Abstract: A method of diagnosing a load port includes identifying a plurality of entities for a plurality of substrate storage containers by a plurality of load ports capable of transferring a substrate into and out of the plurality of substrate storage containers; detecting directly or indirectly a plurality of states of the plurality of substrate storage containers by a plurality of sensors provided at the plurality of load ports; associating the plurality of load ports, the plurality of entities and a plurality of sensor values, with each other; accumulating, in a database, data associated in the act of associating the plurality of load ports, the plurality of entities, and the plurality of sensor values; and analyzing the data in the database and determining a state of each of the plurality of load ports.

Abstract: There is provided a transfer abnormality detection system capable of receiving information from a container transfer device configured to transfer a transfer container and a mounting device configured to load the transfer container that is transferred by the container transfer device, the system including: a determination part configured to: record which container transfer device is transferring the transfer container based on a container identification ID assigned to each transfer container and a transfer device identification ID assigned to each transfer device; and determine an abnormality in either or both of the container transfer device and the transfer container by combining vibration detection information of the container transfer device obtained by a vibration detection part provided in the container transfer device and state detection information of the transfer container obtained by a container state detection part provided in the mounting device.

Abstract: A method of diagnosing a load port includes identifying a plurality of entities for a plurality of substrate storage containers by a plurality of load ports capable of transferring a substrate into and out of the plurality of substrate storage containers; detecting directly or indirectly a plurality of states of the plurality of substrate storage containers by a plurality of sensors provided at the plurality of load ports; associating the plurality of load ports, the plurality of entities and a plurality of sensor values, with each other; accumulating, in a database, data associated in the act of associating the plurality of load ports, the plurality of entities, and the plurality of sensor values; and analyzing the data in the database and determining a state of each of the plurality of load ports.

Abstract: A substrate storage container management system includes a load port, configured to transfer a substrate into and out of one or more substrate storage containers, including an ID reader configured to read one or more entity IDs for the substrate storage containers, and one or more sensors configured to directly or indirectly detect one or more states of the substrate storage containers, an associator configured to associate the entity IDs read by the ID reader with one or more sensor values detected by the sensors; a database in which data associated by the associator is accumulated, and a data processor configured to analyze the data in the database and to output a state of a respective substrate storage container for each of the entity IDs.

Abstract: There is provided a transfer abnormality detection system capable of receiving information from a container transfer device configured to transfer a transfer container and a mounting device configured to load the transfer container that is transferred by the container transfer device, the system including: a determination part configured to: record which container transfer device is transferring the transfer container based on a container identification ID assigned to each transfer container and a transfer device identification ID assigned to each transfer device; and determine an abnormality in either or both of the container transfer device and the transfer container by combining vibration detection information of the container transfer device obtained by a vibration detection part provided in the container transfer device and state detection information of the transfer container obtained by a container state detection part provided in the mounting device.

Abstract: A substrate storage container management system includes a load port, configured to transfer a substrate into and out of one or more substrate storage containers, including an ID reader configured to read one or more entity IDs for the substrate storage containers, and one or more sensors configured to directly or indirectly detect one or more states of the substrate storage containers, an associator configured to associate the entity IDs read by the ID reader with one or more sensor values detected by the sensors; a database in which data associated by the associator is accumulated, and a data processor configured to analyze the data in the database and to output a state of a respective substrate storage container for each of the entity IDs.