Patents by Inventor Jüergen SCHROEDER

Jüergen SCHROEDER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR PROCESSING OF A MATERIAL ON A SUBSTRATE AND METHOD FOR MEASURING OPTICAL PROPERTIES OF A MATERIAL PROCESSED ON A SUBSTRATE
    Publication number: 20170088941
    Abstract: According to one aspect of the present disclosure an apparatus for processing of a material on a substrate is provided. The apparatus includes a vacuum chamber and a measuring arrangement configured for measuring one or more optical properties of the substrate and/or the material processed on the substrate, the measuring arrangement including at least one sphere structure located in the vacuum chamber.
    Type: Application
    Filed: May 16, 2014
    Publication date: March 30, 2017
    Inventors: Jüergen SCHROEDER, Hans-Georg LOTZ