Abstract: An exposure device in which a strip-like workpiece is transported by a grip feeding method, is to be able to expose the strip-like workpiece without being tensile stressed is achieved as follows: A feed grip part holds a strip-like workpiece. The workpiece is transported downstream in the transport direction. During transport of the workpiece, the serpentine of the workpiece is determined and corrected. After stopping the motion of the workpiece, it is attached by a workpiece holding device which is located upstream of an exposure part. Then, the feed gripper part is moved according to the amount of stretching of the workpiece upstream in the transport direction, while the workpiece remains clamped by the feed grip part. In this way, the tensile force exerted on the workpiece is eliminated. Next, the workpiece is attached by a second workpiece holding device. The workpiece is attached by suction by a workpiece carrier. The mask is moved, alignment is performed and the workpiece is exposed.