horizontal plane is displaced to ensure the incidence of light from the first parabolic mirror on the photodetector regardless of the wavelength of the incoming light to be measured.