Abstract: A substrate alignment system that includes (i) an illumination unit that is configured to illuminate an illuminated region that comprises an entire edge of a substrate; (ii) a sensing unit having a field of view that covers the entire edge of the substrate even when the substrate is misaligned, the sensing unit includes a sensor that is preceded by a fish eye lens, the sensor is configured to generate detection signals of the entire edge of the substrate; and (iii) a processing circuit that is configured to process the detection signals and determine whether the substrate is misaligned. A determining that the substrate is misaligned triggers an execution of one or more misalignment correction operation for aligning the substrate.

Abstract: A substrate safety system that includes (i) a control unit that is configured to trigger a substrate recovery related procedure; (ii) a sensing unit that is configured to generate, during an execution of the substrate recovery related procedure, sensed information that is indicative of one or more regions that are associated with a substrate handling station of a substrate evaluation system; (iii) an AI processing unit that is configured to apply an AI process on the sensed information to determine a recovery related status of the substrate; and (iv) a response unit that is configured to respond to the recovery related status of the substrate.