Patents by Inventor Iwao KAWAYAMA
Iwao KAWAYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10158325Abstract: An inspection apparatus inspects a solar cell. The inspection apparatus includes: a short-circuiting element that electrically connects an anode as a p-type semiconductor layer and a cathode as an n-type semiconductor layer of the solar cell to short-circuit the solar cell; an irradiation part that irradiates the solar cell short-circuited by the short-circuiting element with pulse light; and a detection part that detects an electromagnetic wave emitted from the solar cell in response to the irradiation of the solar cell with pulse light from the irradiation part.Type: GrantFiled: December 10, 2014Date of Patent: December 18, 2018Assignees: Screen Holdings Co., Ltd., Osaka UniversityInventors: Hidetoshi Nakanishi, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi
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Patent number: 10001441Abstract: There is provided a technique for easily inspecting the modification state of a film in a semiconductor substrate. A modification processing device modifies a film by irradiating a semiconductor substrate with pulsed light emitted from a light irradiation part. The modification processing device includes an electromagnetic wave detection part for detecting an electromagnetic wave pulse including a millimeter wave or a terahertz wave radiated from the semiconductor substrate in response to the irradiation with the pulsed light. The modification processing device further includes a modification determination part for determining the modification state, based on the intensity of the electromagnetic wave pulse.Type: GrantFiled: September 25, 2015Date of Patent: June 19, 2018Assignees: SCREEN HOLDINGS CO., LTD., OSAKA UNIVERSITYInventors: Hidetoshi Nakanishi, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi, Yuji Sakai
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Patent number: 9651607Abstract: A photo device inspection apparatus is an apparatus for inspecting a solar cell panel, which is a photo device. The photo device inspection apparatus includes an irradiation part configured to irradiate the solar cell panel with pulsed light radiated from a femtosecond laser, which is a light source, an electromagnetic wave detection part configured to detect a pulse of an electromagnetic wave radiated from the solar cell panel in response to irradiation with the pulsed light, and a current detection part configured to detect a current generated by the solar cell panel in response to irradiation with the pulsed light.Type: GrantFiled: July 9, 2014Date of Patent: May 16, 2017Assignees: SCREEN HOLDINGS CO., LTD., OSAKA UNIVERSITYInventors: Hidetoshi Nakanishi, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi
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Patent number: 9541508Abstract: An inspecting device includes: an irradiation part for dividing pulsed light emitted from a femtosecond laser into measurement pump light and measurement probe light, to irradiate a solar cell; a detection part for detecting an electromagnetic wave emitted from the solar cell in accordance with the irradiation with the measurement probe light; and a measurement delay part for delaying the time of arrival of the measurement probe light at the solar cell relatively to the measurement pump light. The irradiation part is provided with a galvano mirror for scanning with the measurement probe light a wide range which is wider than an irradiated range (pump light spot) being irradiated with the measurement pump light in a solar cell.Type: GrantFiled: March 7, 2014Date of Patent: January 10, 2017Assignees: SCREEN HOLDINGS CO., LTD., OSAKA UNIVERSITYInventors: Hidetoshi Nakanishi, Akira Ito, Masayoshi Tonouchi, Iwao Kawayama
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Patent number: 9450536Abstract: An inspection apparatus includes an irradiation part that emits plural pieces of pulse light having different wavelengths to irradiate a multi-junction type solar cell; a wavelength setting part that sets the wavelengths of the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part; and a detection part that detects an electric field intensity of an electromagnetic wave emitted from the multi-junction type solar cell in response to the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part. The irradiation part includes a delay element that delays a time the multi-junction type solar cell is irradiated with the pulse light by a time ?t11 relative to the pulse light.Type: GrantFiled: February 11, 2015Date of Patent: September 20, 2016Assignees: SCREEN HOLDINGS CO., LTD., OSAKA UNIVERSITYInventors: Hidetoshi Nakanishi, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi
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Patent number: 9404874Abstract: An inspection apparatus according to an aspect of the present invention inspects a solar cell that is of a photo device. The inspection apparatus includes: an irradiation part that irradiates the solar cell with pulse light emitted from a femtosecond laser that is of a light source; an electromagnetic wave detection part that detects an electromagnetic wave pulse emitted from the solar cell in response to the irradiation of the solar cell with the pulse light; and a PL light detection part that detects photoluminescence light generated in the solar cell in response to the irradiation of the solar cell with the pulse light.Type: GrantFiled: March 24, 2015Date of Patent: August 2, 2016Assignee: SCREEN HOLDINGS, CO., LTD.Inventors: Hidetoshi Nakanishi, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi
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Patent number: 9383321Abstract: An inspection apparatus is an apparatus for inspecting a solar cell panel. The inspection apparatus includes: an excitation light irradiation part for irradiating the solar cell panel with pulsed light for causing the solar cell panel to radiate an electromagnetic wave pulse; a detection part for detecting the electromagnetic wave pulse radiated from the solar cell panel in response to irradiation with the pulsed light; and a temperature changing part for changing a temperature of the solar cell panel at a part irradiated with the pulsed light.Type: GrantFiled: August 21, 2014Date of Patent: July 5, 2016Assignees: SCREEN HOLDINGS CO., LTD., OSAKA UNIVERSITYInventors: Hidetoshi Nakanishi, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi
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Publication number: 20160093539Abstract: There is provided a technique for easily inspecting the modification state of a film in a semiconductor substrate. A modification processing device modifies a film by irradiating a semiconductor substrate with pulsed light emitted from a light irradiation part. The modification processing device includes an electromagnetic wave detection part for detecting an electromagnetic wave pulse including a millimeter wave or a terahertz wave radiated from the semiconductor substrate in response to the irradiation with the pulsed light. The modification processing device further includes a modification determination part for determining the modification state, based on the intensity of the electromagnetic wave pulse.Type: ApplicationFiled: September 25, 2015Publication date: March 31, 2016Inventors: Hidetoshi NAKANISHI, Akira ITO, Iwao KAWAYAMA, Masayoshi TONOUCHI, Yuji SAKAI
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Patent number: 9234934Abstract: An inspecting device serves to inspect a solar cell. The inspecting device includes an irradiation part for irradiating with pulsed light and a detection part having a detector for detecting an electromagnetic wave pulse radiated from the solar cell depending on the irradiation with the pulsed light. The detector detects an electric field intensity of the electromagnetic wave pulse depending on irradiation with probe light emitted from a light source (a femtosecond laser) of the pulsed light. Moreover, the inspecting device includes a delay part for delaying a timing for detecting the electromagnetic wave pulse in the detector. Furthermore, the inspecting device includes an electromagnetic wave pulse analysis part for detecting a negative peak of the electric field intensity in a temporal waveform of the electromagnetic wave pulse.Type: GrantFiled: June 28, 2013Date of Patent: January 12, 2016Assignees: SCREEN HOLDINGS CO., LTD., OSAKA UNIVERSITYInventors: Hidetoshi Nakanishi, Akira Ito, Masayoshi Tonouchi, Iwao Kawayama
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Patent number: 9151669Abstract: An inspecting device inspects an inspecting target that is a semiconductor device or a photo device. The inspecting device includes: a stage for holding an inspecting target; a femtosecond laser for emitting pulsed light; a galvano mirror for obliquely irradiating the inspecting target with the pulsed light, while changing an optical path of the pulsed light, to scan the inspecting target with the pulsed light; and a detection part for detecting an electromagnetic wave emitted non-coaxially with the pulsed light from the inspecting target in accordance with the illumination with the pulsed light.Type: GrantFiled: February 27, 2014Date of Patent: October 6, 2015Assignee: SCREEN HOLDINGS CO., LTD.Inventors: Akira Ito, Hidetoshi Nakanishi, Masayoshi Tonouchi, Iwao Kawayama
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Publication number: 20150276607Abstract: An inspection apparatus according to an aspect of the present invention inspects a solar cell that is of a photo device. The inspection apparatus includes: an irradiation part that irradiates the solar cell with pulse light emitted from a femtosecond laser that is of a light source; an electromagnetic wave detection part that detects an electromagnetic wave pulse emitted from the solar cell in response to the irradiation of the solar cell with the pulse light; and a PL light detection part that detects photoluminescence light generated in the solar cell in response to the irradiation of the solar cell with the pulse light.Type: ApplicationFiled: March 24, 2015Publication date: October 1, 2015Inventors: Hidetoshi NAKANISHI, Akira ITO, Iwao KAWAYAMA, Masayoshi TONOUCHI
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Publication number: 20150236642Abstract: An inspection apparatus includes an irradiation part that emits plural pieces of pulse light having different wavelengths to irradiate a multi-junction type solar cell; a wavelength setting part that sets the wavelengths of the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part; and a detection part that detects an electric field intensity of an electromagnetic wave emitted from the multi-junction type solar cell in response to the plural pieces of pulse light with which the multi-junction type solar cell is irradiated by the irradiation part. The irradiation part includes a delay element that delays a time the multi-junction type solar cell is irradiated with the pulse light by a time ?t11 relative to the pulse light.Type: ApplicationFiled: February 11, 2015Publication date: August 20, 2015Inventors: Hidetoshi NAKANISHI, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi
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Patent number: 9103870Abstract: An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes: an irradiation part that irradiates the photovoltaic cell panel with pulsed light (pump light) emitted from a femtosecond laser; a detecting part that detects an electromagnetic wave pulse, which is generated from the photovoltaic cell panel according to the irradiation of the pump light; and a continuous light irradiation part that irradiates a portion, which is irradiated with the pump light in the photovoltaic cell panel, with continuous light.Type: GrantFiled: January 18, 2013Date of Patent: August 11, 2015Assignee: SCREEN HOLDINGS CO., LTD.Inventors: Hidetoshi Nakanishi, Masayoshi Tonouchi, Iwao Kawayama
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Publication number: 20150162872Abstract: An inspection apparatus inspects a solar cell. The inspection apparatus includes: a short-circuiting element that electrically connects an anode as a p-type semiconductor layer and a cathode as an n-type semiconductor layer of the solar cell to short-circuit the solar cell; an irradiation part that irradiates the solar cell short-circuited by the short-circuiting element with pulse light; and a detection part that detects an electromagnetic wave emitted from the solar cell in response to the irradiation of the solar cell with pulse light from the irradiation part.Type: ApplicationFiled: December 10, 2014Publication date: June 11, 2015Inventors: Hidetoshi NAKANISHI, Akira ITO, Iwao KAWAYAMA, Masayoshi TONOUCHI
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Publication number: 20150053869Abstract: An inspection apparatus is an apparatus for inspecting a solar cell panel. The inspection apparatus includes: an excitation light irradiation part for irradiating the solar cell panel with pulsed light for causing the solar cell panel to radiate an electromagnetic wave pulse; a detection part for detecting the electromagnetic wave pulse radiated from the solar cell panel in response to irradiation with the pulsed light; and a temperature changing part for changing a temperature of the solar cell panel at a part irradiated with the pulsed light.Type: ApplicationFiled: August 21, 2014Publication date: February 26, 2015Inventors: Hidetoshi NAKANISHI, Akira ITO, Iwao KAWAYAMA, Masayoshi TONOUCHI
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Publication number: 20150015297Abstract: A photo device inspection apparatus is an apparatus for inspecting a solar cell panel, which is a photo device. The photo device inspection apparatus includes an irradiation part configured to irradiate the solar cell panel with pulsed light radiated from a femtosecond laser, which is a light source, an electromagnetic wave detection part configured to detect a pulse of an electromagnetic wave radiated from the solar cell panel in response to irradiation with the pulsed light, and a current detection part configured to detect a current generated by the solar cell panel in response to irradiation with the pulsed light.Type: ApplicationFiled: July 9, 2014Publication date: January 15, 2015Inventors: Hidetoshi Nakanishi, Akira Ito, Iwao Kawayama, Masayoshi Tonouchi
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Patent number: 8872114Abstract: A technology of inspecting a photoexcited carrier generation area of a photo device in a non-contact manner is provided. An inspection apparatus inspects a photovoltaic cell panel in which the photo device is formed. The inspection apparatus includes an irradiation part that irradiates the photovoltaic cell panel with pulsed light from a light receiving surface side and a detecting part (detector) that detects electric field intensity of a terahertz wave pulse, which is generated according to the irradiation of the pulsed light.Type: GrantFiled: June 12, 2012Date of Patent: October 28, 2014Assignees: Dainippon Screen Mfg. Co., Ltd., Osaka UniversityInventors: Hidetoshi Nakanishi, Masayoshi Tonouchi, Iwao Kawayama
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Publication number: 20140253911Abstract: An inspecting device includes: an irradiation part for dividing pulsed light emitted from a femtosecond laser into measurement pump light and measurement probe light, to irradiate a solar cell; a detection part for detecting an electromagnetic wave emitted from the solar cell in accordance with the irradiation with the measurement probe light; and a measurement delay part for delaying the time of arrival of the measurement probe light at the solar cell relatively to the measurement pump light. The irradiation part is provided with a galvano mirror for scanning with the measurement probe light a wide range which is wider than an irradiated range (pump light spot) being irradiated with the measurement pump light in a solar cell.Type: ApplicationFiled: March 7, 2014Publication date: September 11, 2014Applicants: OSAKA UNIVERSITY, DAINIPPON SCREEN MFG. CO., LTD.Inventors: Hidetoshi Nakanishi, Akira Ito, Masayoshi Tonouchi, Iwao Kawayama
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Publication number: 20140239182Abstract: An inspecting device inspects an inspecting target that is a semiconductor device or a photo device. The inspecting device includes: a stage for holding an inspecting target; a femtosecond laser for emitting pulsed light; a galvano mirror for obliquely irradiating the inspecting target with the pulsed light, while changing an optical path of the pulsed light, to scan the inspecting target with the pulsed light; and a detection part for detecting an electromagnetic wave emitted non-coaxially with the pulsed light from the inspecting target in accordance with the illumination with the pulsed light.Type: ApplicationFiled: February 27, 2014Publication date: August 28, 2014Applicants: OSAKA UNIVERSITY, DAINIPPON SCREEN MFG. CO., LTD.Inventors: Akira ITO, Hidetoshi NAKANISHI, Masayoshi TONOUCHI, Iwao KAWAYAMA
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Publication number: 20140002125Abstract: An inspecting device serves to inspect a solar cell. The inspecting device includes an irradiation part for irradiating with pulsed light and a detection part having a detector for detecting an electromagnetic wave pulse radiated from the solar cell depending on the irradiation with the pulsed light. The detector detects an electric field intensity of the electromagnetic wave pulse depending on irradiation with probe light emitted from a light source (a femtosecond laser) of the pulsed light. Moreover, the inspecting device includes a delay part for delaying a timing for detecting the electromagnetic wave pulse in the detector. Furthermore, the inspecting device includes an electromagnetic wave pulse analysis part for detecting a negative peak of the electric field intensity in a temporal waveform of the electromagnetic wave pulse.Type: ApplicationFiled: June 28, 2013Publication date: January 2, 2014Inventors: Hidetoshi NAKANISHI, Akira ITO, Masayoshi TONOUCHI, Iwao KAWAYAMA