Patents by Inventor Ishao Ashaishi

Ishao Ashaishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Waste gas exhaust system for vacuum process apparatus
    Patent number: 4655800
    Abstract: An exhaust system utilizes a booster pump and an auxiliary pump of vacuum process apparatus which vacuum treats a substrate with gases of the chlorine series. A vessel of the auxiliary pump on the air exhaust side is filled with an inert gas of a pressure higher than the atmospheric pressure, and a dry adsorption column capable of adsorbing the gases of the chlorine series is connected to an air exhaust pipe of the auxiliary pump. Further, a dust trap having a cooling surface is provided between the booster pump and the auxiliary pump, and the wall surface of the gas passage between the booster pump and the auxiliary pump is heated.
    Type: Grant
    Filed: March 21, 1985
    Date of Patent: April 7, 1987
    Assignee: Anelva Corporation
    Inventors: Tsutomu Tsukada, Ishao Ashaishi, Tatsunori Koizumi, Kouji Ikeda