Patents by Inventor J Fan Chang

J Fan Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6471464
    Abstract: A device for orienting and/or centering a wafer is provided. The device employs a CCD camera and backlighting source which enhances the CCD camera's ability to detect wafer position. The backlighting source may be positioned along the side of the wafer opposite the CCD camera, or may be positioned adjacent the CCD camera. When positioned adjacent the CCD camera one or more shields are employed to prevent direct or reflected light from impacting the top surface of the wafer being detected by the CCD camera. Accordingly the only light detected by the CCD camera is light which passes the wafer and reflects from a surface therebeyond, back to the CCD camera, resulting in effective backlighting of the wafer. The image of the wafer may be further sharpened by roughening the surface from which light reflects back to CCD camera.
    Type: Grant
    Filed: October 8, 1999
    Date of Patent: October 29, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Richard Fay, Paul Peng, Wei Chen, Gino Tsai, J Fan Chang