Patents by Inventor Ivo Widdershoven

Ivo Widdershoven has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wavelength Tracking System, Method to Calibrate a Wavelength Tracking System, Lithographic Apparatus, Method to Determine an Absolute Position of a Movable Object, and Interferometer System
    Publication number: 20230056872
    Abstract: The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length.
    Type: Application
    Filed: October 20, 2022
    Publication date: February 23, 2023
    Applicant: ASML Netherlands B.V.
    Inventors: Engelbertus Antonius Fransiscus VAN DER PASCH, Suzanne Johanna Antonetta Geertruda COSIJNS, Koen Govert Olivier VAN DE MEERAKKER, Ivo WIDDERSHOVEN
  • Wavelength Tracking System, Method to Calibrate a Wavelength Tracking System, Lithographic Apparatus, Method to Determine an Absolute Position of a Movable Object, and Interferometer System
    Publication number: 20210072088
    Abstract: The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length.
    Type: Application
    Filed: January 15, 2019
    Publication date: March 11, 2021
    Applicant: ASML Netherlands B.V.
    Inventors: Engelbertus Antonius Fransiscus VAN DER PASCH, Maarten Jozef JANSEN, Suzanne Johanna Antonetta Geertruda COSIJNS, Koen Govert Olivier VAN DE MEERAKKER, Ivo WIDDERSHOVEN
  • Measuring assembly and method for determining the relative position of machine parts
    Patent number: 7849605
    Abstract: The present invention relates to a three-dimensional measuring assembly for determining the relative position of components, such as machine parts and/or instruments. The invention also relates to a method for determining the relative position of components, such as more particularly machine parts, using a reference member according to any of the foregoing claims.
    Type: Grant
    Filed: October 6, 2006
    Date of Patent: December 14, 2010
    Assignee: IBS Precision Engineering B.V.
    Inventors: Henrikus Adrianus Maria Spaan, Ivo Widdershoven
  • Measuring Assembly and Method for Determining the Relative Position of Machine Parts
    Publication number: 20090126212
    Abstract: The present invention relates to a three-dimensional measuring assembly for determining the relative position of components, such as machine parts and/or instruments. The invention also relates to a method for determining the relative position of components, such as more particularly machine parts, using a reference member according to any of the foregoing claims.
    Type: Application
    Filed: October 6, 2006
    Publication date: May 21, 2009
    Applicant: IBS Precision Engineering B.V.
    Inventors: Henrikus Adrianus Maria Spaan, Ivo Widdershoven