Patents by Inventor Itay Assulin

Itay Assulin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sensor for electron detection
    Patent number: 11355309
    Abstract: The present invention relates to a sensor for electron detection emitted from an object to be used with a charged particle beam column being operated at a certain column and wafer voltage. The sensor is configured and operable to at least reduce interaction of negative ions with the active area of the sensor while minimizing electrons energy loss. The sensor is also configured and operable to minimize both gradual degradation of a cathodoluminescence efficiency of the active area and dynamic change of cathodoluminescence generated during operation of the sensor and evolving throughout the scintillator's lifetime.
    Type: Grant
    Filed: August 1, 2019
    Date of Patent: June 7, 2022
    Assignee: APPLIED MATERIALS ISRAEL LTD.
    Inventors: Itay Assulin, Jacob Levin, Guy Eytan
  • SENSOR FOR ELECTRON DETECTION
    Publication number: 20210319976
    Abstract: The present invention relates to a sensor for electron detection emitted from an object to be used with a charged particle beam column being operated at a certain column and wafer voltage. The sensor is configured and operable to at least reduce interaction of negative ions with the active area of the sensor while minimizing electrons energy loss. The sensor is also configured and operable to minimize both gradual degradation of a cathodoluminescence efficiency of the active area and dynamic change of cathodoluminescence generated during operation of the sensor and evolving throughout the scintillator's lifetime.
    Type: Application
    Filed: August 1, 2019
    Publication date: October 14, 2021
    Inventors: Itay Assulin, Jacob Levin, Guy Eytan