Patents by Inventor Itsushi Iio

Itsushi Iio has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and maintenance method therefor
    Patent number: 7361905
    Abstract: A substrate processing apparatus comprises a chamber. The chamber includes a container and an upper lid for closing an upper opening of the container. On the upper side of the chamber, an elevator for vertically moving the upper lid is disposed integrally with the chamber.
    Type: Grant
    Filed: April 9, 2004
    Date of Patent: April 22, 2008
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventors: Toshiharu Tanaka, Itsushi Iio
  • Stage base, substrate processing apparatus, and maintenance method for stage
    Patent number: 7060990
    Abstract: A stage base comprises a base body, an elevator, and a shifter. The base body has a bottom face facing a reference surface. The elevator is attached to the base body and operative to move the base body in a vertical direction with respect to the reference surface. The shifter is attached to the elevator. The shifter enables the base body to move along the reference surface.
    Type: Grant
    Filed: June 15, 2004
    Date of Patent: June 13, 2006
    Assignee: Sumitomo Heavy Industries, Ltd.
    Inventors: Toshiharu Tanaka, Itsushi Iio, Tsutomu Miyatake
  • Stage base, substrate processing apparatus, and maintenance method for stage
    Publication number: 20040259364
    Abstract: A stage base comprises a base body, an elevator, and a shifter. The base body has a bottom face facing a reference surface. The elevator is attached to the base body and operative to move the base body in a vertical direction with respect to the reference surface. The shifter is attached to the elevator. The shifter enables the base body to move along the reference surface.
    Type: Application
    Filed: June 15, 2004
    Publication date: December 23, 2004
    Applicant: Sumitomo Heavy Industries, Ltd.
    Inventors: Toshiharu Tanaka, Itsushi Iio, Tsutomu Miyatake
  • Substrate processing apparatus and maintenance method therefor
    Publication number: 20040211924
    Abstract: A substrate processing apparatus comprises a chamber. The chamber includes a container and an upper lid for closing an upper opening of the container. On the upper side of the chamber, an elevator for vertically moving the upper lid is disposed integrally with the chamber.
    Type: Application
    Filed: April 9, 2004
    Publication date: October 28, 2004
    Applicant: Sumitomo Heavy Industries, Ltd.
    Inventors: Toshiharu Tanaka, Itsushi Iio
  • Method of and an apparatus for producing wire
    Patent number: 5673584
    Abstract: A method of and an apparatus for rolling a rod as a starting material and producing a wire of 5 mm or smaller diameter, the method and apparatus using a continuous rolling mill comprising a plurality of round-grooved four-roll stands arranged in tandem, wherein the grooved four-roll is displaced between adjacent rolling stands by 45 degrees relative to each other around the pass line and the center-to-center distance between adjacent rolling stands measured in the pass line direction is not greater than 50 times the diameter of the rod. The front end portion of the rod is fed at slow speed into the continuous rolling mill, the front end portion being guided by a front pipe to the center of the round groove, and the front end portion is wound on a coiler.
    Type: Grant
    Filed: May 15, 1995
    Date of Patent: October 7, 1997
    Assignees: Sumitomo Metal Industries, Ltd., Sumitomo Heavy Industries, Ltd.
    Inventors: Kouichi Kuroda, Kazuyuki Nakasuji, Itsushi Iio, Shigeharu Ochi
  • Rolling mill stand
    Patent number: 5144827
    Abstract: The present invention is to provide a compact roll stand apparatus, particularly of four-roll type, comprising both a roll parting adjustment device and an all-roll drive device.
    Type: Grant
    Filed: July 11, 1991
    Date of Patent: September 8, 1992
    Assignee: Sumitomo Heavy Industries, Ltd
    Inventor: Itsushi Iio