Abstract: A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first spindle is rotated by a second motor independent of rotation of the base, is positioned coaxially with the pivotal center, and one end of a first arm is attached to the first spindle. A second spindle on the other end of the first arm is rotated by a gear ratio 2:1, and one end of a second arm is attached to the second spindle. A third spindle is carried on the other end of the second arm and is rotated by a gear ratio 1:2. One end of a third arm is attached to the third spindle, and a hand for holding a substrate is attached on the other end of the third arm.

Abstract: A substrate conveyer robot inserts and removes a substrate to and from a an arbitrarily positioned container. A base is rotatably driven by a first motor which defines a pivotal center. A first spindle is rotated by a second motor independent of rotation of the base, is positioned coaxially with the pivotal center, and one end of a first arm is attached to the first spindle. A second spindle on the other end of the first arm is rotated by a gear ratio 2:1, and one end of a second arm is attached to the second spindle. A third spindle is carried on the other end of the second arm and is rotated by a gear ratio 1:2. One end of a third arm is attached to the third spindle, and a hand for holding a substrate is attached on the other end of the third arm.

Abstract: The invention provides a substrate conveyer robot that enables the conveyance, handover and takeout of a substrate, to and from a container disposed in an arbitrary position and direction within the accessible range of the robot hand. The substrate conveyer robot is provided with the rotation base driven to rotate by a first motor inside the body of the robot, which has a pivotal center. A first spindle is protruded in a state indifferent to a rotation of the rotation base, which is positioned coaxially with the pivotal center on an upper part of the rotation base, and is driven to rotate by a second motor, and one end of a first arm is attached to the first spindle. A second spindle is protruded on the other end of the first arm in a state indifferent to the rotation of the first arm, which is rotated by a gear rate 2:1, accompanied with the rotation of the first arm, and one end of a second arm is attached to the second spindle.

Abstract: The invention provides a substrate conveyer robot that enables the conveyance, handover and takeout of a substrate, to and from a container disposed in an arbitrary position and direction within the accessible range of the robot hand. The substrate conveyer robot is provided with the rotation base driven to rotate by a first motor inside the body of the robot, which has a pivotal center. A first spindle is protruded in a state indifferent to a rotation of the rotation base, which is positioned coaxially with the pivotal center on an upper part of the rotation base, and is driven to rotate by a second motor, and one end of a first arm is attached to the first spindle. A second spindle is protruded on the other end of the first arm in a state indifferent to the rotation of the first arm, which is rotated by a gear rate 2:1, accompanied with the rotation of the first arm, and one end of a second arm is attached to the second spindle.