Patents by Inventor Israel Avneri
Israel Avneri has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11189451Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.Type: GrantFiled: December 2, 2020Date of Patent: November 30, 2021Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan, Natan Schlimoff, Igor Krivts (Krayvitz), Jacob Levin, Israel Avneri
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Publication number: 20210175040Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.Type: ApplicationFiled: December 2, 2020Publication date: June 10, 2021Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan, Natan Schlimoff, Igor Krivts (Krayvitz), Jacob Levin, Israel Avneri
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Patent number: 10886092Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.Type: GrantFiled: April 3, 2020Date of Patent: January 5, 2021Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan, Natan Schlimoff, Igor Krivts (Krayvitz), Jacob Levin, Israel Avneri
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Publication number: 20200234907Abstract: A charged particle beam source that may include an emitter that has a tip for emitting charged particles; a socket; electrodes; a filament that is connected to the electrodes and to the emitter; electrodes for providing electrical signals to the filament; a support element that is connected to the emitter; and a support structure that comprises one or more interfaces for contacting only a part of the support element while supporting the support element.Type: ApplicationFiled: April 3, 2020Publication date: July 23, 2020Applicant: APPLIED MATERIALS ISRAEL LTD.Inventors: Itay Asulin, Ofer Yuli, Lavy Shavit, Yoram Uziel, Guy Eytan, Natan Schlimoff, Igor Krivts (Krayvitz), Jacob Levin, Israel Avneri
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Patent number: 10056274Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.Type: GrantFiled: February 10, 2016Date of Patent: August 21, 2018Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Michael R. Rice, Paul Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni
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Patent number: 10049904Abstract: A method and a system for moving a substrate, the system includes a chamber, a chuck, a movement system that is positioned outside the chamber, a controller, an intermediate element, at least one sealing element that is configured to form a dynamic seal between the intermediate element and the chamber housing. The movement system is configured to repeat, for each region of the substrate out of a plurality of regions of the substrate, the steps of: rotating the chuck to position a given portion of the region of the substrate within a field of view that is related to an opening of the chamber housing; and moving the chuck relation to the opening to position additional portions of the region of the substrate within the field of view that is related to the opening.Type: GrantFiled: August 3, 2017Date of Patent: August 14, 2018Assignees: Applied Materials, Inc., Applied Materials Israel Ltd.Inventors: Ofer Adan, Israel Avneri, Yoram Uziel, Igor Krivts (Krayvitz), Niranjan Ramchandra Khasgiwale
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Patent number: 9997328Abstract: Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provisioType: GrantFiled: May 20, 2016Date of Patent: June 12, 2018Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Michael R. Rice, Ron Naftali, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Zvika Rozenberg, Erez Admoni, Yochanan Madmon
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Patent number: 9829809Abstract: A system for coupling a mask to a mask holder. The system includes a base, an aperture; mask holder cover supporting elements arranged to move between a first position and a third position while supporting the mask holder cover; mask supporting elements arranged to move between a fourth position and a sixth position while supporting the mask; mask holder base supporting elements arranged to support the mask holder base. When the mask holder cover supporting elements are at the first position and the mask supporting elements are at the third position the mask holder cover, the mask and the base are spaced apart from each other. When the mask holder cover supporting elements are at the third position and the mask supporting elements are at the sixth position the mask holder cover, the mask and the base are connected to each other.Type: GrantFiled: February 10, 2016Date of Patent: November 28, 2017Assignee: APPLIED MATERIALS ISRAEL LTD.Inventors: Israel Avneri, Igor Krivts (Krayvitz), Yoram Uziel, Nir Ben-David Dodzin, Ido Holcman
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Patent number: 9587749Abstract: There is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.Type: GrantFiled: August 11, 2014Date of Patent: March 7, 2017Assignee: Applied Materials Israel, Ltd.Inventors: Michael R. Rice, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni, Paul Reuter, William (Ty) Weaver
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Patent number: 9488924Abstract: A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.Type: GrantFiled: January 7, 2014Date of Patent: November 8, 2016Assignee: Applied Materials Israel Ltd.Inventors: Mariano Abramson, Hadar Mazaki, Erez Admoni, Israel Avneri
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Publication number: 20160268097Abstract: Chamber elements defining an internal chamber to be utilized during a substrate related stage selected from the group consisting of substrate manufacturing stage and substrate inspection stage, the chamber elements comprising: a first element having a first surface; a second element having a second surface about the periphery of the internal chamber; a third element connected to the second element; and a clamping mechanism that is connected to the second and third elements and is arranged to press the second element towards the first element; wherein a first area of the first surface and a second area of the second surface come into proximity with each other at a first interface; wherein the first surface is positioned above the second surface; wherein a gas groove and a vacuum groove are formed in the second area; wherein the second element comprises a gas conduit that is arranged to provide gas to the gas groove and a vacuum conduit that is arranged to provide vacuum to the vacuum groove; wherein a provisioType: ApplicationFiled: May 20, 2016Publication date: September 15, 2016Inventors: Michael R. Rice, Ron Naftali, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Zvika Rozenberg, Erez Admoni, Yochanan Madmon
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Publication number: 20160161869Abstract: A system for coupling a mask to a mask holder. The system includes a base, an aperture; mask holder cover supporting elements arranged to move between a first position and a third position while supporting the mask holder cover; mask supporting elements arranged to move between a fourth position and a sixth position while supporting the mask; mask holder base supporting elements arranged to support the mask holder base. When the mask holder cover supporting elements are at the first position and the mask supporting elements are at the third position the mask holder cover, the mask and the base are spaced apart from each other. When the mask holder cover supporting elements are at the third position and the mask supporting elements are at the sixth position the mask holder cover, the mask and the base are connected to each other.Type: ApplicationFiled: February 10, 2016Publication date: June 9, 2016Inventors: Israel Avneri, Igor Krivts (Krayvitz), Yoram Uziel, Nir Ben-David Dodzin, Ido Holcman
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Publication number: 20160163570Abstract: According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.Type: ApplicationFiled: February 10, 2016Publication date: June 9, 2016Inventors: Michael R. Rice, Paul Reuter, William (Ty) Weaver, Travis Morey, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni
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Patent number: 9302358Abstract: Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.Type: GrantFiled: July 17, 2013Date of Patent: April 5, 2016Assignee: Applied Materials Israel, Ltd.Inventors: Igor Krayvitz (Krivts), Israel Avneri, Yoram Uziel, Natan Schlimoff, Gilad Schwartz, Yochanan Madmon
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Publication number: 20150192868Abstract: A system that may include a mechanical stage that is arranged to move an object along a predetermined path in relation to an optical module during an illumination of the object by the optical module; a structural support element that is arranged to support at least a part of the optical module; a gas flow module that is arranged to direct clean gas towards the object through gas flow module openings that define a coverage area that is (a) bigger than the object and (b) is positioned directly above at least a majority of the object when the object is positioned anywhere along the predetermined path.Type: ApplicationFiled: January 7, 2014Publication date: July 9, 2015Applicant: APPLIED MATERIALS ISRAEL, LTD.Inventors: Mariano Abramson, Hadar Mazaki, Erez Admoni, Israel Avneri
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Publication number: 20150075659Abstract: According to an embodiment of the invention, there is provided a slit valve, comprising: a first slit valve portion having a first window therethrough, the first window is sized to permit passage of an object through the first window; wherein the first window is surrounded by a first area of the first slit valve portion; a second slit valve portion that comprises a first sealing element and a first positioning module; wherein the first positioning module is arranged to move the first sealing element in relation to the first window; wherein at least one slit valve portion of the first and second slit valve portions comprises at least one first gas opening for emitting pressurized gas so as to assist in a creation of a first gas cushion between the first area and the first sealing element when the first sealing element is placed adjacent to the first window thus creating a seal between the first and second slit valve portions.Type: ApplicationFiled: August 11, 2014Publication date: March 19, 2015Inventors: Michael R. Rice, Natan Schlimoff, Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Erez Admoni, Paul Reuter, William (Ty) Weaver
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Patent number: 8772737Abstract: A coupling module may include an upper portion that defines an aperture, mask contact elements, chuck contact elements and an intermediate element that is connected between the mask contact elements and the upper portion. A shape and a size of the aperture may correspond to a shape and size of a pattern transfer area of an extreme ultra violet (EUVL) mask. The coupling module may be shaped and sized so that once the mask contact elements contact the upper portion of the EUVL mask, the chuck contact elements contact a chuck that supports the mask. The coupling module may further provide at least one conductive path between the upper portion of the EUVL mask and the chuck when the EUVL mask is positioned on the chuck.Type: GrantFiled: September 20, 2012Date of Patent: July 8, 2014Assignee: Applied Materials Israel, Ltd.Inventors: Igor Krivts (Krayvitz), Israel Avneri, Yoram Uziel, Nir Ben-David Dodzin, Ido Holcman, Itzak Yair, Yosi Basson
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Publication number: 20140027968Abstract: Chamber elements defining a chamber include a first element having a first surface, a second element, a first dynamic seal and load mechanism. The second element includes an outer floating element that includes a second surface about the periphery of the chamber, and an inner floating element. The second surface and the first surface are maintained proximate to each other when the chamber is in a load position and when the chamber is closed. The load mechanism may move the inner floating element from the outer floating element until a gap between the inner floating element and the second element to facilitate loading of the device to the chamber. A movement system may generate relative movement between the first element and the second element.Type: ApplicationFiled: July 17, 2013Publication date: January 30, 2014Inventors: Igor Krayvitz (Krivts), Israel Avneri, Yoram Uziel, Natan Schlimoff, Gilad Schwartz, Yochanan Madmon
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Patent number: 6257564Abstract: A vacuum chuck is disclosed which has nipples as support structure and for vacuum delivery. In the preferred embodiment, two types of nipples are used: “plain” nipples which provide only support and vacuum nipples which provide support and deliver vacuum to retain the wafer on the chuck. The contact surface of the plain nipples is made smaller than that of the vacuum nipples. The chuck is secured to a stage using special supports which have limited flexibility in two axis with respect to the chuck, so as to prevent warping the chuck. Special vacuum nipples are disclosed which do not deliver vacuum unless the wafer exerts sufficient predetermined pressure on the nipple. The chuck is designed to hold both 200 mm and 300 mm wafers.Type: GrantFiled: May 15, 1998Date of Patent: July 10, 2001Assignee: Applied Materials, IncInventors: Israel Avneri, Eyal Duzi, Dvir Keren, Avner Regev