Patents by Inventor Itaru HAGIWARA

Itaru HAGIWARA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate transport apparatus and method for manufacturing magnetic recording medium
    Patent number: 8534975
    Abstract: A substrate transport apparatus comprises chambers connected to each other through a gate valve, a transport mechanism configured to open the gate valve and to transport a carrier between the chambers along a transport path, a sensor configured to detect the carrier before the carrier reaches a stop position in the chamber, and a controller configured to cause the gate valve to start closing based on the detection signal from the sensor.
    Type: Grant
    Filed: October 22, 2009
    Date of Patent: September 17, 2013
    Assignee: Canon Anelva Corporation
    Inventors: Itaru Hagiwara, Naoyuki Nozawa
  • SUBSTRATE TRANSPORT APPARATUS AND METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM
    Publication number: 20100101075
    Abstract: A substrate transport apparatus comprises chambers connected to each other through a gate valve, a transport mechanism configured to open the gate valve and to transport a carrier between the chambers along a transport path, a sensor configured to detect the carrier before the carrier reaches a stop position in the chamber, and a controller configured to cause the gate valve to start closing based on the detection signal from the sensor.
    Type: Application
    Filed: October 22, 2009
    Publication date: April 29, 2010
    Applicant: CANON ANELVA CORPORATION
    Inventors: Itaru HAGIWARA, Naoyuki Nozawa